JP2023518164A5 - - Google Patents
Info
- Publication number
- JP2023518164A5 JP2023518164A5 JP2022551540A JP2022551540A JP2023518164A5 JP 2023518164 A5 JP2023518164 A5 JP 2023518164A5 JP 2022551540 A JP2022551540 A JP 2022551540A JP 2022551540 A JP2022551540 A JP 2022551540A JP 2023518164 A5 JP2023518164 A5 JP 2023518164A5
- Authority
- JP
- Japan
- Prior art keywords
- platform
- link
- robot
- spindle
- traverse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025066110A JP2025103039A (ja) | 2020-03-02 | 2025-04-14 | コンパクトなトラバースロボット |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202062983846P | 2020-03-02 | 2020-03-02 | |
| US62/983,846 | 2020-03-02 | ||
| PCT/US2021/020381 WO2021178348A1 (en) | 2020-03-02 | 2021-03-02 | Compact traversing robot |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025066110A Division JP2025103039A (ja) | 2020-03-02 | 2025-04-14 | コンパクトなトラバースロボット |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023518164A JP2023518164A (ja) | 2023-04-28 |
| JP2023518164A5 true JP2023518164A5 (cg-RX-API-DMAC7.html) | 2025-04-22 |
| JP7869747B2 JP7869747B2 (ja) | 2026-06-03 |
Family
ID=77463385
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022551540A Active JP7869747B2 (ja) | 2020-03-02 | 2021-03-02 | コンパクトなトラバースロボット |
| JP2025066110A Pending JP2025103039A (ja) | 2020-03-02 | 2025-04-14 | コンパクトなトラバースロボット |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025066110A Pending JP2025103039A (ja) | 2020-03-02 | 2025-04-14 | コンパクトなトラバースロボット |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US12128558B2 (cg-RX-API-DMAC7.html) |
| JP (2) | JP7869747B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR20230002355A (cg-RX-API-DMAC7.html) |
| CN (1) | CN115210046A (cg-RX-API-DMAC7.html) |
| WO (1) | WO2021178348A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7425701B2 (ja) * | 2020-09-16 | 2024-01-31 | 芝浦メカトロニクス株式会社 | 基板搬送装置 |
| WO2023147022A1 (en) * | 2022-01-27 | 2023-08-03 | Persimmon Technologies Corporation | Traversing robot with multiple end effectors |
| CN115805583B (zh) * | 2022-12-28 | 2025-02-07 | 天津理工大学 | 并联式机器人 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4678952A (en) * | 1985-08-13 | 1987-07-07 | Intelledex Incorporated | Sealed joint for a robot and the like |
| JPH11238779A (ja) * | 1998-02-23 | 1999-08-31 | Mecs Corp | 薄型基板搬送多関節ロボット |
| JP2007015863A (ja) * | 1998-03-25 | 2007-01-25 | Hitachi Plant Technologies Ltd | 搬送装置及び製造方法 |
| JP4509411B2 (ja) * | 2001-03-26 | 2010-07-21 | 株式会社ディスコ | 搬出入装置 |
| JP2003080480A (ja) * | 2001-09-07 | 2003-03-18 | Tatsumo Kk | 産業用ロボット |
| JP4389424B2 (ja) * | 2001-12-25 | 2009-12-24 | 東京エレクトロン株式会社 | 被処理体の搬送機構及び処理システム |
| JP4277100B2 (ja) * | 2002-11-14 | 2009-06-10 | 東京エレクトロン株式会社 | 搬送機構の基準位置補正装置及び基準位置補正方法 |
| WO2006006554A1 (ja) * | 2004-07-09 | 2006-01-19 | Rorze Corporation | 駆動源および搬送ロボット |
| US8573919B2 (en) * | 2005-07-11 | 2013-11-05 | Brooks Automation, Inc. | Substrate transport apparatus |
| US8701519B2 (en) * | 2006-06-28 | 2014-04-22 | Genmark Automation, Inc. | Robot with belt-drive system |
| KR101310003B1 (ko) * | 2006-09-12 | 2013-09-24 | 가부시키가이샤 야스카와덴키 | 피작업물 반송 장치 |
| JP5016302B2 (ja) * | 2006-12-01 | 2012-09-05 | 日本電産サンキョー株式会社 | アーム駆動装置及び産業用ロボット |
| US20120063874A1 (en) * | 2010-09-15 | 2012-03-15 | Applied Materials, Inc. | Low profile dual arm vacuum robot |
| KR20120067488A (ko) * | 2010-12-16 | 2012-06-26 | 미래산업 주식회사 | 선형전동기 및 이를 이용한 기판 이송장치 |
| WO2013040401A1 (en) | 2011-09-16 | 2013-03-21 | Persimmon Technologies, Corp. | Low variability robot |
| JP2013074145A (ja) * | 2011-09-28 | 2013-04-22 | Sinfonia Technology Co Ltd | 真空処理装置 |
| KR102153608B1 (ko) * | 2012-07-05 | 2020-09-08 | 어플라이드 머티어리얼스, 인코포레이티드 | 전자 디바이스 제조 시스템들에서 기판들을 운송하기 위한 붐 구동 장치, 멀티-아암 로봇 장치, 전자 디바이스 프로세싱 시스템들, 및 방법들 |
| JP2014078600A (ja) * | 2012-10-10 | 2014-05-01 | Sumitomo Heavy Ind Ltd | 成膜装置 |
| JP5532111B2 (ja) * | 2012-11-16 | 2014-06-25 | 株式会社安川電機 | ロボットアーム、ロボットおよびロボットの動作方法 |
| JP5532110B2 (ja) | 2012-11-16 | 2014-06-25 | 株式会社安川電機 | 基板搬送ロボットおよび基板搬送方法 |
| US9149936B2 (en) | 2013-01-18 | 2015-10-06 | Persimmon Technologies, Corp. | Robot having arm with unequal link lengths |
| US10224232B2 (en) | 2013-01-18 | 2019-03-05 | Persimmon Technologies Corporation | Robot having two arms with unequal link lengths |
| KR101506188B1 (ko) * | 2013-08-30 | 2015-03-26 | 주식회사 로보스타 | 멀티플 암을 구비한 반송 로봇 |
| JP6518037B2 (ja) | 2014-04-28 | 2019-05-22 | 川崎重工業株式会社 | 産業用ロボット |
| KR102430044B1 (ko) | 2015-02-06 | 2022-08-05 | 퍼시몬 테크놀로지스 코포레이션 | 동등하지 않은 링크 길이를 가진 아암을 구비한 로봇 |
| CN204508205U (zh) * | 2015-03-28 | 2015-07-29 | 苏州荣威工贸有限公司 | 一种基于平行原理的双杆双向搬运机器人 |
| GB2538714A (en) * | 2015-05-25 | 2016-11-30 | Robotical Ltd | Robot Leg |
| CN110505945B (zh) * | 2017-02-15 | 2024-01-19 | 柿子技术公司 | 具有多个末端执行器的物料操纵机器人 |
| US20190240831A1 (en) * | 2018-02-05 | 2019-08-08 | Kimball Electronics Indiana, Inc. | Robot Having Vertically Oriented Articulated Arm Motion |
| US10549420B2 (en) * | 2018-03-15 | 2020-02-04 | Kimball Electronics Indiana, Inc. | Over and under linear axis robot |
| WO2020167939A1 (en) | 2019-02-14 | 2020-08-20 | Persimmon Technologies Corporation | Magnetically guided material handling robot |
| CN114025926B (zh) | 2019-02-14 | 2024-10-08 | 柿子技术公司 | 模块化材料处理机器人平台 |
-
2021
- 2021-03-02 CN CN202180018357.0A patent/CN115210046A/zh active Pending
- 2021-03-02 US US17/189,381 patent/US12128558B2/en active Active
- 2021-03-02 KR KR1020227034326A patent/KR20230002355A/ko active Pending
- 2021-03-02 WO PCT/US2021/020381 patent/WO2021178348A1/en not_active Ceased
- 2021-03-02 JP JP2022551540A patent/JP7869747B2/ja active Active
-
2024
- 2024-09-23 US US18/893,106 patent/US12617076B2/en active Active
-
2025
- 2025-04-14 JP JP2025066110A patent/JP2025103039A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11996316B2 (en) | Robot having arm with parallel paths | |
| JP7217718B2 (ja) | ロボット及び無線データカップリング | |
| JP2025103039A (ja) | コンパクトなトラバースロボット | |
| JP7079604B2 (ja) | 不等リンク長を有するアームを有するロボット | |
| CN110712195A (zh) | 运送机器人和机器人系统 | |
| JP7805936B2 (ja) | 分散型アクチュエータを搭載した真空環境ロボット | |
| JP2011199121A (ja) | 搬送装置 | |
| KR20000042618A (ko) | 원통좌표계로봇 | |
| CN106403859A (zh) | 具有带传动装置引导探头的scara结构的坐标测量机 | |
| JP2024510251A (ja) | 複数のリンケージを有する分散アーキテクチャロボット | |
| JPH1094983A (ja) | アクチュエータ機構 | |
| JP4607756B2 (ja) | ロボットハンドおよび基板搬送ロボット | |
| US12083666B2 (en) | Traversing robot with multiple end effectors | |
| JPH03166083A (ja) | ロボツト用手首装置及び産業用ロボツト | |
| KR20250173806A (ko) | 개선된 2자유도 동시 중력 보상 장치를 포함하는 매니퓰레이터 |