JP2516824Y2 - 制御弁 - Google Patents

制御弁

Info

Publication number
JP2516824Y2
JP2516824Y2 JP1988112246U JP11224688U JP2516824Y2 JP 2516824 Y2 JP2516824 Y2 JP 2516824Y2 JP 1988112246 U JP1988112246 U JP 1988112246U JP 11224688 U JP11224688 U JP 11224688U JP 2516824 Y2 JP2516824 Y2 JP 2516824Y2
Authority
JP
Japan
Prior art keywords
piezo stack
valve
valve body
control valve
lower movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1988112246U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0233978U (enrdf_load_stackoverflow
Inventor
三千範 岩本
宏 大笹
隆 白井
哲夫 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Estech Corp
Original Assignee
Estech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Estech Corp filed Critical Estech Corp
Priority to JP1988112246U priority Critical patent/JP2516824Y2/ja
Publication of JPH0233978U publication Critical patent/JPH0233978U/ja
Application granted granted Critical
Publication of JP2516824Y2 publication Critical patent/JP2516824Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP1988112246U 1988-08-27 1988-08-27 制御弁 Expired - Fee Related JP2516824Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988112246U JP2516824Y2 (ja) 1988-08-27 1988-08-27 制御弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988112246U JP2516824Y2 (ja) 1988-08-27 1988-08-27 制御弁

Publications (2)

Publication Number Publication Date
JPH0233978U JPH0233978U (enrdf_load_stackoverflow) 1990-03-05
JP2516824Y2 true JP2516824Y2 (ja) 1996-11-13

Family

ID=31351010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988112246U Expired - Fee Related JP2516824Y2 (ja) 1988-08-27 1988-08-27 制御弁

Country Status (1)

Country Link
JP (1) JP2516824Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003050194A (ja) * 2001-08-08 2003-02-21 Horiba Ltd ガス希釈システム
JP2012172839A (ja) * 2011-02-24 2012-09-10 Fuji Koki Corp 電動弁

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8844901B2 (en) * 2009-03-27 2014-09-30 Horiba Stec, Co., Ltd. Flow control valve

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965491A (ja) * 1982-10-06 1984-04-13 Hitachi Ltd ピエゾ式微小変位装置
JPS61127983A (ja) * 1984-11-27 1986-06-16 Esutetsuku:Kk 流体制御用バルブ
JPS62124373A (ja) * 1985-11-21 1987-06-05 Yamada Mie 制御器
JPH0637944B2 (ja) * 1986-03-14 1994-05-18 エヌオーケー株式会社 三方弁
JPS63140179A (ja) * 1986-12-01 1988-06-11 Esutetsuku:Kk 微少流量制御弁

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003050194A (ja) * 2001-08-08 2003-02-21 Horiba Ltd ガス希釈システム
JP2012172839A (ja) * 2011-02-24 2012-09-10 Fuji Koki Corp 電動弁

Also Published As

Publication number Publication date
JPH0233978U (enrdf_load_stackoverflow) 1990-03-05

Similar Documents

Publication Publication Date Title
US5094430A (en) Control valve
KR102210858B1 (ko) 유체 제어 밸브
WO2011040409A1 (ja) 流量測定機構及びマスフローコントローラ
JP2003120832A (ja) 圧電素子駆動式金属ダイヤフラム型制御弁
JP2001141091A (ja) 流量制御弁
JP2516824Y2 (ja) 制御弁
JP2516824Z (enrdf_load_stackoverflow)
JP2529388B2 (ja) ガス流量制御装置用バルブ
JPH11108227A (ja) 流量制御弁
JPH068371Y2 (ja) 流体制御弁
JPS63199978A (ja) マスフローコントローラ
JPS5854674Y2 (ja) 重量流量型流量計量装置
JPS6188121A (ja) 圧力変換器
JPH06221459A (ja) 流量制御バルブ
US20250067347A1 (en) Flow rate control valve, manufacturing method of flow rate control valve, and flow rate control apparatus
JPH0412230A (ja) 半導体流量計及びこれを用いたマイクロポンプ
JP2600383Y2 (ja) 圧力調整器
JP3485359B2 (ja) 自動流体制御弁
JPH0676939B2 (ja) 差圧測定装置
JPH0599773A (ja) 圧力センサ
JPH0521896Y2 (enrdf_load_stackoverflow)
JPH0141007Y2 (enrdf_load_stackoverflow)
JPH10318401A (ja) 流量制御装置用バルブ
JPS63140179A (ja) 微少流量制御弁
JPH0211979A (ja) 微流量制御装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees