CN111880255B - 带通滤光片及其制备方法 - Google Patents
带通滤光片及其制备方法 Download PDFInfo
- Publication number
- CN111880255B CN111880255B CN202010382748.8A CN202010382748A CN111880255B CN 111880255 B CN111880255 B CN 111880255B CN 202010382748 A CN202010382748 A CN 202010382748A CN 111880255 B CN111880255 B CN 111880255B
- Authority
- CN
- China
- Prior art keywords
- dielectric film
- film layer
- refractive index
- layer
- stack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000002360 preparation method Methods 0.000 title abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims abstract description 70
- 239000002184 metal Substances 0.000 claims abstract description 70
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000000463 material Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 22
- 238000000151 deposition Methods 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 9
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 239000004332 silver Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 6
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 238000005566 electron beam evaporation Methods 0.000 claims description 4
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 4
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 4
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 3
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910001020 Au alloy Inorganic materials 0.000 claims description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000003877 atomic layer epitaxy Methods 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000003353 gold alloy Substances 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052990 silicon hydride Inorganic materials 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 abstract description 13
- 238000010586 diagram Methods 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 236
- 238000001228 spectrum Methods 0.000 description 23
- 230000000694 effects Effects 0.000 description 16
- 229910010413 TiO 2 Inorganic materials 0.000 description 13
- 238000001914 filtration Methods 0.000 description 13
- 229910004298 SiO 2 Inorganic materials 0.000 description 12
- 230000008569 process Effects 0.000 description 8
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 7
- 238000002834 transmittance Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 238000007747 plating Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 238000000701 chemical imaging Methods 0.000 description 2
- 230000001351 cycling effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 210000000438 stratum basale Anatomy 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 244000141359 Malus pumila Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 235000021016 apples Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
Abstract
Description
层数序号 | 膜层材料 | 厚度nm |
1 | SiO<sub>2</sub> | 30 |
2 | TiO<sub>2</sub> | 122 |
3 | SiO<sub>2</sub> | 240 |
4 | TiO<sub>2</sub> | 67 |
5 | SiO<sub>2</sub> | 129 |
6 | TiO<sub>2</sub> | 15 |
7 | Al2O<sub>3</sub> | 18 |
8 | Ag | 52 |
9 | Al<sub>2</sub>O<sub>3</sub> | 18 |
10 | TiO<sub>2</sub> | 19 |
11 | Al<sub>2</sub>O<sub>3</sub> | 69 |
12 | Ag | 31 |
13 | Al<sub>2</sub>O<sub>3</sub> | 19 |
14 | TiO<sub>2</sub> | 18 |
15 | SiO<sub>2</sub> | 95 |
16 | TiO<sub>2</sub> | 69 |
17 | SiO<sub>2</sub> | 174 |
18 | TiO<sub>2</sub> | 35 |
19 | SiO<sub>2</sub> | 99 |
层数序号 | 膜层材料 | 厚度nm |
1 | SiO<sub>2</sub> | 50 |
2 | TiO<sub>2</sub> | 89 |
3 | SiO<sub>2</sub> | 57 |
4 | TiO<sub>2</sub> | 57 |
5 | SiO<sub>2</sub> | 69 |
6 | TiO<sub>2</sub> | 15 |
7 | Al<sub>2</sub>O<sub>3</sub> | 15 |
8 | Ag | 46 |
9 | Al<sub>2</sub>O<sub>3</sub> | 15 |
10 | TiO<sub>2</sub> | 15 |
11 | Al<sub>2</sub>O<sub>3</sub> | 45 |
12 | Ag | 55 |
13 | Al<sub>2</sub>O<sub>3</sub> | 111 |
14 | TiO<sub>2</sub> | 57 |
15 | SiO<sub>2</sub> | 69 |
16 | TiO<sub>2</sub> | 24 |
17 | SiO<sub>2</sub> | 104 |
Claims (12)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010382748.8A CN111880255B (zh) | 2020-05-08 | 2020-05-08 | 带通滤光片及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010382748.8A CN111880255B (zh) | 2020-05-08 | 2020-05-08 | 带通滤光片及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111880255A CN111880255A (zh) | 2020-11-03 |
CN111880255B true CN111880255B (zh) | 2023-01-03 |
Family
ID=73154029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010382748.8A Active CN111880255B (zh) | 2020-05-08 | 2020-05-08 | 带通滤光片及其制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN111880255B (zh) |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1529813A (en) * | 1974-10-16 | 1978-10-25 | Siemens Ag | Narrow-band interference filter |
US6049419A (en) * | 1998-01-13 | 2000-04-11 | 3M Innovative Properties Co | Multilayer infrared reflecting optical body |
US20070115415A1 (en) * | 2005-11-21 | 2007-05-24 | Arthur Piehl | Light absorbers and methods |
US7508586B2 (en) * | 2006-04-14 | 2009-03-24 | Southwall Technologies, Inc. | Zinc-based film manipulation for an optical filter |
CN100576408C (zh) * | 2006-12-28 | 2009-12-30 | 甘国工 | 等离子体显示器滤光板及使用该滤光板的显示器 |
EP2212726A1 (en) * | 2007-10-30 | 2010-08-04 | 3M Innovative Properties Company | Multi-stack optical bandpass film with electro magnetic interference shielding for optical display filters |
US7824777B2 (en) * | 2008-03-26 | 2010-11-02 | Southwall Technologies, Inc. | Robust optical filter utilizing pairs of dielectric and metallic layers |
CN101266309A (zh) * | 2008-04-25 | 2008-09-17 | 同济大学 | 具有宽的低反射旁通带的单峰窄带反射滤光片 |
CN202693834U (zh) * | 2012-07-09 | 2013-01-23 | 深圳市飞莱特光电技术有限公司 | 梳状干涉滤光片 |
CN103926642B (zh) * | 2014-04-17 | 2017-03-15 | 张家港康得新光电材料有限公司 | 红外截止滤光膜 |
FR3038597B1 (fr) * | 2015-07-08 | 2021-12-10 | Saint Gobain | Materiau muni d'un empilement a proprietes thermiques |
CN108521768B (zh) * | 2016-01-13 | 2020-06-12 | 日本涂料控股有限公司 | 多层涂膜及多层涂膜的形成方法 |
CN205844558U (zh) * | 2016-06-30 | 2016-12-28 | 浙江水晶光电科技股份有限公司 | 一种吸收型日夜两用带通滤光片 |
WO2018051638A1 (ja) * | 2016-09-15 | 2018-03-22 | セントラル硝子株式会社 | 日射遮蔽部材 |
AU2018255726B2 (en) * | 2017-04-17 | 2023-02-16 | 3E Nano Inc. | Energy control coatings, structures, devices, and methods of fabrication thereof |
CN108515743B (zh) * | 2018-05-09 | 2020-07-28 | 同济大学 | 一种金属/介质超宽带吸收薄膜及其制备方法 |
CN108387961A (zh) * | 2018-05-16 | 2018-08-10 | 德州尧鼎光电科技有限公司 | 一种深紫外窄带滤光片 |
CN111025448B (zh) * | 2019-12-27 | 2021-11-30 | 江西水晶光电有限公司 | 一种低反射滤光片 |
-
2020
- 2020-05-08 CN CN202010382748.8A patent/CN111880255B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN111880255A (zh) | 2020-11-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI576617B (zh) | 光學濾波器及感測器系統 | |
JP4806197B2 (ja) | 固体撮像装置 | |
JP2017161897A (ja) | 光学フィルタアレイ | |
CN111796353B (zh) | 光学滤波器及其形成方法 | |
CN110133783B (zh) | 一种红外窄带滤光片制造方法 | |
TW201733098A (zh) | 製造感測器裝置 | |
CN111880255B (zh) | 带通滤光片及其制备方法 | |
WO2020103206A1 (zh) | 一种偏振无关的滤光片 | |
TW202008012A (zh) | 多光譜濾波器 | |
US20150029582A1 (en) | Infrared filter | |
TWI764499B (zh) | 生物特徵感測裝置 | |
CN114415281B (zh) | 一种超宽通带短波通滤光膜的制备方法 | |
JP6944982B2 (ja) | 赤外線バンドパスフィルター構造及び該構造を応用する赤外線バンドパスフィルター | |
CN106886068A (zh) | 滤光片、其制备方法与具有其的成像设备 | |
JP7299346B2 (ja) | 近赤外帯域通過光フィルター及び光センシングシステム | |
US20230335652A1 (en) | Optical filter structure for arbitrary combination of rgb and ir wavelength ranges and its manufacturing method | |
CN112462461A (zh) | 红外带通滤波结构及应用该结构的红外带通滤波器 | |
WO2020015102A1 (zh) | 偏振无关的分束器 | |
TWI706169B (zh) | 紅外帶通濾波結構及應用該結構之紅外帶通濾波器 | |
CN110989183B (zh) | 一种用于海洋多维成像系统中的分光镜、其制备方法和设计方法 | |
JP3225571U (ja) | 赤外線バンドパスフィルター構造及び該構造を応用する赤外線バンドパスフィルター | |
CN211236324U (zh) | 红外带通滤波结构及应用该结构的红外带通滤波器 | |
JP2013068885A (ja) | バンドパスフィルタ、及びバンドパスフィルタの製造方法 | |
CN113093322B (zh) | Cmos图像传感器、干涉型滤光片及其制备方法 | |
CN217787425U (zh) | 一种膜系结构及具有该膜系结构的多光谱分光镜 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Bandpass filter and its preparation method Effective date of registration: 20230801 Granted publication date: 20230103 Pledgee: Industrial and Commercial Bank of China Limited Taizhou Branch Pledgor: ZHEJIANG CRYSTAL-OPTECH Co.,Ltd. Registration number: Y2023330001597 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20240102 Granted publication date: 20230103 Pledgee: Industrial and Commercial Bank of China Limited Taizhou Branch Pledgor: ZHEJIANG CRYSTAL-OPTECH Co.,Ltd. Registration number: Y2023330001597 |