JP2024545492A - 多段真空ポンプ及び一体型特定ガス用ガスセンサを備えた真空リークディテクタならびに真空リークディテクタの製造方法 - Google Patents

多段真空ポンプ及び一体型特定ガス用ガスセンサを備えた真空リークディテクタならびに真空リークディテクタの製造方法 Download PDF

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JP2024545492A
JP2024545492A JP2024532697A JP2024532697A JP2024545492A JP 2024545492 A JP2024545492 A JP 2024545492A JP 2024532697 A JP2024532697 A JP 2024532697A JP 2024532697 A JP2024532697 A JP 2024532697A JP 2024545492 A JP2024545492 A JP 2024545492A
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Japan
Prior art keywords
vacuum
pump
leak detector
vacuum pump
sensor
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Pending
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JP2024532697A
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Japanese (ja)
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JP2024545492A5 (https=
Inventor
シュトリーツェル・カーステン
ボカノビック・イワン
ブルーンス・ヤルマル
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Inficon GmbH
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Inficon GmbH
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Application filed by Inficon GmbH filed Critical Inficon GmbH
Publication of JP2024545492A publication Critical patent/JP2024545492A/ja
Publication of JP2024545492A5 publication Critical patent/JP2024545492A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
JP2024532697A 2021-12-08 2022-12-06 多段真空ポンプ及び一体型特定ガス用ガスセンサを備えた真空リークディテクタならびに真空リークディテクタの製造方法 Pending JP2024545492A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021132252.9 2021-12-08
DE102021132252.9A DE102021132252A1 (de) 2021-12-08 2021-12-08 Vakuumleckdetektor mit mehrstufiger Vakuumpumpe und integriertem gasspezifischem Gassensor sowie Verfahren zum Herstellen eines Vakuumleckdetektors
PCT/EP2022/084572 WO2023104781A1 (de) 2021-12-08 2022-12-06 Vakuumleckdetektor mit mehrstufiger vakuumpumpe und integriertem gasspezifischem gassensor sowie verfahren zum herstellen eines vakuumleckdetektors

Publications (2)

Publication Number Publication Date
JP2024545492A true JP2024545492A (ja) 2024-12-09
JP2024545492A5 JP2024545492A5 (https=) 2025-04-21

Family

ID=84421663

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Application Number Title Priority Date Filing Date
JP2024532697A Pending JP2024545492A (ja) 2021-12-08 2022-12-06 多段真空ポンプ及び一体型特定ガス用ガスセンサを備えた真空リークディテクタならびに真空リークディテクタの製造方法

Country Status (6)

Country Link
US (1) US20250020534A1 (https=)
EP (1) EP4445110A1 (https=)
JP (1) JP2024545492A (https=)
CN (1) CN118355254A (https=)
DE (1) DE102021132252A1 (https=)
WO (1) WO2023104781A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
DE102021125707A1 (de) * 2021-10-04 2023-04-06 Inficon Gmbh Lecksuche bei viskoser Strömung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3828588C1 (https=) * 1988-08-23 1989-12-07 Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De
DE10055057A1 (de) 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
EP3208591A1 (en) * 2016-02-17 2017-08-23 Inficon GmbH Vacuum bell probe and method for leak detection
FR3092913B1 (fr) 2019-02-14 2021-04-30 Pfeiffer Vacuum Sonde de reniflage et détecteur de fuites

Also Published As

Publication number Publication date
CN118355254A (zh) 2024-07-16
US20250020534A1 (en) 2025-01-16
DE102021132252A1 (de) 2023-06-15
EP4445110A1 (de) 2024-10-16
WO2023104781A1 (de) 2023-06-15

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