JP2024088829A5 - - Google Patents

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Publication number
JP2024088829A5
JP2024088829A5 JP2022203816A JP2022203816A JP2024088829A5 JP 2024088829 A5 JP2024088829 A5 JP 2024088829A5 JP 2022203816 A JP2022203816 A JP 2022203816A JP 2022203816 A JP2022203816 A JP 2022203816A JP 2024088829 A5 JP2024088829 A5 JP 2024088829A5
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JP
Japan
Prior art keywords
groove
main surface
semiconductor layer
semiconductor device
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022203816A
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English (en)
Japanese (ja)
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JP2024088829A (ja
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Publication date
Application filed filed Critical
Priority to JP2022203816A priority Critical patent/JP2024088829A/ja
Priority claimed from JP2022203816A external-priority patent/JP2024088829A/ja
Publication of JP2024088829A publication Critical patent/JP2024088829A/ja
Publication of JP2024088829A5 publication Critical patent/JP2024088829A5/ja
Pending legal-status Critical Current

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JP2022203816A 2022-12-21 2022-12-21 半導体装置およびその製造方法 Pending JP2024088829A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022203816A JP2024088829A (ja) 2022-12-21 2022-12-21 半導体装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022203816A JP2024088829A (ja) 2022-12-21 2022-12-21 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
JP2024088829A JP2024088829A (ja) 2024-07-03
JP2024088829A5 true JP2024088829A5 (https=) 2025-11-18

Family

ID=91690405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022203816A Pending JP2024088829A (ja) 2022-12-21 2022-12-21 半導体装置およびその製造方法

Country Status (1)

Country Link
JP (1) JP2024088829A (https=)

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