JP2507842Y2 - 限界電流式酸素センサ - Google Patents
限界電流式酸素センサInfo
- Publication number
- JP2507842Y2 JP2507842Y2 JP1990011462U JP1146290U JP2507842Y2 JP 2507842 Y2 JP2507842 Y2 JP 2507842Y2 JP 1990011462 U JP1990011462 U JP 1990011462U JP 1146290 U JP1146290 U JP 1146290U JP 2507842 Y2 JP2507842 Y2 JP 2507842Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sensor
- cathode
- heater
- stabilized zirconia
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000001301 oxygen Substances 0.000 title claims description 33
- 229910052760 oxygen Inorganic materials 0.000 title claims description 33
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 32
- 239000000758 substrate Substances 0.000 claims description 48
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 33
- 229910002076 stabilized zirconia Inorganic materials 0.000 claims description 17
- 239000007784 solid electrolyte Substances 0.000 claims description 11
- 239000007789 gas Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 23
- 239000011521 glass Substances 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 10
- 239000003792 electrolyte Substances 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000001552 radio frequency sputter deposition Methods 0.000 description 2
- 239000002196 Pyroceram Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990011462U JP2507842Y2 (ja) | 1990-02-09 | 1990-02-09 | 限界電流式酸素センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990011462U JP2507842Y2 (ja) | 1990-02-09 | 1990-02-09 | 限界電流式酸素センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03104849U JPH03104849U (en, 2012) | 1991-10-30 |
| JP2507842Y2 true JP2507842Y2 (ja) | 1996-08-21 |
Family
ID=31514983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990011462U Expired - Lifetime JP2507842Y2 (ja) | 1990-02-09 | 1990-02-09 | 限界電流式酸素センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2507842Y2 (en, 2012) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57192853A (en) * | 1981-05-25 | 1982-11-27 | Toyota Central Res & Dev Lab Inc | Oxygen concentration detection element and oxygen concentration detector using it |
| JPS59166854A (ja) * | 1983-03-14 | 1984-09-20 | Toyota Central Res & Dev Lab Inc | 限界電流式酸素センサ |
| JPH0676989B2 (ja) * | 1986-02-04 | 1994-09-28 | 株式会社豊田中央研究所 | 限界電流式酸素センサ |
-
1990
- 1990-02-09 JP JP1990011462U patent/JP2507842Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03104849U (en, 2012) | 1991-10-30 |
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