JP2025093980A5 - - Google Patents

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Publication number
JP2025093980A5
JP2025093980A5 JP2025033289A JP2025033289A JP2025093980A5 JP 2025093980 A5 JP2025093980 A5 JP 2025093980A5 JP 2025033289 A JP2025033289 A JP 2025033289A JP 2025033289 A JP2025033289 A JP 2025033289A JP 2025093980 A5 JP2025093980 A5 JP 2025093980A5
Authority
JP
Japan
Prior art keywords
light source
laser light
feature
imaging unit
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025033289A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025093980A (ja
Filing date
Publication date
Priority claimed from JP2022501114A external-priority patent/JP7716726B2/ja
Application filed filed Critical
Publication of JP2025093980A publication Critical patent/JP2025093980A/ja
Publication of JP2025093980A5 publication Critical patent/JP2025093980A5/ja
Pending legal-status Critical Current

Links

JP2025033289A 2019-07-10 2025-03-03 堆積装置の基材位置決め装置およびその方法 Pending JP2025093980A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201962872501P 2019-07-10 2019-07-10
US62/872,501 2019-07-10
JP2022501114A JP7716726B2 (ja) 2019-07-10 2020-06-29 堆積装置の基材位置決め装置およびその方法
PCT/US2020/040044 WO2021007054A1 (en) 2019-07-10 2020-06-29 Substrate positioning for deposition machine

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2022501114A Division JP7716726B2 (ja) 2019-07-10 2020-06-29 堆積装置の基材位置決め装置およびその方法

Publications (2)

Publication Number Publication Date
JP2025093980A JP2025093980A (ja) 2025-06-24
JP2025093980A5 true JP2025093980A5 (https=) 2025-10-23

Family

ID=74103015

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022501114A Active JP7716726B2 (ja) 2019-07-10 2020-06-29 堆積装置の基材位置決め装置およびその方法
JP2025033289A Pending JP2025093980A (ja) 2019-07-10 2025-03-03 堆積装置の基材位置決め装置およびその方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2022501114A Active JP7716726B2 (ja) 2019-07-10 2020-06-29 堆積装置の基材位置決め装置およびその方法

Country Status (6)

Country Link
US (3) US11679602B2 (https=)
EP (1) EP3997743A4 (https=)
JP (2) JP7716726B2 (https=)
KR (2) KR102835420B1 (https=)
CN (2) CN121925009A (https=)
WO (1) WO2021007054A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7716726B2 (ja) 2019-07-10 2025-08-01 カティーバ， インコーポレイテッド 堆積装置の基材位置決め装置およびその方法
US11780242B2 (en) 2020-10-27 2023-10-10 Kateeva, Inc. Substrate positioning for deposition machine
DE102021127407B4 (de) * 2021-10-21 2023-05-11 ASMPT GmbH & Co. KG Aufzeichnung von Komponentendaten

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