JP2510367Y2 - 膜厚測定装置 - Google Patents
膜厚測定装置Info
- Publication number
- JP2510367Y2 JP2510367Y2 JP1990046600U JP4660090U JP2510367Y2 JP 2510367 Y2 JP2510367 Y2 JP 2510367Y2 JP 1990046600 U JP1990046600 U JP 1990046600U JP 4660090 U JP4660090 U JP 4660090U JP 2510367 Y2 JP2510367 Y2 JP 2510367Y2
- Authority
- JP
- Japan
- Prior art keywords
- film
- thickness
- measuring device
- laser beam
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990046600U JP2510367Y2 (ja) | 1990-05-02 | 1990-05-02 | 膜厚測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990046600U JP2510367Y2 (ja) | 1990-05-02 | 1990-05-02 | 膜厚測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH047305U JPH047305U (US20110232667A1-20110929-C00004.png) | 1992-01-23 |
JP2510367Y2 true JP2510367Y2 (ja) | 1996-09-11 |
Family
ID=31561823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990046600U Expired - Fee Related JP2510367Y2 (ja) | 1990-05-02 | 1990-05-02 | 膜厚測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2510367Y2 (US20110232667A1-20110929-C00004.png) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06248778A (ja) * | 1993-02-26 | 1994-09-06 | Misawa Ceramics Kk | パラペット版下部の取付け構造 |
JP4852903B2 (ja) * | 2005-06-16 | 2012-01-11 | 日本ゼオン株式会社 | シート状光学積層体の膜厚測定システム及び膜厚測定方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5381151A (en) * | 1976-12-27 | 1978-07-18 | Oki Electric Ind Co Ltd | Surface film thickness detector |
JPS5622903A (en) * | 1979-08-01 | 1981-03-04 | Kanai Hiroyuki | Measuring instrument for web unevenness |
-
1990
- 1990-05-02 JP JP1990046600U patent/JP2510367Y2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH047305U (US20110232667A1-20110929-C00004.png) | 1992-01-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |