CN118355254A - 一种气体专用的真空泄漏检测仪及其生产方法 - Google Patents

一种气体专用的真空泄漏检测仪及其生产方法 Download PDF

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Publication number
CN118355254A
CN118355254A CN202280079891.7A CN202280079891A CN118355254A CN 118355254 A CN118355254 A CN 118355254A CN 202280079891 A CN202280079891 A CN 202280079891A CN 118355254 A CN118355254 A CN 118355254A
Authority
CN
China
Prior art keywords
gas
pump
sensor
leak detector
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280079891.7A
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English (en)
Chinese (zh)
Inventor
卡斯滕·斯特里泽尔
伊万·博卡诺维奇
亚尔马尔·布鲁恩斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of CN118355254A publication Critical patent/CN118355254A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
CN202280079891.7A 2021-12-08 2022-12-06 一种气体专用的真空泄漏检测仪及其生产方法 Pending CN118355254A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021132252.9 2021-12-08
DE102021132252.9A DE102021132252A1 (de) 2021-12-08 2021-12-08 Vakuumleckdetektor mit mehrstufiger Vakuumpumpe und integriertem gasspezifischem Gassensor sowie Verfahren zum Herstellen eines Vakuumleckdetektors
PCT/EP2022/084572 WO2023104781A1 (de) 2021-12-08 2022-12-06 Vakuumleckdetektor mit mehrstufiger vakuumpumpe und integriertem gasspezifischem gassensor sowie verfahren zum herstellen eines vakuumleckdetektors

Publications (1)

Publication Number Publication Date
CN118355254A true CN118355254A (zh) 2024-07-16

Family

ID=84421663

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280079891.7A Pending CN118355254A (zh) 2021-12-08 2022-12-06 一种气体专用的真空泄漏检测仪及其生产方法

Country Status (6)

Country Link
US (1) US20250020534A1 (https=)
EP (1) EP4445110A1 (https=)
JP (1) JP2024545492A (https=)
CN (1) CN118355254A (https=)
DE (1) DE102021132252A1 (https=)
WO (1) WO2023104781A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
DE102021125707A1 (de) * 2021-10-04 2023-04-06 Inficon Gmbh Lecksuche bei viskoser Strömung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3828588C1 (https=) * 1988-08-23 1989-12-07 Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De
DE10055057A1 (de) 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
EP3208591A1 (en) * 2016-02-17 2017-08-23 Inficon GmbH Vacuum bell probe and method for leak detection
FR3092913B1 (fr) 2019-02-14 2021-04-30 Pfeiffer Vacuum Sonde de reniflage et détecteur de fuites

Also Published As

Publication number Publication date
JP2024545492A (ja) 2024-12-09
US20250020534A1 (en) 2025-01-16
DE102021132252A1 (de) 2023-06-15
EP4445110A1 (de) 2024-10-16
WO2023104781A1 (de) 2023-06-15

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