JP2024539698A5 - - Google Patents
Info
- Publication number
- JP2024539698A5 JP2024539698A5 JP2024525228A JP2024525228A JP2024539698A5 JP 2024539698 A5 JP2024539698 A5 JP 2024539698A5 JP 2024525228 A JP2024525228 A JP 2024525228A JP 2024525228 A JP2024525228 A JP 2024525228A JP 2024539698 A5 JP2024539698 A5 JP 2024539698A5
- Authority
- JP
- Japan
- Prior art keywords
- holes
- shower head
- diameter
- approximately
- base portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163263290P | 2021-10-29 | 2021-10-29 | |
| US63/263,290 | 2021-10-29 | ||
| PCT/US2022/078786 WO2023077002A1 (en) | 2021-10-29 | 2022-10-27 | Showerhead with hole sizes for radical species delivery |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024539698A JP2024539698A (ja) | 2024-10-29 |
| JP2024539698A5 true JP2024539698A5 (https=) | 2025-10-28 |
Family
ID=86158725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024525228A Pending JP2024539698A (ja) | 2021-10-29 | 2022-10-27 | ラジカル種供給のための穴サイズを有するシャワーヘッド |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20250006515A1 (https=) |
| JP (1) | JP2024539698A (https=) |
| KR (1) | KR20240093865A (https=) |
| CN (1) | CN118215980A (https=) |
| TW (1) | TW202336801A (https=) |
| WO (1) | WO2023077002A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10604841B2 (en) | 2016-12-14 | 2020-03-31 | Lam Research Corporation | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition |
| KR20260046529A (ko) | 2019-08-23 | 2026-04-07 | 램 리써치 코포레이션 | 열 제어된 샹들리에 샤워헤드 |
| CN114929935A (zh) * | 2020-01-06 | 2022-08-19 | 朗姆研究公司 | 带有内部轮廓的面板的喷头 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101281188B1 (ko) * | 2007-01-25 | 2013-07-02 | 최대규 | 유도 결합 플라즈마 반응기 |
| KR101477602B1 (ko) * | 2012-10-30 | 2014-12-30 | 피에스케이 주식회사 | 기판 처리 장치 |
| US20140235069A1 (en) * | 2013-02-15 | 2014-08-21 | Novellus Systems, Inc. | Multi-plenum showerhead with temperature control |
| US10604841B2 (en) * | 2016-12-14 | 2020-03-31 | Lam Research Corporation | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition |
| US20190119815A1 (en) * | 2017-10-24 | 2019-04-25 | Applied Materials, Inc. | Systems and processes for plasma filtering |
-
2022
- 2022-10-27 TW TW111140857A patent/TW202336801A/zh unknown
- 2022-10-27 JP JP2024525228A patent/JP2024539698A/ja active Pending
- 2022-10-27 KR KR1020247017003A patent/KR20240093865A/ko active Pending
- 2022-10-27 US US18/703,982 patent/US20250006515A1/en active Pending
- 2022-10-27 CN CN202280073138.7A patent/CN118215980A/zh active Pending
- 2022-10-27 WO PCT/US2022/078786 patent/WO2023077002A1/en not_active Ceased
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