JP2024545492A5 - - Google Patents

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Publication number
JP2024545492A5
JP2024545492A5 JP2024532697A JP2024532697A JP2024545492A5 JP 2024545492 A5 JP2024545492 A5 JP 2024545492A5 JP 2024532697 A JP2024532697 A JP 2024532697A JP 2024532697 A JP2024532697 A JP 2024532697A JP 2024545492 A5 JP2024545492 A5 JP 2024545492A5
Authority
JP
Japan
Prior art keywords
pump
vacuum
sensor
leak detector
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024532697A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024545492A (ja
Filing date
Publication date
Priority claimed from DE102021132252.9A external-priority patent/DE102021132252A1/de
Application filed filed Critical
Publication of JP2024545492A publication Critical patent/JP2024545492A/ja
Publication of JP2024545492A5 publication Critical patent/JP2024545492A5/ja
Pending legal-status Critical Current

Links

JP2024532697A 2021-12-08 2022-12-06 多段真空ポンプ及び一体型特定ガス用ガスセンサを備えた真空リークディテクタならびに真空リークディテクタの製造方法 Pending JP2024545492A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021132252.9 2021-12-08
DE102021132252.9A DE102021132252A1 (de) 2021-12-08 2021-12-08 Vakuumleckdetektor mit mehrstufiger Vakuumpumpe und integriertem gasspezifischem Gassensor sowie Verfahren zum Herstellen eines Vakuumleckdetektors
PCT/EP2022/084572 WO2023104781A1 (de) 2021-12-08 2022-12-06 Vakuumleckdetektor mit mehrstufiger vakuumpumpe und integriertem gasspezifischem gassensor sowie verfahren zum herstellen eines vakuumleckdetektors

Publications (2)

Publication Number Publication Date
JP2024545492A JP2024545492A (ja) 2024-12-09
JP2024545492A5 true JP2024545492A5 (https=) 2025-04-21

Family

ID=84421663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024532697A Pending JP2024545492A (ja) 2021-12-08 2022-12-06 多段真空ポンプ及び一体型特定ガス用ガスセンサを備えた真空リークディテクタならびに真空リークディテクタの製造方法

Country Status (6)

Country Link
US (1) US20250020534A1 (https=)
EP (1) EP4445110A1 (https=)
JP (1) JP2024545492A (https=)
CN (1) CN118355254A (https=)
DE (1) DE102021132252A1 (https=)
WO (1) WO2023104781A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
DE102021125707A1 (de) * 2021-10-04 2023-04-06 Inficon Gmbh Lecksuche bei viskoser Strömung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3828588C1 (https=) * 1988-08-23 1989-12-07 Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De
DE10055057A1 (de) 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
EP3208591A1 (en) * 2016-02-17 2017-08-23 Inficon GmbH Vacuum bell probe and method for leak detection
FR3092913B1 (fr) 2019-02-14 2021-04-30 Pfeiffer Vacuum Sonde de reniflage et détecteur de fuites

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