JP2024518544A - 角度コンプライアンスメカニズムを有するブレード型エンドエフェクタ - Google Patents

角度コンプライアンスメカニズムを有するブレード型エンドエフェクタ Download PDF

Info

Publication number
JP2024518544A
JP2024518544A JP2023570145A JP2023570145A JP2024518544A JP 2024518544 A JP2024518544 A JP 2024518544A JP 2023570145 A JP2023570145 A JP 2023570145A JP 2023570145 A JP2023570145 A JP 2023570145A JP 2024518544 A JP2024518544 A JP 2024518544A
Authority
JP
Japan
Prior art keywords
end effector
wrist unit
axis
wafer
wrist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023570145A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024518544A5 (enExample
Inventor
エンバートソン・ロス・シー．
セン・ブランドン・リー
ディトモア・チャールズ・エヌ．
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of JP2024518544A publication Critical patent/JP2024518544A/ja
Publication of JP2024518544A5 publication Critical patent/JP2024518544A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/08—Gripping heads and other end effectors having finger members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0091—Shock absorbers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP2023570145A 2021-05-14 2022-05-11 角度コンプライアンスメカニズムを有するブレード型エンドエフェクタ Pending JP2024518544A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163201842P 2021-05-14 2021-05-14
US63/201,842 2021-05-14
PCT/US2022/028857 WO2022241052A1 (en) 2021-05-14 2022-05-11 Blade-type end effector with angular compliance mechanism

Publications (2)

Publication Number Publication Date
JP2024518544A true JP2024518544A (ja) 2024-05-01
JP2024518544A5 JP2024518544A5 (enExample) 2025-05-14

Family

ID=84028847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023570145A Pending JP2024518544A (ja) 2021-05-14 2022-05-11 角度コンプライアンスメカニズムを有するブレード型エンドエフェクタ

Country Status (7)

Country Link
US (1) US20240227210A1 (enExample)
EP (1) EP4337432A4 (enExample)
JP (1) JP2024518544A (enExample)
KR (1) KR20240008908A (enExample)
CN (1) CN117355399A (enExample)
TW (1) TW202313288A (enExample)
WO (1) WO2022241052A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116551654B (zh) * 2022-01-28 2025-02-25 腾讯科技（深圳）有限公司 机械臂、机械臂的控制方法、装置、机器人及存储介质
JP2024054794A (ja) * 2022-10-05 2024-04-17 株式会社安川電機 搬送ロボット
USD1107089S1 (en) * 2023-12-08 2025-12-23 Applied Materials, Inc. Substrate-handling robot end effector
CN118683959B (zh) * 2024-07-16 2025-11-11 上海广川科技有限公司 一种用于真空环境的晶圆翻转装置及翻转方法
CN119910681B (zh) * 2025-04-02 2025-07-25 素珀电子科技(上海)有限公司 一种机械手末端执行器及机械手臂

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1112220A1 (en) * 1998-07-11 2001-07-04 Semitool, Inc. Robots for microelectronic workpiece handling
JP3965131B2 (ja) * 2003-04-09 2007-08-29 東京エレクトロン株式会社 基板処理装置
KR100554361B1 (ko) * 2003-09-02 2006-02-24 세메스 주식회사 기판 이송 장치
JP4642787B2 (ja) * 2006-05-09 2011-03-02 東京エレクトロン株式会社 基板搬送装置及び縦型熱処理装置
KR100798483B1 (ko) * 2006-08-31 2008-01-28 로체 시스템즈(주) 사이드 에지형 웨이퍼 클램핑 핸드
DE202007011194U1 (de) * 2007-08-10 2008-12-24 Hettich-Oni Gmbh & Co. Kg Scharnier
JP5439663B2 (ja) * 2009-03-06 2014-03-12 シンフォニアテクノロジー株式会社 電磁アクチュエータ及び関節装置
US20150332950A1 (en) * 2014-05-16 2015-11-19 Applied Materials, Inc. On-end effector magnetic wafer carrier alignment
CN107408527A (zh) * 2015-04-15 2017-11-28 川崎重工业株式会社 基板搬送机器人及其末端执行器
US10090188B2 (en) * 2016-05-05 2018-10-02 Applied Materials, Inc. Robot subassemblies, end effector assemblies, and methods with reduced cracking

Also Published As

Publication number Publication date
US20240227210A1 (en) 2024-07-11
TW202313288A (zh) 2023-04-01
EP4337432A1 (en) 2024-03-20
EP4337432A4 (en) 2025-12-10
KR20240008908A (ko) 2024-01-19
WO2022241052A1 (en) 2022-11-17
CN117355399A (zh) 2024-01-05

Similar Documents

Publication Publication Date Title
JP2024518544A (ja) 角度コンプライアンスメカニズムを有するブレード型エンドエフェクタ
JP4808299B2 (ja) クランプリスト、クランプ機構、ロボットアームアセンブリ及びロボット
EP1041604B1 (en) Pneumatically actuated flexure gripper for wafer handling robots
US5955858A (en) Mechanically clamping robot wrist
JP4287589B2 (ja) 装置、クランプ機構、アーム組立体及び方法
JP6314157B2 (ja) エンドエフェクタおよび基板搬送ロボット
CN102341901B (zh) 用于移动基板的系统、设备与方法
CN109311605B (zh) 旋转夹持装置
JP4231552B2 (ja) 幅広リスト・屈曲アームを有する物体移送装置
JP2001024052A (ja) 基板を縦向きに支持するグリッパ
JP2024518544A5 (enExample)
KR20200064890A (ko) 기판 지지 장치, 기판 반송 로봇 및 얼라이너 장치
US6828774B2 (en) Rear-mounted gimbal for supporting test head
CN105621089B (zh) 取物装置
JP7271940B2 (ja) ロードポート装置、ｅｆｅｍ及びロードポート装置の取り付け方法
CN209095590U (zh) 一种柔性夹持机构及具有柔性夹持机械手的机器人
JPH04157755A (ja) 縦型半導体製造装置におけるウェハ移載用ペンホルダー装置
CN116325108B (zh) 基板保持机械手和基板搬运机器人
JPH0744475Y2 (ja) チャック
KR20060061057A (ko) 반도체 소자 제조 설비의 웨이퍼 이송 로봇
CN106697915A (zh) 电子元件拾取装置
TW202534845A (zh) 晶圓盒及其限位裝置
JPH1012172A (ja) 電子顕微鏡用試料ステージ
TW201617191A (zh) 取物裝置
WO1998030937A1 (en) Articulated platform mechanism for laser pattern generation on a workpiece

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240124

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250502

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250502

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20260312