JP2023526864A5 - - Google Patents

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Publication number
JP2023526864A5
JP2023526864A5 JP2022571783A JP2022571783A JP2023526864A5 JP 2023526864 A5 JP2023526864 A5 JP 2023526864A5 JP 2022571783 A JP2022571783 A JP 2022571783A JP 2022571783 A JP2022571783 A JP 2022571783A JP 2023526864 A5 JP2023526864 A5 JP 2023526864A5
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JP
Japan
Prior art keywords
overlay
tool according
illumination
control zones
measurement tool
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JP2022571783A
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English (en)
Japanese (ja)
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JP2023526864A (ja
JP7527400B2 (ja
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Priority claimed from US17/068,328 external-priority patent/US11346657B2/en
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Publication of JP2023526864A5 publication Critical patent/JP2023526864A5/ja
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JP2022571783A 2020-05-22 2021-05-17 オーバーレイ計測ツールおよび方法 Active JP7527400B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US202063028568P 2020-05-22 2020-05-22
US63/028,568 2020-05-22
US17/068,328 2020-10-12
US17/068,328 US11346657B2 (en) 2020-05-22 2020-10-12 Measurement modes for overlay
PCT/US2021/032655 WO2021236470A1 (en) 2020-05-22 2021-05-17 Measurement modes for overlay

Publications (3)

Publication Number Publication Date
JP2023526864A JP2023526864A (ja) 2023-06-23
JP2023526864A5 true JP2023526864A5 (https=) 2024-03-18
JP7527400B2 JP7527400B2 (ja) 2024-08-02

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JP2022571783A Active JP7527400B2 (ja) 2020-05-22 2021-05-17 オーバーレイ計測ツールおよび方法

Country Status (7)

Country Link
US (1) US11346657B2 (https=)
EP (1) EP4115172A4 (https=)
JP (1) JP7527400B2 (https=)
KR (1) KR102789381B1 (https=)
CN (1) CN115552228B (https=)
TW (1) TWI862840B (https=)
WO (1) WO2021236470A1 (https=)

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US11346657B2 (en) * 2020-05-22 2022-05-31 Kla Corporation Measurement modes for overlay

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