JP2516824Y2 - 制御弁 - Google Patents
制御弁Info
- Publication number
- JP2516824Y2 JP2516824Y2 JP1988112246U JP11224688U JP2516824Y2 JP 2516824 Y2 JP2516824 Y2 JP 2516824Y2 JP 1988112246 U JP1988112246 U JP 1988112246U JP 11224688 U JP11224688 U JP 11224688U JP 2516824 Y2 JP2516824 Y2 JP 2516824Y2
- Authority
- JP
- Japan
- Prior art keywords
- piezo stack
- valve
- valve body
- control valve
- lower movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988112246U JP2516824Y2 (ja) | 1988-08-27 | 1988-08-27 | 制御弁 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988112246U JP2516824Y2 (ja) | 1988-08-27 | 1988-08-27 | 制御弁 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0233978U JPH0233978U (da) | 1990-03-05 |
JP2516824Y2 true JP2516824Y2 (ja) | 1996-11-13 |
Family
ID=31351010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988112246U Expired - Fee Related JP2516824Y2 (ja) | 1988-08-27 | 1988-08-27 | 制御弁 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2516824Y2 (da) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003050194A (ja) * | 2001-08-08 | 2003-02-21 | Horiba Ltd | ガス希釈システム |
JP2012172839A (ja) * | 2011-02-24 | 2012-09-10 | Fuji Koki Corp | 電動弁 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8844901B2 (en) * | 2009-03-27 | 2014-09-30 | Horiba Stec, Co., Ltd. | Flow control valve |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5965491A (ja) * | 1982-10-06 | 1984-04-13 | Hitachi Ltd | ピエゾ式微小変位装置 |
JPS61127983A (ja) * | 1984-11-27 | 1986-06-16 | Esutetsuku:Kk | 流体制御用バルブ |
JPS62124373A (ja) * | 1985-11-21 | 1987-06-05 | Yamada Mie | 制御器 |
JPH0637944B2 (ja) * | 1986-03-14 | 1994-05-18 | エヌオーケー株式会社 | 三方弁 |
JPS63140179A (ja) * | 1986-12-01 | 1988-06-11 | Esutetsuku:Kk | 微少流量制御弁 |
-
1988
- 1988-08-27 JP JP1988112246U patent/JP2516824Y2/ja not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003050194A (ja) * | 2001-08-08 | 2003-02-21 | Horiba Ltd | ガス希釈システム |
JP4603207B2 (ja) * | 2001-08-08 | 2010-12-22 | 株式会社堀場製作所 | ガス希釈システム |
JP2012172839A (ja) * | 2011-02-24 | 2012-09-10 | Fuji Koki Corp | 電動弁 |
Also Published As
Publication number | Publication date |
---|---|
JPH0233978U (da) | 1990-03-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |