KR20240008908A - 각도 컴플라이언스 메커니즘을 갖는 블레이드-타입 엔드 이펙터 - Google Patents

각도 컴플라이언스 메커니즘을 갖는 블레이드-타입 엔드 이펙터 Download PDF

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Publication number
KR20240008908A
KR20240008908A KR1020237043201A KR20237043201A KR20240008908A KR 20240008908 A KR20240008908 A KR 20240008908A KR 1020237043201 A KR1020237043201 A KR 1020237043201A KR 20237043201 A KR20237043201 A KR 20237043201A KR 20240008908 A KR20240008908 A KR 20240008908A
Authority
KR
South Korea
Prior art keywords
end effector
axis
wafer
wrist
relative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237043201A
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English (en)
Korean (ko)
Inventor
로스 씨. 엠벌슨
브랜든 리 센
찰스 엔. 디트모어
Original Assignee
램 리써치 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 램 리써치 코포레이션 filed Critical 램 리써치 코포레이션
Publication of KR20240008908A publication Critical patent/KR20240008908A/ko
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/08—Gripping heads and other end effectors having finger members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0091—Shock absorbers
    • H01L21/68707—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
KR1020237043201A 2021-05-14 2022-05-11 각도 컴플라이언스 메커니즘을 갖는 블레이드-타입 엔드 이펙터 Pending KR20240008908A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163201842P 2021-05-14 2021-05-14
US63/201,842 2021-05-14
PCT/US2022/028857 WO2022241052A1 (en) 2021-05-14 2022-05-11 Blade-type end effector with angular compliance mechanism

Publications (1)

Publication Number Publication Date
KR20240008908A true KR20240008908A (ko) 2024-01-19

Family

ID=84028847

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237043201A Pending KR20240008908A (ko) 2021-05-14 2022-05-11 각도 컴플라이언스 메커니즘을 갖는 블레이드-타입 엔드 이펙터

Country Status (7)

Country Link
US (1) US20240227210A1 (enExample)
EP (1) EP4337432A4 (enExample)
JP (1) JP2024518544A (enExample)
KR (1) KR20240008908A (enExample)
CN (1) CN117355399A (enExample)
TW (1) TW202313288A (enExample)
WO (1) WO2022241052A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116551654B (zh) * 2022-01-28 2025-02-25 腾讯科技（深圳）有限公司 机械臂、机械臂的控制方法、装置、机器人及存储介质
JP2024054794A (ja) * 2022-10-05 2024-04-17 株式会社安川電機 搬送ロボット
USD1107089S1 (en) * 2023-12-08 2025-12-23 Applied Materials, Inc. Substrate-handling robot end effector
CN118683959B (zh) * 2024-07-16 2025-11-11 上海广川科技有限公司 一种用于真空环境的晶圆翻转装置及翻转方法
CN119910681B (zh) * 2025-04-02 2025-07-25 素珀电子科技(上海)有限公司 一种机械手末端执行器及机械手臂

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1112220A1 (en) * 1998-07-11 2001-07-04 Semitool, Inc. Robots for microelectronic workpiece handling
JP3965131B2 (ja) * 2003-04-09 2007-08-29 東京エレクトロン株式会社 基板処理装置
KR100554361B1 (ko) * 2003-09-02 2006-02-24 세메스 주식회사 기판 이송 장치
JP4642787B2 (ja) * 2006-05-09 2011-03-02 東京エレクトロン株式会社 基板搬送装置及び縦型熱処理装置
KR100798483B1 (ko) * 2006-08-31 2008-01-28 로체 시스템즈(주) 사이드 에지형 웨이퍼 클램핑 핸드
DE202007011194U1 (de) * 2007-08-10 2008-12-24 Hettich-Oni Gmbh & Co. Kg Scharnier
JP5439663B2 (ja) * 2009-03-06 2014-03-12 シンフォニアテクノロジー株式会社 電磁アクチュエータ及び関節装置
US20150332950A1 (en) * 2014-05-16 2015-11-19 Applied Materials, Inc. On-end effector magnetic wafer carrier alignment
CN107408527A (zh) * 2015-04-15 2017-11-28 川崎重工业株式会社 基板搬送机器人及其末端执行器
US10090188B2 (en) * 2016-05-05 2018-10-02 Applied Materials, Inc. Robot subassemblies, end effector assemblies, and methods with reduced cracking

Also Published As

Publication number Publication date
JP2024518544A (ja) 2024-05-01
US20240227210A1 (en) 2024-07-11
TW202313288A (zh) 2023-04-01
EP4337432A1 (en) 2024-03-20
EP4337432A4 (en) 2025-12-10
WO2022241052A1 (en) 2022-11-17
CN117355399A (zh) 2024-01-05

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PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

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A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000