JP2024518544A5 - - Google Patents
Info
- Publication number
- JP2024518544A5 JP2024518544A5 JP2023570145A JP2023570145A JP2024518544A5 JP 2024518544 A5 JP2024518544 A5 JP 2024518544A5 JP 2023570145 A JP2023570145 A JP 2023570145A JP 2023570145 A JP2023570145 A JP 2023570145A JP 2024518544 A5 JP2024518544 A5 JP 2024518544A5
- Authority
- JP
- Japan
- Prior art keywords
- end effector
- axis
- wrist unit
- wrist
- cleat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163201842P | 2021-05-14 | 2021-05-14 | |
| US63/201,842 | 2021-05-14 | ||
| PCT/US2022/028857 WO2022241052A1 (en) | 2021-05-14 | 2022-05-11 | Blade-type end effector with angular compliance mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024518544A JP2024518544A (ja) | 2024-05-01 |
| JP2024518544A5 true JP2024518544A5 (enExample) | 2025-05-14 |
Family
ID=84028847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023570145A Pending JP2024518544A (ja) | 2021-05-14 | 2022-05-11 | 角度コンプライアンスメカニズムを有するブレード型エンドエフェクタ |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20240227210A1 (enExample) |
| EP (1) | EP4337432A4 (enExample) |
| JP (1) | JP2024518544A (enExample) |
| KR (1) | KR20240008908A (enExample) |
| CN (1) | CN117355399A (enExample) |
| TW (1) | TW202313288A (enExample) |
| WO (1) | WO2022241052A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116551654B (zh) * | 2022-01-28 | 2025-02-25 | 腾讯科技（深圳）有限公司 | 机械臂、机械臂的控制方法、装置、机器人及存储介质 |
| JP2024054794A (ja) * | 2022-10-05 | 2024-04-17 | 株式会社安川電機 | 搬送ロボット |
| USD1107089S1 (en) * | 2023-12-08 | 2025-12-23 | Applied Materials, Inc. | Substrate-handling robot end effector |
| CN118683959B (zh) * | 2024-07-16 | 2025-11-11 | 上海广川科技有限公司 | 一种用于真空环境的晶圆翻转装置及翻转方法 |
| CN119910681B (zh) * | 2025-04-02 | 2025-07-25 | 素珀电子科技(上海)有限公司 | 一种机械手末端执行器及机械手臂 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1112220A1 (en) * | 1998-07-11 | 2001-07-04 | Semitool, Inc. | Robots for microelectronic workpiece handling |
| JP3965131B2 (ja) * | 2003-04-09 | 2007-08-29 | 東京エレクトロン株式会社 | 基板処理装置 |
| KR100554361B1 (ko) * | 2003-09-02 | 2006-02-24 | 세메스 주식회사 | 기판 이송 장치 |
| JP4642787B2 (ja) * | 2006-05-09 | 2011-03-02 | 東京エレクトロン株式会社 | 基板搬送装置及び縦型熱処理装置 |
| KR100798483B1 (ko) * | 2006-08-31 | 2008-01-28 | 로체 시스템즈(주) | 사이드 에지형 웨이퍼 클램핑 핸드 |
| DE202007011194U1 (de) * | 2007-08-10 | 2008-12-24 | Hettich-Oni Gmbh & Co. Kg | Scharnier |
| JP5439663B2 (ja) * | 2009-03-06 | 2014-03-12 | シンフォニアテクノロジー株式会社 | 電磁アクチュエータ及び関節装置 |
| US20150332950A1 (en) * | 2014-05-16 | 2015-11-19 | Applied Materials, Inc. | On-end effector magnetic wafer carrier alignment |
| CN107408527A (zh) * | 2015-04-15 | 2017-11-28 | 川崎重工业株式会社 | 基板搬送机器人及其末端执行器 |
| US10090188B2 (en) * | 2016-05-05 | 2018-10-02 | Applied Materials, Inc. | Robot subassemblies, end effector assemblies, and methods with reduced cracking |
-
2022
- 2022-05-11 JP JP2023570145A patent/JP2024518544A/ja active Pending
- 2022-05-11 CN CN202280035051.0A patent/CN117355399A/zh active Pending
- 2022-05-11 US US18/560,334 patent/US20240227210A1/en active Pending
- 2022-05-11 EP EP22808303.6A patent/EP4337432A4/en active Pending
- 2022-05-11 KR KR1020237043201A patent/KR20240008908A/ko active Pending
- 2022-05-11 WO PCT/US2022/028857 patent/WO2022241052A1/en not_active Ceased
- 2022-05-12 TW TW111117792A patent/TW202313288A/zh unknown
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