WO2023104781A1 - Vakuumleckdetektor mit mehrstufiger vakuumpumpe und integriertem gasspezifischem gassensor sowie verfahren zum herstellen eines vakuumleckdetektors - Google Patents

Vakuumleckdetektor mit mehrstufiger vakuumpumpe und integriertem gasspezifischem gassensor sowie verfahren zum herstellen eines vakuumleckdetektors Download PDF

Info

Publication number
WO2023104781A1
WO2023104781A1 PCT/EP2022/084572 EP2022084572W WO2023104781A1 WO 2023104781 A1 WO2023104781 A1 WO 2023104781A1 EP 2022084572 W EP2022084572 W EP 2022084572W WO 2023104781 A1 WO2023104781 A1 WO 2023104781A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
vacuum
pump
leak detector
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2022/084572
Other languages
German (de)
English (en)
French (fr)
Inventor
Carsten Strietzel
Ivan BOKANOVIC
Hjalmar Bruhns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Priority to CN202280079891.7A priority Critical patent/CN118355254A/zh
Priority to US18/715,899 priority patent/US20250020534A1/en
Priority to EP22818456.0A priority patent/EP4445110A1/de
Priority to JP2024532697A priority patent/JP2024545492A/ja
Publication of WO2023104781A1 publication Critical patent/WO2023104781A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a gas-specific vacuum leak detector with a multi-stage vacuum pump and a gas-specific sensor.
  • a test chamber is connected to a vacuum pump to evacuate gas from the test chamber.
  • a test specimen in the test chamber or the chamber itself is the test specimen. If the test piece leaks, gas will leak from the test piece into the test chamber and be fed to a gas sensor connected to the test chamber.
  • the gas sensor is conventionally a device separate from the vacuum pump, for example in the form of a Total pressure measuring device or in the form of a gas-type-dependent, i.e. gas-specific sensor such as a mass spectrometer, an optical sensor, an IR absorption unit or a metal oxide sensor.
  • the object of the invention is to provide an improved, less expensive and technically simplified gas-specific vacuum leak detector and a corresponding method for producing a gas-specific vacuum leak detector.
  • the gas-specific, ie gas-specific gas sensor which responds selectively and optionally adjustable to a specific type of gas, is an integral part of the vacuum pump and is thus designed to detect a specific gas within the vacuum pump.
  • the gas sensor therefore does not detect a gas within the test chamber or within a line path connected to the vacuum pump or a pumping stage of the vacuum pump, but rather directly within the vacuum pump.
  • a gas-specific gas sensor is integrated into a multi-stage vacuum pump in such a way that the gas-specific gas sensor is an integral part of the vacuum pump and is thus designed to detect a specific gas within the vacuum pump.
  • the multiple pump stages of the vacuum pump are advantageously surrounded by a common housing in which the gas sensor is also arranged.
  • the Housing of the vacuum pump is different from the housing of the test chamber and/or from the housing of a possible separate gas detector.
  • the vacuum pump can have a connection for a test chamber or for a test object.
  • the connection is preferably provided on the housing.
  • the housing of the vacuum pump can have a further connection for a separate gas detector.
  • a branch connected to the gas sensor can be provided upstream of at least one of the pump stages in the conveying direction of the vacuum pump.
  • the branch may be provided with a selectively operable check valve.
  • the valve can be provided with a valve control which is designed to actuate the valve depending on the speed or the power consumption of the vacuum pump or at least one pump stage of the vacuum pump.
  • the sensor can be a membrane sensor, a semiconductor or metal oxide sensor, a mass spectrometer, a CC sensor, an infrared absorption sensor or a gas-specific emission spectroscopic sensor.
  • the respective sensor should preferably be able to detect with sufficient sensitivity at least one test gas typically used for leak detection, such as hydrogen, helium, CO2 and/or hydrocarbon.
  • the vacuum pump can be a multistage scroll pump, a rotary vane pump, a Roots pump or a screw stage pump.
  • a multi-stage vacuum pump 12 is connected to a test chamber 16 via a connecting line 14 in order to evacuate the test chamber 16 .
  • the test chamber 16 either contains an object to be tested for leaks or is itself the object to be checked for leaks.
  • the connecting line 14 is provided with a separately closable branch 18 with a connection 20 to which a gas detector can be connected.
  • the vacuum pump 12 has a housing 22 that differs from the housing 24 of the test chamber 16 and from the housing of a possible, separate gas detector, which can be connected to the connection 20, for example.
  • the vacuum pump 12 is a multi-stage vacuum pump with two pump stages 26, 28, each of which is also arranged within the common housing 22.
  • the two pump stages 26, 28 are connected by a channel 30 which has a branch 32 to which a gas-specific gas sensor 34 is connected.
  • the branch 32 is provided with a shut-off valve 36 that can be locked separately via a valve control, not shown in the figure.
  • the valve 36 is arranged between the two pump stages 26, 28 and the gas sensor 34 in order to separate the gas sensor 34 from the two pump stages 26, 28 in terms of gas technology.
  • the gas sensor 34 is a membrane sensor (e.g. WISE Technology Sensor).
  • the check valve 36 is locked in a basic state and opens automatically when a predetermined speed or power consumption of the two pump stages 26, 28 is exceeded.
  • the sensor 34, the check valve 36, the branch 32 and the two pump stages 26, 28 are each integral parts of the vacuum pump 12 and are therefore arranged within the common housing 22 surrounding these components.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
PCT/EP2022/084572 2021-12-08 2022-12-06 Vakuumleckdetektor mit mehrstufiger vakuumpumpe und integriertem gasspezifischem gassensor sowie verfahren zum herstellen eines vakuumleckdetektors Ceased WO2023104781A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN202280079891.7A CN118355254A (zh) 2021-12-08 2022-12-06 一种气体专用的真空泄漏检测仪及其生产方法
US18/715,899 US20250020534A1 (en) 2021-12-08 2022-12-06 Vacuum leak detector with multistage vacuum pump and integrated gas-specific gas sensor and method for producing a vacuum leak detector
EP22818456.0A EP4445110A1 (de) 2021-12-08 2022-12-06 Vakuumleckdetektor mit mehrstufiger vakuumpumpe und integriertem gasspezifischem gassensor sowie verfahren zum herstellen eines vakuumleckdetektors
JP2024532697A JP2024545492A (ja) 2021-12-08 2022-12-06 多段真空ポンプ及び一体型特定ガス用ガスセンサを備えた真空リークディテクタならびに真空リークディテクタの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021132252.9 2021-12-08
DE102021132252.9A DE102021132252A1 (de) 2021-12-08 2021-12-08 Vakuumleckdetektor mit mehrstufiger Vakuumpumpe und integriertem gasspezifischem Gassensor sowie Verfahren zum Herstellen eines Vakuumleckdetektors

Publications (1)

Publication Number Publication Date
WO2023104781A1 true WO2023104781A1 (de) 2023-06-15

Family

ID=84421663

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2022/084572 Ceased WO2023104781A1 (de) 2021-12-08 2022-12-06 Vakuumleckdetektor mit mehrstufiger vakuumpumpe und integriertem gasspezifischem gassensor sowie verfahren zum herstellen eines vakuumleckdetektors

Country Status (6)

Country Link
US (1) US20250020534A1 (https=)
EP (1) EP4445110A1 (https=)
JP (1) JP2024545492A (https=)
CN (1) CN118355254A (https=)
DE (1) DE102021132252A1 (https=)
WO (1) WO2023104781A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
DE102021125707A1 (de) * 2021-10-04 2023-04-06 Inficon Gmbh Lecksuche bei viskoser Strömung

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4984450A (en) * 1988-08-23 1991-01-15 Alcatel Cit Method of leak testing a test container with a tracer gas
US11009422B2 (en) * 2016-02-17 2021-05-18 Inficon Holding Ag Vacuum bell probe and method for leak detection

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10055057A1 (de) 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
FR3092913B1 (fr) 2019-02-14 2021-04-30 Pfeiffer Vacuum Sonde de reniflage et détecteur de fuites

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4984450A (en) * 1988-08-23 1991-01-15 Alcatel Cit Method of leak testing a test container with a tracer gas
US11009422B2 (en) * 2016-02-17 2021-05-18 Inficon Holding Ag Vacuum bell probe and method for leak detection

Also Published As

Publication number Publication date
CN118355254A (zh) 2024-07-16
JP2024545492A (ja) 2024-12-09
US20250020534A1 (en) 2025-01-16
DE102021132252A1 (de) 2023-06-15
EP4445110A1 (de) 2024-10-16

Similar Documents

Publication Publication Date Title
EP0615615B1 (de) Lecksucher für vakuumanlagen sowie verfahren zur durchführung der lecksuche an vakuumanlagen
EP0793802B1 (de) Lecksuchgerät mit vakuumpumpen und betriebsverfahren dazu
WO2023104781A1 (de) Vakuumleckdetektor mit mehrstufiger vakuumpumpe und integriertem gasspezifischem gassensor sowie verfahren zum herstellen eines vakuumleckdetektors
EP2601498B1 (de) Lecksuchgerät
DE1648648B2 (de) Anordnung zur Lecksuche nach dem Massenspektrometer Prinzip
EP1205741B1 (de) Leckdetektorpumpe mit Ventilkörpern im Gehäuse
EP0344345A1 (de) Pumpsystem für ein Lecksuchgerät
DE2049117A1 (de) Gasleckanzeigesystem
WO2017216173A1 (de) Massenspektrometrischer lecksucher mit turbomolekularpumpe und boosterpumpe auf gemeinsamer welle
DE102009010064A1 (de) Schnüffellecksucher
EP4185851B1 (de) Vakuumlecksuchsystem, gassteuereinheit und verfahren zur gaslecksuche
DE10156205A1 (de) Testgaslecksuchgerät
EP0834061B1 (de) Lecksuchgerät mit vorvakuumpumpe
EP4264218A1 (de) Gaslecksuchvorrichtung und gaslecksuchverfahren zur erkennung eines gaslecks in einem prüfling
EP0718613B1 (de) Verfahren zur Gasanalyse und Gasanalysator
DE102020132896A1 (de) Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe
DE1201583B (de) Verfahren zur laufenden Fernueberwachung der Luftzusammensetzung, insbesondere in gift-, explosions- oder feuergefaehrdeten Raeumen und Anordnung zur Durchfuehrung des Verfahrens
DE102005054638B4 (de) Mobiles Lecksuchegerät
DE10334455B4 (de) Lecksuchverfahren und Lecksuchanordnung zur Durchführung des Verfahrens
DE9405028U1 (de) Testgas-Lecksuchgerät
DE102024108064A1 (de) Vakuumlecksuchsystem und Verfahren zum Evakuieren eines Prüfanschlusses
DE102006056550B4 (de) Vorrichtung für eine Dichtheitsprüfung
EP4544280A1 (de) Verfahren zur messung der umgebungskonzentration eines leichten gases mit einer massenspektrometrischen gegenstrom-lecksuchvorrichtung

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22818456

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 202417039735

Country of ref document: IN

ENP Entry into the national phase

Ref document number: 2024532697

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 18715899

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 202280079891.7

Country of ref document: CN

WWE Wipo information: entry into national phase

Ref document number: 2022818456

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 2022818456

Country of ref document: EP

Effective date: 20240708