JP2024545433A5 - - Google Patents
Info
- Publication number
- JP2024545433A5 JP2024545433A5 JP2024532791A JP2024532791A JP2024545433A5 JP 2024545433 A5 JP2024545433 A5 JP 2024545433A5 JP 2024532791 A JP2024532791 A JP 2024532791A JP 2024532791 A JP2024532791 A JP 2024532791A JP 2024545433 A5 JP2024545433 A5 JP 2024545433A5
- Authority
- JP
- Japan
- Prior art keywords
- coating
- crosslinked
- mol
- copolymer
- repeating units
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163264797P | 2021-12-02 | 2021-12-02 | |
| US63/264,797 | 2021-12-02 | ||
| US202263322334P | 2022-03-22 | 2022-03-22 | |
| US63/322,334 | 2022-03-22 | ||
| PCT/EP2022/083791 WO2023099534A1 (en) | 2021-12-02 | 2022-11-30 | Neutral layer and hydrophobic pinning mat materials for use in dsa with improved substrate compatibility |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024545433A JP2024545433A (ja) | 2024-12-06 |
| JP2024545433A5 true JP2024545433A5 (https=) | 2025-11-28 |
Family
ID=84536995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024532791A Pending JP2024545433A (ja) | 2021-12-02 | 2022-11-30 | 改善された基材適合性を有するｄｓａに使用するための中性層及び疎水性ピン止めｍａｔ材料 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12509540B2 (https=) |
| EP (1) | EP4441110A1 (https=) |
| JP (1) | JP2024545433A (https=) |
| KR (1) | KR102935027B1 (https=) |
| WO (1) | WO2023099534A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12509540B2 (en) | 2021-12-02 | 2025-12-30 | Merck Patent Gmbh | Development of novel neutral layer and hydrophobic pinning mat materials for use in DSA with improved substrate compatibility |
| TW202600500A (zh) * | 2024-03-15 | 2026-01-01 | 德商默克專利有限公司 | 可硬化之組成物 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8691925B2 (en) * | 2011-09-23 | 2014-04-08 | Az Electronic Materials (Luxembourg) S.A.R.L. | Compositions of neutral layer for directed self assembly block copolymers and processes thereof |
| JP6558894B2 (ja) | 2013-12-31 | 2019-08-14 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ | コポリマーの設計、その製造方法およびそれを含む物品 |
| US9574104B1 (en) * | 2015-10-16 | 2017-02-21 | Az Electronic Materials (Luxembourg) S.A.R.L. | Compositions and processes for self-assembly of block copolymers |
| US10961383B2 (en) * | 2018-02-01 | 2021-03-30 | Brewer Science, Inc. | Gradient block copolymers for directed self-assembly |
| EP3528045A1 (en) * | 2018-02-16 | 2019-08-21 | IMEC vzw | Method for forming a cross-linked layer |
| US11384193B2 (en) * | 2019-09-10 | 2022-07-12 | Merck Patent Gmbh | Hydrophobic pinning mat for directed self-assembly of diblock copolymer novel compositions and processes for self-assembly of block copolymers |
| JP2022077356A (ja) * | 2020-11-11 | 2022-05-23 | Jsr株式会社 | 組成物、基材の製造方法及び基材表面の選択的修飾方法 |
| JP7648560B2 (ja) * | 2021-02-26 | 2025-03-18 | Jsr株式会社 | 多層配線基板の製造方法、積層膜形成用キット及び組成物 |
| US12509540B2 (en) | 2021-12-02 | 2025-12-30 | Merck Patent Gmbh | Development of novel neutral layer and hydrophobic pinning mat materials for use in DSA with improved substrate compatibility |
-
2022
- 2022-11-30 US US18/711,795 patent/US12509540B2/en active Active
- 2022-11-30 WO PCT/EP2022/083791 patent/WO2023099534A1/en not_active Ceased
- 2022-11-30 EP EP22826063.4A patent/EP4441110A1/en active Pending
- 2022-11-30 JP JP2024532791A patent/JP2024545433A/ja active Pending
- 2022-11-30 KR KR1020247022039A patent/KR102935027B1/ko active Active
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