JP2508489C - - Google Patents
Info
- Publication number
- JP2508489C JP2508489C JP2508489C JP 2508489 C JP2508489 C JP 2508489C JP 2508489 C JP2508489 C JP 2508489C
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film
- soft magnetic
- magnetic thin
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 107
- 230000005291 magnetic Effects 0.000 claims description 89
- 239000000203 mixture Substances 0.000 claims description 36
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 229910052803 cobalt Inorganic materials 0.000 claims description 8
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 239000010408 film Substances 0.000 description 82
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 49
- 239000002356 single layer Substances 0.000 description 27
- 239000010410 layer Substances 0.000 description 24
- 238000004544 sputter deposition Methods 0.000 description 18
- 229910002545 FeCoNi Inorganic materials 0.000 description 16
- 229910045601 alloy Inorganic materials 0.000 description 16
- 239000000956 alloy Substances 0.000 description 16
- REDXJYDRNCIFBQ-UHFFFAOYSA-N aluminium(3+) Chemical class [Al+3] REDXJYDRNCIFBQ-UHFFFAOYSA-N 0.000 description 14
- 238000000137 annealing Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 229910005347 FeSi Inorganic materials 0.000 description 5
- 239000011162 core material Substances 0.000 description 5
- 230000004907 flux Effects 0.000 description 5
- 238000010030 laminating Methods 0.000 description 5
- 238000010587 phase diagram Methods 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005294 ferromagnetic Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 125000004429 atoms Chemical group 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000875 corresponding Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000002542 deteriorative Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000001747 exhibiting Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Family
ID=
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