JP2023126975A - エネルギー制御コーティング構造、装置、及びそれらの製造方法 - Google Patents
エネルギー制御コーティング構造、装置、及びそれらの製造方法 Download PDFInfo
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- JP2023126975A JP2023126975A JP2023112995A JP2023112995A JP2023126975A JP 2023126975 A JP2023126975 A JP 2023126975A JP 2023112995 A JP2023112995 A JP 2023112995A JP 2023112995 A JP2023112995 A JP 2023112995A JP 2023126975 A JP2023126975 A JP 2023126975A
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60S—SERVICING, CLEANING, REPAIRING, SUPPORTING, LIFTING, OR MANOEUVRING OF VEHICLES, NOT OTHERWISE PROVIDED FOR
- B60S1/00—Cleaning of vehicles
- B60S1/02—Cleaning windscreens, windows or optical devices
- B60S1/023—Cleaning windscreens, windows or optical devices including defroster or demisting means
- B60S1/026—Cleaning windscreens, windows or optical devices including defroster or demisting means using electrical means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60J—WINDOWS, WINDSCREENS, NON-FIXED ROOFS, DOORS, OR SIMILAR DEVICES FOR VEHICLES; REMOVABLE EXTERNAL PROTECTIVE COVERINGS SPECIALLY ADAPTED FOR VEHICLES
- B60J1/00—Windows; Windscreens; Accessories therefor
- B60J1/002—Windows; Windscreens; Accessories therefor with means for clear vision, e.g. anti-frost or defog panes, rain shields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60J—WINDOWS, WINDSCREENS, NON-FIXED ROOFS, DOORS, OR SIMILAR DEVICES FOR VEHICLES; REMOVABLE EXTERNAL PROTECTIVE COVERINGS SPECIALLY ADAPTED FOR VEHICLES
- B60J1/00—Windows; Windscreens; Accessories therefor
- B60J1/02—Windows; Windscreens; Accessories therefor arranged at the vehicle front, e.g. structure of the glazing, mounting of the glazing
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3613—Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3615—Coatings of the type glass/metal/other inorganic layers, at least one layer being non-metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
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Abstract
Description
不純物の拡散及び酸化から銀層を保護するために、銀又はバッファ層/ブロッキング層の接着を促進するためのシード層などの他の金属が、機能的な方法で使用されている。
さらに、他の透明誘電体層(単数又は複数)もまた、カプセル化層として、及び/又は多層コーティング特性を改善するために組み込まれ得る。
さらに、光学特性は、金属膜中にナノ構造を設計することによって、又は透明誘電体膜中に金属ナノ構造を組み込むことによって、プラズモン共鳴を通じて調整することができる。電気バスバーは、除氷及び曇り除去のような機能を提供するために、1つ以上の金属層と一体化されてもよい。
特に明記しない限り、任意の特定の範囲又はグループは、範囲又はグループの各メンバー及びすべてのメンバーを個別に、並びにその中に包含され、その中の任意のサブ範囲又はサブグループに関して同様に言及する可能な方法であることを理解されたい。
別段の指定がない限り、本開示は、サブレンジ又はサブグループのそれぞれ及びすべての特定のメンバー及び組み合わせに関するものであり、明示的に組み込まれる。
本明細書で使用されるように、「~ほどの」との用語は、数量又はパラメータと併せて使用される場合、記載された数量又はパラメータの約10分の1から10倍に及ぶ範囲を指す。
多層構造は、透明基板10と、その上に形成された多層金属誘電体コーティングとを含む。多層金属誘電体は、第1の(下層の)誘電体層20と、金属層30と、第2の(上層の)誘電体層40とを含む。金属層30は、可視スペクトル(400~700nm)内の透過を可能にするのに十分に薄く、同時に赤外線において実質的な反射率を示す。
以下に詳細に記載するように、このような多層コーティングの特性は、1つ以上の水素化金属窒化物誘電体層中の水素濃度(及び/又はその空間プロファイル)を適切に調整することによって改善又は選択することができる。
後述するように、水素化金属窒化物誘電体層は、金属の接着を容易にする基板と、可視スペクトルにおいて実質的な透明性を示す薄い金属層の形成を可能にする低い浸透閾値(percolation threshold)とを提供する。
水素化された金属窒化物誘電体層は、図2に示されるように均一に水素化されてもよく、又は、以下にさらに詳細に記載されるように、空間依存性水素濃度を生じるように水素化されてもよい。
追加的に又は代替的に、水素化金属窒化物誘電体の特性は、スパッタ堆積工程中に成長表面に原子状及び/又はイオン状水素源を追加することによって調整することができる。
複数の水素化金属窒化物誘電体層を含む例示的な実施形態では、層のうちの任意の1つ又は複数は、1つ又は複数の機能を果たすように調整され、集合的に意図的な多層コーティングを与えることができる。
別のアプローチでは、膜成長表面における様々なレベルでの原子及び/又はイオン水素フラックスの添加は、同等に、対応する範囲の物理的、化学的、及び光学的特性を示す一連の水素化窒化アルミニウム膜を生じさせる。
理論によって限定されることを意図するものではないが、水素化金属窒化物層中の水素の存在は、金属窒化物誘電体層と透明基板10との接着性を高めるのにも有益であると考えられる。したがって、一実施例では、所与の選択された透明基板及び所与の選択された金属窒化物について、水素化された金属窒化物誘電体層の透明基板への十分な接着を達成する適切な条件を識別するために、水素濃度を変化させることができる(例えば、水素化工程中に存在する水素の量を変化させること、例えば、水素ガスの体積分率を変化させることによって間接的に)。理論によって限定されることを意図するものではないが、水素化金属窒化物誘電体はまた、水素化金属窒化物誘電体と透明基板との間の下層の界面において水酸化物及び酸化物の適切な形成を伴う緻密かつ緊密なネットワークを提供し得ると考えられる。
別の例示的な実施形態では、最上誘電体層は、適切に水素化された金属窒化物層として提供される場合、周囲の酸素及び水分に曝されると、水酸化物及び酸化物の形成を容易にもたらし得る。
(i)金属膜の厚さを変化させること
(ii)例えば、水素化によって誘電化学的性質を変化させ、これにより金属原子の拡散及び凝集を促進すること
(iii)例えば、成長表面に衝突する前に金属原子がナノ粒子に凝集することができるスパッタベースの工程を使用して、又は金属ナノ粒子を噴霧することによって、誘電膜堆積と同時にナノ粒子堆積を行うこと
によって、透明誘電層に組み込むことができる。
本明細書に開示される様々な金属誘電体構造及びその変形は、以下には限定されないが、例えば
・透明な熱ミラー及び透明な太陽制御コーティングを含むスペクトル選択性コーティング・透明な熱ミラー及び透明な太陽制御コーティングを同時に提供する透明な熱ミラー及び透明な太陽制御コーティングを含むスペクトル選択性抵抗性加熱器
・透明な熱ミラー及び透明な太陽制御コーティングとして機能し、自動車、航空宇宙、海洋及び関連用途における高効率のデフロスタ及びデフォッガとして使用されるスペクトル選択性抵抗性加熱器
・スペクトル選択性放射冷却コーティング;透明な導体不可視に近い無線送受信機及び送信機
・不可視に近い無線周波数エネルギーハーベスタ
などの用途に使用されてもよい。
金属誘電体多層積層体の別の例示的な実施形態が図18A及び18Bに示されている。この図18A及び図18Bにおいて、積層体は、誘電体層21、金属層30、誘電体層41、金属層50、及び誘電体層61を含む。多層構造は基板10上に設けられる。
以下の実施例は、当業者が本開示の実施形態を理解し、実施することを可能にするために提示される。それらは、本開示の範囲を限定するものと見なされるべきではなく、単にその例示及び代表であると見なされるべきである。
図19は、スパッタリング中に約0%~10%の体積分率の範囲の水素濃度を有するガラス基板の上にRF反応性スパッタリングを用いて堆積されたAlN:H膜の、波長の関数としての光学指数の例示的なデータセットを示す。主なスパッタガスは、アルゴンと窒素からなる。反応性RFスパッタリングを使用して堆積されたこれらの膜は、20sccmの名目総ガス流量を有する極低温ポンプマルチターゲットスパッタリングチャンバ内で調製される。ここで、アルゴン流量は15sccmであり、窒素流量は5sccmであり、水素流量は0~10sccmである。
図21(A~F)は、ガラス上に堆積されたAlN及びAlN:H膜の例の走査型電子顕微鏡(SEM)及び原子間力顕微鏡(AFM)観察グラフ、並びにZ(縦)方向における表面特徴/粒子突起/高さの分布を示す。 窒化アルミニウムの水素化は、明らかに粒径を減少させ(AlN及びAlN:H膜のSEM観察グラフを示す図21A及び21Bを参照)、より滑らかな膜を生じる。AlN膜の平均粒径及び標準偏差は48.6±9nmであり、AlN:H膜の平均粒径及び標準偏差は25.4±9nmである。膜の表面粗さは、AFMスキャンで観察される(それぞれAlN及びAlN:H膜表面のAFMスキャンを示す図21C及び21Dを参照されたい)。
図22は、3つの小角X線回折(XRD)パターンを示し、1つはAlNについて、2つはAlN:H膜についてであり、Si(100)上にRF反応性スパッタリングを使用して堆積される。AlN:H膜は、前駆体ガス流中に1.25%及び2.5%の体積分率の水素を用いて成長された。一番上のXRDスキャンは、AlNについての回折パターンを示し、2番目及び3番目のXRDスキャンは、それぞれ1.25%及び2.5%の水素を使用して成長させたAlN:Hについての回折パターンを示す。特徴的な結晶ピーク/線強度は、水素が増加するにつれて減少し、膜は次第に増加するアモルファス特性を呈することが観察される。
図23は、AlNの光透過率が、堆積後の水素化によって同等に増強され得ることを示す。具体的には、ガラス上に堆積されたAlN膜の例は、RF水素プラズマに曝される。水素化前及び水素化後(HAlNと称する)AlNフィルムの光透過率は、フィルムの光透過率が光学波長の範囲に亘って改善されることを示す。
下層の誘電体層、中層の金属層、及び上層の誘電体層を含む例示的な金属誘電体多層積層体の光学特性を図24に示す。金属誘電体積層体は、スパッタ堆積を用いて堆積される。誘電体層は水素化窒化アルミニウムであり、金属層は銀である。基板は、ポリエチレンテレフタレート(PET)フィルムである。裸のPETフィルム及びコーティングされたPETフィルムの透過曲線及び反射曲線を図に示す。可視光におけるピーク透過率は86%であり、明所視加重可視光透過率は85%であり、総太陽エネルギー排除率は35%である。約900nm付近の透過率曲線の不連続性は、検出器シフトである。
例示的な金属-誘電体多層積層体の加熱性能を図27に示す。多層積層体は、ガラス基板の上に堆積される。金属層と接触する電気バスバーは、可変電源に接続される。時間の関数としての温度変化のプロファイルを、様々な電力レベルについて示す。温度は、反対側のガラス表面で測定される。
例示的な金属誘電体多層積層体の安定性を図30(A~D)に示す。金属誘電体積層体はガラス上にある。また、温度は、反対側のガラス表面で測定される。光透過率は、3つの異なる位置(図30Dの概略図に示されるように)で、異なる時間において測定される。最初は時間ゼロに、その後、一連の熱加熱及び冷却サイクルに続いて異なる時間に測定される。各熱サイクルは、10秒間電力をオンにし、続いて15分間のパワーオフ冷却期間を含む。典型的な最初の温度は室温であり、一方、熱周期の発熱部に続く最高温度は約100℃ある。
例示的な金属-誘電体多層積層体の断面SEM画像を図31に示す。この画像は、後方散乱モードでは、白色粒子(520)として見られる銀(500)が、濃い灰色の層として見られる最上部の水素化AlN層(510)中に存在することを示す。銀ナノ粒子は、局在化表面プラズモン共鳴を生じる。
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Claims (21)
- 透明基板と、
前記透明基板の上に形成された多層金属誘電体コーティングと
を備えた金属誘電体太陽光制御構造であって、
前記多層金属誘電体コーティングは、一連の層として、
前記透明基板の上に形成された第1の透明誘電体層と、
前記第1の透明誘電体層の上に形成された金属層と、
前記金属層の上に形成された第2の透明誘電体層と
を含み、
前記第1の透明誘電体層及び前記第2の透明誘電体層のうちの少なくとも1つは、水素化金属窒化物誘電体層であり、
前記金属層は、十分に薄く、
前記水素化金属窒化物誘電体層の各々は、前記構造が可視スペクトルの少なくとも一部において少なくとも70%の透明度を示すように、有効水素濃度を含む
ことを特徴とする金属誘電体太陽光制御構造。 - 少なくとも1つの前記水素化金属窒化物誘電体層が水素化窒化アルミニウム層である、請求項1に記載の金属誘電体太陽光制御構造。
- 少なくとも1つの前記水素化金属窒化物誘電体層の中の水素濃度が1重量ppm~1000重量ppmである、請求項1又は2に記載の金属誘電体太陽光制御構造。
- 少なくとも1つの水素化金属窒化物誘電体層の中の水素濃度が、前記透明基板に関連する表面法線に平行な方向に空間的に傾斜している、請求項1~3のいずれか1項に記載の金属誘電体太陽光制御構造。
- 前記可視スペクトルにおける最小消衰係数が0.02未満である、請求項1~4のいずれか1項に記載の金属誘電体太陽光制御構造。
- 少なくとも1つの水素化金属窒化物誘電体層の屈折率が1.5~1.8である、請求項1~5のいずれか1項に記載の金属誘電体太陽光制御構造。
- 前記金属層の抵抗率が2~6マイクロオームcmである、請求項1~6のいずれか1項に記載の金属誘電体太陽光制御構造。
- 少なくとも1つの前記水素化金属窒化物誘電体層のファン平均粒径が30nm未満である、請求項1~7のいずれか1項に記載の金属誘電体太陽光制御構造。
- 少なくとも1つの前記水素化金属窒化物誘電体層の成長方向における、少なくとも1つの前記水素化金属窒化物誘電体層の中の粒度分布の半値全幅が3nm未満である、請求項1~8のいずれか1項に記載の金属誘電体太陽光制御構造。
- 前記金属層が銀層である、請求項1~8のいずれか1項に記載の金属誘電体太陽光制御構造。
- 前記金属層の厚さが3nm~30nmである、請求項1~10のいずれか1項に記載の金属誘電体太陽制御構造。
- 前記金属層が十分に薄く、
前記水素化金属窒化物誘電体層の各々が水素の有効濃度を有し、前記金属誘電体太陽光制御構造が、可視スペクトルの少なくとも一部において少なくとも70%の透明度を示し、赤外スペクトルの少なくとも一部において少なくとも85%の反射率を示す、請求項1~11のいずれか1項に記載の金属誘電体太陽光制御構造。 - 前記多層金属誘電体コーティングが、前記金属層及び電源と電気的に連通するバスバーを更に備える、請求項1~12のいずれか1項に記載の金属誘電体太陽光制御構造。
- 前記第1の透明誘電体層は、第1の水素化金属窒化物誘電体層であり、
前記第2の透明誘電体層は、第2の水素化金属窒化物誘電体層である
請求項1に記載の金属誘電体太陽光制御構造。 - 前記金属層及び前記第2の水素化金属窒化物誘電体層が、金属誘電体二重層を形成し、前記多層金属誘電体コーティングが、1つ又は複数の追加の金属誘電体二重層をさらに含む、請求項14に記載の金属誘電体太陽光制御構造。
- 前記多層金属誘電体コーティングの少なくとも1つの水素化金属窒化物誘電体層の中の水素濃度が、前記透明基板に関連する表面法線に平行な方向に空間的に傾斜している、請求項15に記載の金属誘電体太陽光制御構造。
- 前記金属層と、前記第1の透明誘電体層及び前記第2の透明誘電体層のうちの1つ又は複数との間の金属-誘電体界面が、ナノスケール粗さによって特徴付けられる、請求項1から16のいずれか1項に記載の金属-誘電体太陽光制御構造。
- 前記ナノスケール粗さが、前記構造の吸収スペクトルとしての、少なくとも1つのプラズモン特徴を生成するように構成された、請求項17に記載の金属誘電体太陽光制御構造。
- 前記第1の透明誘電体層及び前記第2の透明誘電体層のうちの1つ以上が、金属ナノ粒子の分布を含む、請求項1~16のいずれか1項に記載の金属誘電体太陽光制御構造。
- 前記金属ナノ粒子が、前記構造の吸収スペクトルとしての、少なくとも1つのプラズモン特徴を生成するように構成されたサイズ及び組成を有する、請求項19に記載の金属誘電体太陽光制御構造。
- 請求項1~20のいずれか1項に記載の太陽光制御構造を備える車両用フロントガラス。
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