JP2025509159A5 - - Google Patents

Info

Publication number
JP2025509159A5
JP2025509159A5 JP2024552119A JP2024552119A JP2025509159A5 JP 2025509159 A5 JP2025509159 A5 JP 2025509159A5 JP 2024552119 A JP2024552119 A JP 2024552119A JP 2024552119 A JP2024552119 A JP 2024552119A JP 2025509159 A5 JP2025509159 A5 JP 2025509159A5
Authority
JP
Japan
Prior art keywords
wafer
support
contact
elements
weight measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024552119A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025509159A (ja
Filing date
Publication date
Priority claimed from GBGB2203108.2A external-priority patent/GB202203108D0/en
Application filed filed Critical
Publication of JP2025509159A publication Critical patent/JP2025509159A/ja
Publication of JP2025509159A5 publication Critical patent/JP2025509159A5/ja
Pending legal-status Critical Current

Links

JP2024552119A 2022-03-07 2023-02-28 半導体ウエハの計量デバイス Pending JP2025509159A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB2203108.2 2022-03-07
GBGB2203108.2A GB202203108D0 (en) 2022-03-07 2022-03-07 Weighing device
PCT/EP2023/055023 WO2023169880A1 (en) 2022-03-07 2023-02-28 Weighing device for a semiconductor wafer

Publications (2)

Publication Number Publication Date
JP2025509159A JP2025509159A (ja) 2025-04-11
JP2025509159A5 true JP2025509159A5 (cg-RX-API-DMAC7.html) 2026-02-18

Family

ID=81175454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024552119A Pending JP2025509159A (ja) 2022-03-07 2023-02-28 半導体ウエハの計量デバイス

Country Status (8)

Country Link
US (1) US20250155273A1 (cg-RX-API-DMAC7.html)
EP (1) EP4490474B1 (cg-RX-API-DMAC7.html)
JP (1) JP2025509159A (cg-RX-API-DMAC7.html)
KR (2) KR20230131754A (cg-RX-API-DMAC7.html)
CN (1) CN118891495A (cg-RX-API-DMAC7.html)
GB (1) GB202203108D0 (cg-RX-API-DMAC7.html)
TW (1) TW202401620A (cg-RX-API-DMAC7.html)
WO (1) WO2023169880A1 (cg-RX-API-DMAC7.html)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0016562D0 (en) 2000-07-05 2000-08-23 Metryx Limited Apparatus and method for investigating semiconductor wafers
CN112410764A (zh) * 2019-08-23 2021-02-26 长鑫存储技术有限公司 气相沉积装置、调整方法、装置、系统、介质和电子设备
KR102508464B1 (ko) * 2021-04-01 2023-03-09 주식회사 코비스테크놀로지 질량 측정 장치

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