JP2024060686A - 光偏向器 - Google Patents

光偏向器 Download PDF

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Publication number
JP2024060686A
JP2024060686A JP2022168099A JP2022168099A JP2024060686A JP 2024060686 A JP2024060686 A JP 2024060686A JP 2022168099 A JP2022168099 A JP 2022168099A JP 2022168099 A JP2022168099 A JP 2022168099A JP 2024060686 A JP2024060686 A JP 2024060686A
Authority
JP
Japan
Prior art keywords
optical deflector
torsion bar
rotation axis
mirror
side edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022168099A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024060686A5 (cg-RX-API-DMAC7.html
Inventor
春輝 田中
Haruki Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
Original Assignee
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanley Electric Co Ltd filed Critical Stanley Electric Co Ltd
Priority to JP2022168099A priority Critical patent/JP2024060686A/ja
Priority to CN202380072580.2A priority patent/CN120077314A/zh
Priority to US19/115,249 priority patent/US20260103376A1/en
Priority to EP23879525.6A priority patent/EP4579311A4/en
Priority to PCT/JP2023/033853 priority patent/WO2024084875A1/ja
Publication of JP2024060686A publication Critical patent/JP2024060686A/ja
Publication of JP2024060686A5 publication Critical patent/JP2024060686A5/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0048—Constitution or structural means for controlling angular deflection not provided for in groups B81B3/0043 - B81B3/0045
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0043—Increasing angular deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0154—Torsion bars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2022168099A 2022-10-20 2022-10-20 光偏向器 Pending JP2024060686A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2022168099A JP2024060686A (ja) 2022-10-20 2022-10-20 光偏向器
CN202380072580.2A CN120077314A (zh) 2022-10-20 2023-09-19 光偏转器
US19/115,249 US20260103376A1 (en) 2022-10-20 2023-09-19 Light deflector
EP23879525.6A EP4579311A4 (en) 2022-10-20 2023-09-19 Light deflector
PCT/JP2023/033853 WO2024084875A1 (ja) 2022-10-20 2023-09-19 光偏向器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022168099A JP2024060686A (ja) 2022-10-20 2022-10-20 光偏向器

Publications (2)

Publication Number Publication Date
JP2024060686A true JP2024060686A (ja) 2024-05-07
JP2024060686A5 JP2024060686A5 (cg-RX-API-DMAC7.html) 2025-10-09

Family

ID=90737506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022168099A Pending JP2024060686A (ja) 2022-10-20 2022-10-20 光偏向器

Country Status (5)

Country Link
US (1) US20260103376A1 (cg-RX-API-DMAC7.html)
EP (1) EP4579311A4 (cg-RX-API-DMAC7.html)
JP (1) JP2024060686A (cg-RX-API-DMAC7.html)
CN (1) CN120077314A (cg-RX-API-DMAC7.html)
WO (1) WO2024084875A1 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12572008B2 (en) * 2022-07-25 2026-03-10 Ricoh Company, Ltd. Movable device, projection apparatus, head-up display, laser headlamp, head-mounted display, and object recognition apparatus

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1318878C (zh) 2002-08-14 2007-05-30 富士通株式会社 具有扭杆的微型摇动元件
JP5252687B2 (ja) 2008-01-18 2013-07-31 スタンレー電気株式会社 光偏向器
JP2012063413A (ja) * 2010-09-14 2012-03-29 Ricoh Co Ltd 光走査装置およびこの光走査装置を組み込んだ画像形成装置ならびに投影装置
JP5736766B2 (ja) * 2010-12-22 2015-06-17 ミツミ電機株式会社 光走査装置
JP5775765B2 (ja) * 2011-01-21 2015-09-09 オリンパス株式会社 光偏向器
JP2012201386A (ja) 2011-03-24 2012-10-22 Toshiba Lighting & Technology Corp 密閉容器及び照明器具
US9091856B2 (en) * 2011-09-30 2015-07-28 Panasonic Intellctual Property Management Co., Ltd. Optical reflecting element
JP2015152869A (ja) * 2014-02-18 2015-08-24 パナソニックＩｐマネジメント株式会社 可動板構造体及びそれを用いた光走査装置
JP2016151681A (ja) 2015-02-18 2016-08-22 株式会社Ｊｖｃケンウッド Ｍｅｍｓ光スキャナ
JPWO2020045152A1 (ja) * 2018-08-31 2021-08-26 パナソニックＩｐマネジメント株式会社 光学反射素子

Also Published As

Publication number Publication date
CN120077314A (zh) 2025-05-30
EP4579311A4 (en) 2025-12-03
EP4579311A1 (en) 2025-07-02
US20260103376A1 (en) 2026-04-16
WO2024084875A1 (ja) 2024-04-25

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