JP2023512815A5 - - Google Patents
Info
- Publication number
- JP2023512815A5 JP2023512815A5 JP2022547977A JP2022547977A JP2023512815A5 JP 2023512815 A5 JP2023512815 A5 JP 2023512815A5 JP 2022547977 A JP2022547977 A JP 2022547977A JP 2022547977 A JP2022547977 A JP 2022547977A JP 2023512815 A5 JP2023512815 A5 JP 2023512815A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- segment
- edges
- path
- edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP20156050 | 2020-02-07 | ||
| EP20156050.5 | 2020-02-07 | ||
| PCT/EP2021/052760 WO2021156415A1 (en) | 2020-02-07 | 2021-02-05 | Electrode and apparatus for electrolytically treating a workpiece, assembly for forming a cell of the apparatus and method and computer program |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023512815A JP2023512815A (ja) | 2023-03-29 |
| JP2023512815A5 true JP2023512815A5 (enExample) | 2024-01-19 |
| JP7747642B2 JP7747642B2 (ja) | 2025-10-01 |
Family
ID=69526171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022547977A Active JP7747642B2 (ja) | 2020-02-07 | 2021-02-05 | 被加工物を電解処理するための電極ならびに装置、装置のセルを形成するためのアセンブリ、方法、およびコンピュータプログラム |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US12522942B2 (enExample) |
| EP (1) | EP4100562A1 (enExample) |
| JP (1) | JP7747642B2 (enExample) |
| KR (1) | KR20220139354A (enExample) |
| CN (1) | CN115349035B (enExample) |
| PH (1) | PH12022552031A1 (enExample) |
| TW (1) | TWI878447B (enExample) |
| WO (1) | WO2021156415A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117802557A (zh) * | 2022-09-23 | 2024-04-02 | 奥特斯科技(重庆)有限公司 | 用于对部件承载件结构进行电镀覆的电镀覆设备和方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06306693A (ja) * | 1993-04-27 | 1994-11-01 | Kawasaki Steel Corp | 金属ストリップの幅方向めっき付着量制御用めっき電極ならびにめっき付着量制御方法 |
| JPH10287997A (ja) * | 1997-04-17 | 1998-10-27 | Tomoji Watanabe | メッキ装置 |
| US6919010B1 (en) | 2001-06-28 | 2005-07-19 | Novellus Systems, Inc. | Uniform electroplating of thin metal seeded wafers using rotationally asymmetric variable anode correction |
| US6322673B1 (en) * | 1999-12-18 | 2001-11-27 | Electroplating Technologies, Ltd. | Apparatus for electrochemical treatment of a continuous web |
| US7682498B1 (en) * | 2001-06-28 | 2010-03-23 | Novellus Systems, Inc. | Rotationally asymmetric variable electrode correction |
| DE10141056C2 (de) | 2001-08-22 | 2003-12-24 | Atotech Deutschland Gmbh | Verfahren und Vorrichtung zum elektrolytischen Behandeln von elektrisch leitfähigen Schichten in Durchlaufanlagen |
| US10011917B2 (en) * | 2008-11-07 | 2018-07-03 | Lam Research Corporation | Control of current density in an electroplating apparatus |
| US8858774B2 (en) * | 2008-11-07 | 2014-10-14 | Novellus Systems, Inc. | Electroplating apparatus for tailored uniformity profile |
| KR101668052B1 (ko) | 2009-11-03 | 2016-10-20 | 뉴사우스 이노베이션즈 피티와이 리미티드 | 태양 전지들을 위한 금속 전극들의 포토플레이팅 |
| TWI530593B (zh) * | 2014-08-11 | 2016-04-21 | 亞智科技股份有限公司 | 多陽極控制裝置及具有該裝置的電鍍設備 |
-
2021
- 2021-02-05 EP EP21703460.2A patent/EP4100562A1/en active Pending
- 2021-02-05 WO PCT/EP2021/052760 patent/WO2021156415A1/en not_active Ceased
- 2021-02-05 PH PH1/2022/552031A patent/PH12022552031A1/en unknown
- 2021-02-05 JP JP2022547977A patent/JP7747642B2/ja active Active
- 2021-02-05 CN CN202180021766.6A patent/CN115349035B/zh active Active
- 2021-02-05 KR KR1020227030834A patent/KR20220139354A/ko active Pending
- 2021-02-05 TW TW110104374A patent/TWI878447B/zh active
- 2021-02-05 US US17/796,887 patent/US12522942B2/en active Active
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