JP2024157941A5 - - Google Patents
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- Publication number
- JP2024157941A5 JP2024157941A5 JP2023072621A JP2023072621A JP2024157941A5 JP 2024157941 A5 JP2024157941 A5 JP 2024157941A5 JP 2023072621 A JP2023072621 A JP 2023072621A JP 2023072621 A JP2023072621 A JP 2023072621A JP 2024157941 A5 JP2024157941 A5 JP 2024157941A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- silicon carbide
- conductivity type
- gate
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims 30
- 239000012535 impurity Substances 0.000 claims 26
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 16
- 229910010271 silicon carbide Inorganic materials 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 14
- 239000004065 semiconductor Substances 0.000 claims 10
- 230000002093 peripheral effect Effects 0.000 claims 7
- 230000015556 catabolic process Effects 0.000 claims 6
- 239000002344 surface layer Substances 0.000 claims 6
- 230000015572 biosynthetic process Effects 0.000 claims 5
- 238000005468 ion implantation Methods 0.000 claims 5
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023072621A JP2024157941A (ja) | 2023-04-26 | 2023-04-26 | 炭化珪素半導体装置 |
| CN202480026118.3A CN121003031A (zh) | 2023-04-26 | 2024-04-25 | 碳化硅半导体装置 |
| PCT/JP2024/016352 WO2024225407A1 (ja) | 2023-04-26 | 2024-04-25 | 炭化珪素半導体装置 |
| US19/365,566 US20260047129A1 (en) | 2023-04-26 | 2025-10-22 | Silicon carbide semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023072621A JP2024157941A (ja) | 2023-04-26 | 2023-04-26 | 炭化珪素半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024157941A JP2024157941A (ja) | 2024-11-08 |
| JP2024157941A5 true JP2024157941A5 (https=) | 2025-04-01 |
Family
ID=93256764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023072621A Pending JP2024157941A (ja) | 2023-04-26 | 2023-04-26 | 炭化珪素半導体装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20260047129A1 (https=) |
| JP (1) | JP2024157941A (https=) |
| CN (1) | CN121003031A (https=) |
| WO (1) | WO2024225407A1 (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111052393B (zh) * | 2018-02-14 | 2023-11-14 | 富士电机株式会社 | 半导体装置 |
| JP7635524B2 (ja) * | 2020-09-08 | 2025-02-26 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
| JP7647239B2 (ja) * | 2021-03-30 | 2025-03-18 | 富士電機株式会社 | 半導体装置 |
| JP7593225B2 (ja) * | 2021-05-14 | 2024-12-03 | 株式会社デンソー | 炭化珪素半導体装置 |
| JP7643179B2 (ja) * | 2021-05-24 | 2025-03-11 | 富士電機株式会社 | 炭化珪素半導体装置 |
-
2023
- 2023-04-26 JP JP2023072621A patent/JP2024157941A/ja active Pending
-
2024
- 2024-04-25 WO PCT/JP2024/016352 patent/WO2024225407A1/ja not_active Ceased
- 2024-04-25 CN CN202480026118.3A patent/CN121003031A/zh active Pending
-
2025
- 2025-10-22 US US19/365,566 patent/US20260047129A1/en active Pending
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