JP2024528811A5 - - Google Patents

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Publication number
JP2024528811A5
JP2024528811A5 JP2024501111A JP2024501111A JP2024528811A5 JP 2024528811 A5 JP2024528811 A5 JP 2024528811A5 JP 2024501111 A JP2024501111 A JP 2024501111A JP 2024501111 A JP2024501111 A JP 2024501111A JP 2024528811 A5 JP2024528811 A5 JP 2024528811A5
Authority
JP
Japan
Prior art keywords
layer
annealing
silicon layer
silicon
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024501111A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024528811A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2022/072295 external-priority patent/WO2023017010A1/de
Publication of JP2024528811A publication Critical patent/JP2024528811A/ja
Publication of JP2024528811A5 publication Critical patent/JP2024528811A5/ja
Pending legal-status Critical Current

Links

JP2024501111A 2021-08-09 2022-08-09 リチウム電池のアノードとしてのシリコン電極を製造するための方法 Pending JP2024528811A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021120615.4 2021-08-09
DE102021120615 2021-08-09
PCT/EP2022/072295 WO2023017010A1 (de) 2021-08-09 2022-08-09 Verfahren zur herstellung von silizium-elektroden als anoden für lithium-batterien

Publications (2)

Publication Number Publication Date
JP2024528811A JP2024528811A (ja) 2024-08-01
JP2024528811A5 true JP2024528811A5 (enExample) 2025-08-18

Family

ID=83193537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024501111A Pending JP2024528811A (ja) 2021-08-09 2022-08-09 リチウム電池のアノードとしてのシリコン電極を製造するための方法

Country Status (6)

Country Link
US (1) US20240417843A1 (enExample)
EP (1) EP4385080A1 (enExample)
JP (1) JP2024528811A (enExample)
KR (1) KR20240039193A (enExample)
CN (1) CN117795700A (enExample)
WO (1) WO2023017010A1 (enExample)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6872607B2 (en) * 2000-03-21 2005-03-29 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
KR100878718B1 (ko) * 2007-08-28 2009-01-14 한국과학기술연구원 리튬이차전지용 실리콘 박막 음극, 이의 제조방법 및 이를포함하는 리튬이차전지
US20120115259A1 (en) * 2010-11-10 2012-05-10 Keon Jae Lee Method for fabricating flexible electronic device and electronic device fabricated thereby
US20160013477A1 (en) * 2014-05-22 2016-01-14 Paideia LLC Silicon nanocomposite anode for lithium ion battery
DE102016001949B4 (de) * 2016-02-15 2020-10-15 Helmholtz-Zentrum Dresden-Rossendorf E. V. Verfahren zur Herstellung von auf Silizium basierenden Anoden für Sekundärbatterien
US11502293B2 (en) * 2021-03-17 2022-11-15 Enevate Corporation Method and system for copper coated anode active material

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