JP2024014030A5 - - Google Patents

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Publication number
JP2024014030A5
JP2024014030A5 JP2022116574A JP2022116574A JP2024014030A5 JP 2024014030 A5 JP2024014030 A5 JP 2024014030A5 JP 2022116574 A JP2022116574 A JP 2022116574A JP 2022116574 A JP2022116574 A JP 2022116574A JP 2024014030 A5 JP2024014030 A5 JP 2024014030A5
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JP
Japan
Prior art keywords
mark
light
detection device
detection system
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022116574A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024014030A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2022116574A priority Critical patent/JP2024014030A/ja
Priority claimed from JP2022116574A external-priority patent/JP2024014030A/ja
Priority to TW112125384A priority patent/TW202411769A/zh
Priority to US18/350,067 priority patent/US20240027921A1/en
Priority to KR1020230093554A priority patent/KR20240013060A/ko
Publication of JP2024014030A publication Critical patent/JP2024014030A/ja
Publication of JP2024014030A5 publication Critical patent/JP2024014030A5/ja
Pending legal-status Critical Current

Links

JP2022116574A 2022-07-21 2022-07-21 検出装置、リソグラフィー装置および物品製造方法 Pending JP2024014030A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2022116574A JP2024014030A (ja) 2022-07-21 2022-07-21 検出装置、リソグラフィー装置および物品製造方法
TW112125384A TW202411769A (zh) 2022-07-21 2023-07-07 檢測裝置、微影蝕刻設備及物品製造方法
US18/350,067 US20240027921A1 (en) 2022-07-21 2023-07-11 Detection device, lithography apparatus, and article manufacturing method
KR1020230093554A KR20240013060A (ko) 2022-07-21 2023-07-19 검출 장치, 리소그래피 장치 및 물품 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022116574A JP2024014030A (ja) 2022-07-21 2022-07-21 検出装置、リソグラフィー装置および物品製造方法

Publications (2)

Publication Number Publication Date
JP2024014030A JP2024014030A (ja) 2024-02-01
JP2024014030A5 true JP2024014030A5 (enExample) 2025-07-16

Family

ID=89577325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022116574A Pending JP2024014030A (ja) 2022-07-21 2022-07-21 検出装置、リソグラフィー装置および物品製造方法

Country Status (4)

Country Link
US (1) US20240027921A1 (enExample)
JP (1) JP2024014030A (enExample)
KR (1) KR20240013060A (enExample)
TW (1) TW202411769A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024014031A (ja) * 2022-07-21 2024-02-01 キヤノン株式会社 検出装置、リソグラフィー装置および物品製造方法

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