JP7869747B2 - コンパクトなトラバースロボット - Google Patents

コンパクトなトラバースロボット

Info

Publication number
JP7869747B2
JP7869747B2 JP2022551540A JP2022551540A JP7869747B2 JP 7869747 B2 JP7869747 B2 JP 7869747B2 JP 2022551540 A JP2022551540 A JP 2022551540A JP 2022551540 A JP2022551540 A JP 2022551540A JP 7869747 B2 JP7869747 B2 JP 7869747B2
Authority
JP
Japan
Prior art keywords
platform
link
actuator
spindle
traverse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022551540A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023518164A (ja
JP2023518164A5 (cg-RX-API-DMAC7.html
Inventor
マルチン ホシェク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Persimmon Technologies Corp
Original Assignee
Persimmon Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Persimmon Technologies Corp filed Critical Persimmon Technologies Corp
Publication of JP2023518164A publication Critical patent/JP2023518164A/ja
Priority to JP2025066110A priority Critical patent/JP2025103039A/ja
Publication of JP2023518164A5 publication Critical patent/JP2023518164A5/ja
Application granted granted Critical
Publication of JP7869747B2 publication Critical patent/JP7869747B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/044—Cylindrical coordinate type comprising an articulated arm with forearm providing vertical linear movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0008—Balancing devices
    • B25J19/0016—Balancing devices using springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J5/00—Manipulators mounted on wheels or on carriages
    • B25J5/02—Manipulators mounted on wheels or on carriages travelling along a guideway
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/123—Linear actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2022551540A 2020-03-02 2021-03-02 コンパクトなトラバースロボット Active JP7869747B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025066110A JP2025103039A (ja) 2020-03-02 2025-04-14 コンパクトなトラバースロボット

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062983846P 2020-03-02 2020-03-02
US62/983,846 2020-03-02
PCT/US2021/020381 WO2021178348A1 (en) 2020-03-02 2021-03-02 Compact traversing robot

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025066110A Division JP2025103039A (ja) 2020-03-02 2025-04-14 コンパクトなトラバースロボット

Publications (3)

Publication Number Publication Date
JP2023518164A JP2023518164A (ja) 2023-04-28
JP2023518164A5 JP2023518164A5 (cg-RX-API-DMAC7.html) 2025-04-22
JP7869747B2 true JP7869747B2 (ja) 2026-06-03

Family

ID=77463385

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022551540A Active JP7869747B2 (ja) 2020-03-02 2021-03-02 コンパクトなトラバースロボット
JP2025066110A Pending JP2025103039A (ja) 2020-03-02 2025-04-14 コンパクトなトラバースロボット

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025066110A Pending JP2025103039A (ja) 2020-03-02 2025-04-14 コンパクトなトラバースロボット

Country Status (5)

Country Link
US (2) US12128558B2 (cg-RX-API-DMAC7.html)
JP (2) JP7869747B2 (cg-RX-API-DMAC7.html)
KR (1) KR20230002355A (cg-RX-API-DMAC7.html)
CN (1) CN115210046A (cg-RX-API-DMAC7.html)
WO (1) WO2021178348A1 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7425701B2 (ja) * 2020-09-16 2024-01-31 芝浦メカトロニクス株式会社 基板搬送装置
WO2023147022A1 (en) * 2022-01-27 2023-08-03 Persimmon Technologies Corporation Traversing robot with multiple end effectors
CN115805583B (zh) * 2022-12-28 2025-02-07 天津理工大学 并联式机器人

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002289673A (ja) 2001-03-26 2002-10-04 Disco Abrasive Syst Ltd 搬出入装置
JP2003080480A (ja) 2001-09-07 2003-03-18 Tatsumo Kk 産業用ロボット
JP2008137115A (ja) 2006-12-01 2008-06-19 Nidec Sankyo Corp アーム駆動装置及び産業用ロボット
JP2014078600A (ja) 2012-10-10 2014-05-01 Sumitomo Heavy Ind Ltd 成膜装置

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US4678952A (en) * 1985-08-13 1987-07-07 Intelledex Incorporated Sealed joint for a robot and the like
JPH11238779A (ja) * 1998-02-23 1999-08-31 Mecs Corp 薄型基板搬送多関節ロボット
JP2007015863A (ja) * 1998-03-25 2007-01-25 Hitachi Plant Technologies Ltd 搬送装置及び製造方法
JP4389424B2 (ja) * 2001-12-25 2009-12-24 東京エレクトロン株式会社 被処理体の搬送機構及び処理システム
JP4277100B2 (ja) * 2002-11-14 2009-06-10 東京エレクトロン株式会社 搬送機構の基準位置補正装置及び基準位置補正方法
WO2006006554A1 (ja) * 2004-07-09 2006-01-19 Rorze Corporation 駆動源および搬送ロボット
US8573919B2 (en) * 2005-07-11 2013-11-05 Brooks Automation, Inc. Substrate transport apparatus
US8701519B2 (en) * 2006-06-28 2014-04-22 Genmark Automation, Inc. Robot with belt-drive system
KR101310003B1 (ko) * 2006-09-12 2013-09-24 가부시키가이샤 야스카와덴키 피작업물 반송 장치
US20120063874A1 (en) * 2010-09-15 2012-03-15 Applied Materials, Inc. Low profile dual arm vacuum robot
KR20120067488A (ko) * 2010-12-16 2012-06-26 미래산업 주식회사 선형전동기 및 이를 이용한 기판 이송장치
WO2013040401A1 (en) 2011-09-16 2013-03-21 Persimmon Technologies, Corp. Low variability robot
JP2013074145A (ja) * 2011-09-28 2013-04-22 Sinfonia Technology Co Ltd 真空処理装置
KR102153608B1 (ko) * 2012-07-05 2020-09-08 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조 시스템들에서 기판들을 운송하기 위한 붐 구동 장치, 멀티-아암 로봇 장치, 전자 디바이스 프로세싱 시스템들, 및 방법들
JP5532111B2 (ja) * 2012-11-16 2014-06-25 株式会社安川電機 ロボットアーム、ロボットおよびロボットの動作方法
JP5532110B2 (ja) 2012-11-16 2014-06-25 株式会社安川電機 基板搬送ロボットおよび基板搬送方法
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US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
KR101506188B1 (ko) * 2013-08-30 2015-03-26 주식회사 로보스타 멀티플 암을 구비한 반송 로봇
JP6518037B2 (ja) 2014-04-28 2019-05-22 川崎重工業株式会社 産業用ロボット
KR102430044B1 (ko) 2015-02-06 2022-08-05 퍼시몬 테크놀로지스 코포레이션 동등하지 않은 링크 길이를 가진 아암을 구비한 로봇
CN204508205U (zh) * 2015-03-28 2015-07-29 苏州荣威工贸有限公司 一种基于平行原理的双杆双向搬运机器人
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002289673A (ja) 2001-03-26 2002-10-04 Disco Abrasive Syst Ltd 搬出入装置
JP2003080480A (ja) 2001-09-07 2003-03-18 Tatsumo Kk 産業用ロボット
JP2008137115A (ja) 2006-12-01 2008-06-19 Nidec Sankyo Corp アーム駆動装置及び産業用ロボット
JP2014078600A (ja) 2012-10-10 2014-05-01 Sumitomo Heavy Ind Ltd 成膜装置

Also Published As

Publication number Publication date
US20250010462A1 (en) 2025-01-09
WO2021178348A9 (en) 2021-12-30
CN115210046A (zh) 2022-10-18
JP2023518164A (ja) 2023-04-28
KR20230002355A (ko) 2023-01-05
US20210268641A1 (en) 2021-09-02
WO2021178348A1 (en) 2021-09-10
US12617076B2 (en) 2026-05-05
US12128558B2 (en) 2024-10-29
JP2025103039A (ja) 2025-07-08

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