JP2023522528A5 - - Google Patents

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Publication number
JP2023522528A5
JP2023522528A5 JP2022544860A JP2022544860A JP2023522528A5 JP 2023522528 A5 JP2023522528 A5 JP 2023522528A5 JP 2022544860 A JP2022544860 A JP 2022544860A JP 2022544860 A JP2022544860 A JP 2022544860A JP 2023522528 A5 JP2023522528 A5 JP 2023522528A5
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JP
Japan
Prior art keywords
pulley
end effector
substrate transport
band
transport apparatus
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022544860A
Other languages
English (en)
Japanese (ja)
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JP7566916B2 (ja
JP2023522528A (ja
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Publication date
Priority claimed from US17/156,007 external-priority patent/US11235935B2/en
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Publication of JP2023522528A publication Critical patent/JP2023522528A/ja
Publication of JP2023522528A5 publication Critical patent/JP2023522528A5/ja
Application granted granted Critical
Publication of JP7566916B2 publication Critical patent/JP7566916B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022544860A 2020-01-23 2021-01-25 基板搬送装置 Active JP7566916B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US202062964817P 2020-01-23 2020-01-23
US62/964,817 2020-01-23
US17/156,007 2021-01-22
US17/156,007 US11235935B2 (en) 2020-01-23 2021-01-22 Substrate transport apparatus
PCT/US2021/014899 WO2021154640A1 (en) 2020-01-23 2021-01-25 Substrate transport apparatus

Publications (3)

Publication Number Publication Date
JP2023522528A JP2023522528A (ja) 2023-05-31
JP2023522528A5 true JP2023522528A5 (cg-RX-API-DMAC10.html) 2024-02-02
JP7566916B2 JP7566916B2 (ja) 2024-10-15

Family

ID=76969728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022544860A Active JP7566916B2 (ja) 2020-01-23 2021-01-25 基板搬送装置

Country Status (7)

Country Link
US (2) US11235935B2 (cg-RX-API-DMAC10.html)
EP (1) EP4094286A4 (cg-RX-API-DMAC10.html)
JP (1) JP7566916B2 (cg-RX-API-DMAC10.html)
KR (2) KR20250022887A (cg-RX-API-DMAC10.html)
CN (2) CN115280481A (cg-RX-API-DMAC10.html)
TW (2) TWI851868B (cg-RX-API-DMAC10.html)
WO (1) WO2021154640A1 (cg-RX-API-DMAC10.html)

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TWI851868B (zh) * 2020-01-23 2024-08-11 美商布魯克斯自動機械美國公司 基板運送設備
US11413744B2 (en) * 2020-03-03 2022-08-16 Applied Materials, Inc. Multi-turn drive assembly and systems and methods of use thereof
US12163228B2 (en) * 2021-05-18 2024-12-10 Mellanox Technologies, Ltd. CVD system with substrate carrier and associated mechanisms for moving substrate therethrough
TWI881640B (zh) * 2022-12-28 2025-04-21 日商川崎重工業股份有限公司 基板搬送機器人
CN116750481A (zh) * 2023-06-09 2023-09-15 未来维度(深圳)科技有限公司 一种转运系统
US20250065509A1 (en) * 2023-08-21 2025-02-27 Applied Materials Israel Ltd. Robot blade and wafer breakage prevention system
CN116852339B (zh) * 2023-08-24 2024-10-29 上海广川科技有限公司 一种不等臂长的双臂机械手
JP2025099796A (ja) * 2023-12-22 2025-07-03 株式会社ダイヘン ベルト伝動機構およびこれを備えた搬送ロボット
CN120395789B (zh) * 2025-07-03 2025-09-02 中科芯微智能装备(沈阳)有限公司 一种真空机械手臂
CN121157004A (zh) * 2025-11-21 2025-12-19 沈阳新松半导体设备有限公司 一种基于从动端大角度旋转的传动机构

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KR102285254B1 (ko) 2013-08-26 2021-08-03 브룩스 오토메이션 인코퍼레이티드 기판 이송 장치
JP6550391B2 (ja) * 2014-01-05 2019-07-24 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 電子デバイス製造において基板を搬送するためのロボット装置、駆動アセンブリ、及び方法
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US11413744B2 (en) * 2020-03-03 2022-08-16 Applied Materials, Inc. Multi-turn drive assembly and systems and methods of use thereof

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