JP2500196Y2 - レ―ザアニ―ル装置 - Google Patents
レ―ザアニ―ル装置Info
- Publication number
- JP2500196Y2 JP2500196Y2 JP1989117086U JP11708689U JP2500196Y2 JP 2500196 Y2 JP2500196 Y2 JP 2500196Y2 JP 1989117086 U JP1989117086 U JP 1989117086U JP 11708689 U JP11708689 U JP 11708689U JP 2500196 Y2 JP2500196 Y2 JP 2500196Y2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- output
- laser light
- beams
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005224 laser annealing Methods 0.000 title description 8
- 230000003287 optical effect Effects 0.000 claims description 29
- 239000002184 metal Substances 0.000 claims description 9
- 238000000137 annealing Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 230000010287 polarization Effects 0.000 description 19
- 238000010586 diagram Methods 0.000 description 6
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 239000003638 chemical reducing agent Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 101100087530 Caenorhabditis elegans rom-1 gene Proteins 0.000 description 2
- 101100305983 Mus musculus Rom1 gene Proteins 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910021532 Calcite Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989117086U JP2500196Y2 (ja) | 1989-10-06 | 1989-10-06 | レ―ザアニ―ル装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989117086U JP2500196Y2 (ja) | 1989-10-06 | 1989-10-06 | レ―ザアニ―ル装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0355841U JPH0355841U (en, 2012) | 1991-05-29 |
| JP2500196Y2 true JP2500196Y2 (ja) | 1996-06-05 |
Family
ID=31665325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989117086U Expired - Lifetime JP2500196Y2 (ja) | 1989-10-06 | 1989-10-06 | レ―ザアニ―ル装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2500196Y2 (en, 2012) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001145723A (ja) * | 1999-11-19 | 2001-05-29 | Samii Kk | スロットマシン |
| JP5528015B2 (ja) * | 2009-06-10 | 2014-06-25 | 株式会社ディスコ | レーザ加工装置 |
| US10170892B2 (en) | 2015-06-19 | 2019-01-01 | Amada Miyachi Co., Ltd. | Laser unit and laser device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01246827A (ja) * | 1988-03-28 | 1989-10-02 | Tokyo Electron Ltd | ビームアニール装置 |
-
1989
- 1989-10-06 JP JP1989117086U patent/JP2500196Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0355841U (en, 2012) | 1991-05-29 |
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