JP2510965Y2 - 半導体製造装置に於ける熱電対取付け構造 - Google Patents
半導体製造装置に於ける熱電対取付け構造Info
- Publication number
- JP2510965Y2 JP2510965Y2 JP15167589U JP15167589U JP2510965Y2 JP 2510965 Y2 JP2510965 Y2 JP 2510965Y2 JP 15167589 U JP15167589 U JP 15167589U JP 15167589 U JP15167589 U JP 15167589U JP 2510965 Y2 JP2510965 Y2 JP 2510965Y2
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- insertion hole
- case
- semiconductor manufacturing
- mounting structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000004065 semiconductor Substances 0.000 title claims description 5
- 238000003780 insertion Methods 0.000 claims description 19
- 230000037431 insertion Effects 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 17
- 239000011810 insulating material Substances 0.000 claims description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 10
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15167589U JP2510965Y2 (ja) | 1989-12-28 | 1989-12-28 | 半導体製造装置に於ける熱電対取付け構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15167589U JP2510965Y2 (ja) | 1989-12-28 | 1989-12-28 | 半導体製造装置に於ける熱電対取付け構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0390435U JPH0390435U (enrdf_load_stackoverflow) | 1991-09-13 |
| JP2510965Y2 true JP2510965Y2 (ja) | 1996-09-18 |
Family
ID=31697963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15167589U Expired - Lifetime JP2510965Y2 (ja) | 1989-12-28 | 1989-12-28 | 半導体製造装置に於ける熱電対取付け構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2510965Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08261844A (ja) * | 1995-03-17 | 1996-10-11 | Kokusai Electric Co Ltd | 高温炉用の炉内温度測定器 |
| US11703223B2 (en) * | 2019-09-13 | 2023-07-18 | Onpoint Technologies, Llc | Multi-function sight port and method of installing a multi-function sight port |
-
1989
- 1989-12-28 JP JP15167589U patent/JP2510965Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0390435U (enrdf_load_stackoverflow) | 1991-09-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |