CN117795700A - 一种制造作为锂电池用阳极的硅电极的方法 - Google Patents

一种制造作为锂电池用阳极的硅电极的方法 Download PDF

Info

Publication number
CN117795700A
CN117795700A CN202280055553.XA CN202280055553A CN117795700A CN 117795700 A CN117795700 A CN 117795700A CN 202280055553 A CN202280055553 A CN 202280055553A CN 117795700 A CN117795700 A CN 117795700A
Authority
CN
China
Prior art keywords
layer
silicon
copper
annealing
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280055553.XA
Other languages
English (en)
Chinese (zh)
Inventor
U·赖希曼
M·纽伯特
A·克劳斯-巴德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Knox West Ltd
Original Assignee
Knox West Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Knox West Ltd filed Critical Knox West Ltd
Publication of CN117795700A publication Critical patent/CN117795700A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H01M4/1395—Processes of manufacture of electrodes based on metals, Si or alloys
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C23C14/5813—Thermal treatment using lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0423—Physical vapour deposition
    • H01M4/0426—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0471—Processes of manufacture in general involving thermal treatment, e.g. firing, sintering, backing particulate active material, thermal decomposition, pyrolysis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/362—Composites
    • H01M4/366—Composites as layered products
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
    • H01M4/386—Silicon or alloys based on silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/64—Carriers or collectors
    • H01M4/66—Selection of materials
    • H01M4/661—Metal or alloys, e.g. alloy coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M2004/026—Electrodes composed of, or comprising, active material characterised by the polarity
    • H01M2004/027—Negative electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Thermal Sciences (AREA)
  • Optics & Photonics (AREA)
  • Cell Electrode Carriers And Collectors (AREA)
  • Battery Electrode And Active Subsutance (AREA)
CN202280055553.XA 2021-08-09 2022-08-09 一种制造作为锂电池用阳极的硅电极的方法 Pending CN117795700A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021120615.4 2021-08-09
DE102021120615 2021-08-09
PCT/EP2022/072295 WO2023017010A1 (de) 2021-08-09 2022-08-09 Verfahren zur herstellung von silizium-elektroden als anoden für lithium-batterien

Publications (1)

Publication Number Publication Date
CN117795700A true CN117795700A (zh) 2024-03-29

Family

ID=83193537

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280055553.XA Pending CN117795700A (zh) 2021-08-09 2022-08-09 一种制造作为锂电池用阳极的硅电极的方法

Country Status (6)

Country Link
US (1) US20240417843A1 (enExample)
EP (1) EP4385080A1 (enExample)
JP (1) JP2024528811A (enExample)
KR (1) KR20240039193A (enExample)
CN (1) CN117795700A (enExample)
WO (1) WO2023017010A1 (enExample)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6872607B2 (en) * 2000-03-21 2005-03-29 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
KR100878718B1 (ko) * 2007-08-28 2009-01-14 한국과학기술연구원 리튬이차전지용 실리콘 박막 음극, 이의 제조방법 및 이를포함하는 리튬이차전지
US20120115259A1 (en) * 2010-11-10 2012-05-10 Keon Jae Lee Method for fabricating flexible electronic device and electronic device fabricated thereby
US20160013477A1 (en) * 2014-05-22 2016-01-14 Paideia LLC Silicon nanocomposite anode for lithium ion battery
DE102016001949B4 (de) * 2016-02-15 2020-10-15 Helmholtz-Zentrum Dresden-Rossendorf E. V. Verfahren zur Herstellung von auf Silizium basierenden Anoden für Sekundärbatterien
US11502293B2 (en) * 2021-03-17 2022-11-15 Enevate Corporation Method and system for copper coated anode active material

Also Published As

Publication number Publication date
KR20240039193A (ko) 2024-03-26
US20240417843A1 (en) 2024-12-19
WO2023017010A1 (de) 2023-02-16
EP4385080A1 (de) 2024-06-19
JP2024528811A (ja) 2024-08-01

Similar Documents

Publication Publication Date Title
CN112400245B (zh) 具有包含多孔区域的阳极结构的可再充电锂离子电池
KR100878718B1 (ko) 리튬이차전지용 실리콘 박막 음극, 이의 제조방법 및 이를포함하는 리튬이차전지
US20070166612A1 (en) Method of fabricating thin film battery with annealed substrate
CN1639903A (zh) 具有原位形成的包括可渗透阳极集电体的锂阳极的可充电薄膜电池
JP2003115294A (ja) リチウム２次電池用アノード薄膜及びその製造方法
US10833311B2 (en) Method of making an anode structure containing a porous region
WO2005076389A2 (en) Self-contained, alloy type, thin film anodes for lithium-ion batteries
EP3545577A1 (en) Li-ion based electrochemical energy storage cell
KR101226245B1 (ko) 리튬 이차 전지용 음극 활물질, 이의 제조 방법 및 이를 포함하는 리튬 이차 전지
Kim et al. Gold-coated silicon nanowire–graphene core–shell composite film as a polymer binder-free anode for rechargeable lithium-ion batteries
KR20240066005A (ko) 비정질 금속 합금 코팅층을 구비하는 무음극 리튬 이차전지, 리튬금속 이차전지, 리튬 이차전지 및 전고체 이차전지
CN117795698A (zh) 用于提高锂电池中活性层的粘合强度的方法
TWI885323B (zh) 作為鋰電池陽極之矽電極製造方法
US20240417843A1 (en) Method for producing silicon electrodes as anodes for lithium batteries
TWI887602B (zh) 用於鋰離子電池銅電流導體上之平面矽陽極、電池單元及電池
WO2011105451A1 (ja) リチウムイオン二次電池用正極集電体、リチウムイオン二次電池用正極およびリチウムイオン二次電池用正極集電体の製造方法
CN117813702A (zh) 用于制造在锂电池中使用的用于控制嵌锂容量的部分反应的硅的方法
US20250210637A1 (en) Flat silicon anode on a copper conductor for lithium ion batteries
TWI899535B (zh) 由至少二元混合相生產富銅矽泡沫方法、陽極材料、電池單元及電池
TW202433787A (zh) 用於鋰電池控制儲鋰能力之部分反應矽的製造方法
EP4350831A1 (en) Oxide-based film sheet, oxide-based solid electrolyte sheet, and all-solid lithium secondry battery
CN118355517A (zh) 由至少二元混合相生产富铜硅泡沫的方法
KR20240095257A (ko) 적어도 이원 혼합상으로부터 구리-풍부 실리콘 발포체를 제조하는 방법
KR20180023380A (ko) 리튬이온전지 및 이의 제조방법
KR20260009024A (ko) 일면이 노출된 실리콘으로 구성된 리튬 이차전지용 음극 활물질 및 그의 제조방법

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination