JP2024504199A5 - - Google Patents

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Publication number
JP2024504199A5
JP2024504199A5 JP2023545853A JP2023545853A JP2024504199A5 JP 2024504199 A5 JP2024504199 A5 JP 2024504199A5 JP 2023545853 A JP2023545853 A JP 2023545853A JP 2023545853 A JP2023545853 A JP 2023545853A JP 2024504199 A5 JP2024504199 A5 JP 2024504199A5
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JP
Japan
Prior art keywords
reactive
optical element
layer
materials
reflective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023545853A
Other languages
English (en)
Japanese (ja)
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JP2024504199A (ja
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Publication date
Priority claimed from DE102021200748.1A external-priority patent/DE102021200748A1/de
Application filed filed Critical
Publication of JP2024504199A publication Critical patent/JP2024504199A/ja
Publication of JP2024504199A5 publication Critical patent/JP2024504199A5/ja
Pending legal-status Critical Current

Links

JP2023545853A 2021-01-28 2022-01-25 反射光学素子及び反射光学素子を修復し且つ／又は調整する方法 Pending JP2024504199A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021200748.1 2021-01-28
DE102021200748.1A DE102021200748A1 (de) 2021-01-28 2021-01-28 Reflektives optisches Element und Verfahren zur Reparatur und/oder Aufbereitung eines reflektiven optischen Elements
PCT/EP2022/051610 WO2022161942A1 (de) 2021-01-28 2022-01-25 Reflektives optisches element und verfahren zur reparatur und/oder aufbereitung eines reflektiven optischen elements

Publications (2)

Publication Number Publication Date
JP2024504199A JP2024504199A (ja) 2024-01-30
JP2024504199A5 true JP2024504199A5 (https=) 2025-02-03

Family

ID=80119697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023545853A Pending JP2024504199A (ja) 2021-01-28 2022-01-25 反射光学素子及び反射光学素子を修復し且つ／又は調整する方法

Country Status (3)

Country Link
JP (1) JP2024504199A (https=)
DE (1) DE102021200748A1 (https=)
WO (1) WO2022161942A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026063242A1 (ja) * 2024-09-20 2026-03-26 Ａｇｃ株式会社 膜付き基板の再生方法、マスクブランク用ガラス基板の製造方法、および反射型マスクブランクの製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10150874A1 (de) * 2001-10-04 2003-04-30 Zeiss Carl Optisches Element und Verfahren zu dessen Herstellung sowie ein Lithographiegerät und ein Verfahren zur Herstellung eines Halbleiterbauelements
JP3919599B2 (ja) * 2002-05-17 2007-05-30 キヤノン株式会社 光学素子、当該光学素子を有する光源装置及び露光装置
DE102005039833A1 (de) * 2005-08-22 2007-03-01 Rowiak Gmbh Vorrichtung und Verfahren zur Materialtrennung mit Laserpulsen
US9701581B2 (en) * 2009-06-04 2017-07-11 Corelase Oy Method and apparatus for processing substrates using a laser
DE102012200454A1 (de) 2012-01-13 2013-01-03 Carl Zeiss Smt Gmbh Verfahren zur Herstellung eines reflektiven optischen Elements und reflektives optisches Element
JP6487424B2 (ja) * 2013-06-27 2019-03-20 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ投影露光システムのミラー及びミラーを加工する方法
DE102013212467A1 (de) * 2013-06-27 2014-04-24 Carl Zeiss Smt Gmbh Entfernbare beschichtung eines optischen elements
TWI643024B (zh) * 2014-02-24 2018-12-01 尼康股份有限公司 Multilayer film mirror, manufacturing method thereof and regeneration method, and exposure device
US9547232B2 (en) * 2014-12-04 2017-01-17 Globalfoundries Inc. Pellicle with aerogel support frame
DE102015103494B4 (de) 2015-03-10 2020-07-16 Friedrich-Schiller-Universität Jena Verfahren zur Herstellung eines Reflektorelements und Reflektorelement
US20160354842A1 (en) * 2015-06-07 2016-12-08 General Electric Company Additive manufacturing methods and hybrid articles using brazeable additive structures

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