JP2514830Y2 - マグネトロンスパッタ装置 - Google Patents

マグネトロンスパッタ装置

Info

Publication number
JP2514830Y2
JP2514830Y2 JP40311790U JP40311790U JP2514830Y2 JP 2514830 Y2 JP2514830 Y2 JP 2514830Y2 JP 40311790 U JP40311790 U JP 40311790U JP 40311790 U JP40311790 U JP 40311790U JP 2514830 Y2 JP2514830 Y2 JP 2514830Y2
Authority
JP
Japan
Prior art keywords
target
magnet
ring
magnetic field
magnetron sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP40311790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0488009U (en, 2012
Inventor
義彦 栗山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP40311790U priority Critical patent/JP2514830Y2/ja
Publication of JPH0488009U publication Critical patent/JPH0488009U/ja
Application granted granted Critical
Publication of JP2514830Y2 publication Critical patent/JP2514830Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP40311790U 1990-12-12 1990-12-12 マグネトロンスパッタ装置 Expired - Lifetime JP2514830Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40311790U JP2514830Y2 (ja) 1990-12-12 1990-12-12 マグネトロンスパッタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40311790U JP2514830Y2 (ja) 1990-12-12 1990-12-12 マグネトロンスパッタ装置

Publications (2)

Publication Number Publication Date
JPH0488009U JPH0488009U (en, 2012) 1992-07-30
JP2514830Y2 true JP2514830Y2 (ja) 1996-10-23

Family

ID=31880946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40311790U Expired - Lifetime JP2514830Y2 (ja) 1990-12-12 1990-12-12 マグネトロンスパッタ装置

Country Status (1)

Country Link
JP (1) JP2514830Y2 (en, 2012)

Also Published As

Publication number Publication date
JPH0488009U (en, 2012) 1992-07-30

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