JP2023135899A - 光検出装置、光照射装置および光検出方法 - Google Patents

光検出装置、光照射装置および光検出方法 Download PDF

Info

Publication number
JP2023135899A
JP2023135899A JP2022041223A JP2022041223A JP2023135899A JP 2023135899 A JP2023135899 A JP 2023135899A JP 2022041223 A JP2022041223 A JP 2022041223A JP 2022041223 A JP2022041223 A JP 2022041223A JP 2023135899 A JP2023135899 A JP 2023135899A
Authority
JP
Japan
Prior art keywords
laser beam
laser light
image sensor
laser
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022041223A
Other languages
English (en)
Japanese (ja)
Inventor
晃司 小田
Koji Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Original Assignee
Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2022041223A priority Critical patent/JP2023135899A/ja
Priority to TW112100796A priority patent/TWI834466B/zh
Priority to CN202310141544.9A priority patent/CN116773145A/zh
Priority to KR1020230018687A priority patent/KR20230135505A/ko
Publication of JP2023135899A publication Critical patent/JP2023135899A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0214—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0295—Constructional arrangements for removing other types of optical noise or for performing calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/08—Arrangements of light sources specially adapted for photometry standard sources, also using luminescent or radioactive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP2022041223A 2022-03-16 2022-03-16 光検出装置、光照射装置および光検出方法 Pending JP2023135899A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2022041223A JP2023135899A (ja) 2022-03-16 2022-03-16 光検出装置、光照射装置および光検出方法
TW112100796A TWI834466B (zh) 2022-03-16 2023-01-09 光檢測裝置、光照射裝置及光檢測方法
CN202310141544.9A CN116773145A (zh) 2022-03-16 2023-02-08 光检测装置、光照射装置、以及光检测方法
KR1020230018687A KR20230135505A (ko) 2022-03-16 2023-02-13 광 검출 장치, 광 조사 장치 및 광 검출 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022041223A JP2023135899A (ja) 2022-03-16 2022-03-16 光検出装置、光照射装置および光検出方法

Publications (1)

Publication Number Publication Date
JP2023135899A true JP2023135899A (ja) 2023-09-29

Family

ID=87993753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022041223A Pending JP2023135899A (ja) 2022-03-16 2022-03-16 光検出装置、光照射装置および光検出方法

Country Status (3)

Country Link
JP (1) JP2023135899A (zh)
KR (1) KR20230135505A (zh)
CN (1) CN116773145A (zh)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021089383A (ja) 2019-12-05 2021-06-10 株式会社ディスコ レーザービーム調整機構およびレーザー加工装置

Also Published As

Publication number Publication date
CN116773145A (zh) 2023-09-19
KR20230135505A (ko) 2023-09-25
TW202338444A (zh) 2023-10-01

Similar Documents

Publication Publication Date Title
JP6786148B2 (ja) オートフォーカスシステム、距離測定システム、オートフォーカス方法及びオートフォーカスシステム較正方法
TWI464362B (zh) 用於測量物體高度及獲得其對焦圖像的裝置與方法
JP2011517428A (ja) ウェハスクライブのためのオートフォーカス方法及び装置
US7417720B2 (en) Lighting optical machine and defect inspection system
US20200298343A1 (en) Method for producing device support base and laser cleaning apparatus
TW201518035A (zh) 加工裝置
US20220055291A1 (en) Three-dimensional printing system with integrated scan module calibration
JP2013504206A (ja) スピンウェーハ検査システムのための、動的に合焦・指向・形成される傾斜レーザー照射を生成および計測するための方法および装置
JP2017223602A (ja) 光干渉測定装置及び光干渉測定方法
JP2024502439A (ja) 計測のための瞳面ビーム走査
KR20130089581A (ko) 웨이퍼 검사 툴에서의 원자외선 레이저의 수명 연장 방법 및 장치
US11850793B2 (en) Laser array position detection
JP5328406B2 (ja) レーザ加工方法、レーザ加工装置及びソーラパネル製造方法
JP5268749B2 (ja) 基板状態検査方法及びレーザ加工装置並びにソーラパネル製造方法
JP2023135899A (ja) 光検出装置、光照射装置および光検出方法
JP6648399B1 (ja) レーザ加工装置、レーザ加工装置の収差調整方法、レーザ加工装置の収差制御方法、及びレーザ加工方法
TWI834466B (zh) 光檢測裝置、光照射裝置及光檢測方法
TW201942543A (zh) 測距單元及光照射裝置
KR20210025130A (ko) 다수의 파장을 사용하는 다수의 작업 거리 높이 센서
JP2011226939A (ja) 基板検査方法及び装置
JP2014095612A (ja) 検査装置
JP2017219342A (ja) 計測装置、計測方法、加工装置、および被加工物の生産方法
JP2010188396A (ja) レーザ加工方法、レーザ加工装置及びソーラパネル製造方法
JP4721393B2 (ja) 近接場露光方法
KR102015384B1 (ko) 투명면 및 반사면 검사 방법 및 장치