JP2023123458A - 可変的な高さで傾斜した格子の方法 - Google Patents
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- JP2023123458A JP2023123458A JP2023089554A JP2023089554A JP2023123458A JP 2023123458 A JP2023123458 A JP 2023123458A JP 2023089554 A JP2023089554 A JP 2023089554A JP 2023089554 A JP2023089554 A JP 2023089554A JP 2023123458 A JP2023123458 A JP 2023123458A
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- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000005530 etching Methods 0.000 claims abstract description 19
- 229920002120 photoresistant polymer Polymers 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000006117 anti-reflective coating Substances 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 230000003190 augmentative effect Effects 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000059 patterning Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000000887 face Anatomy 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0045—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it by shaping at least a portion of the light guide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
- G02B27/0172—Head mounted characterised by optical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0065—Manufacturing aspects; Material aspects
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
- G02B27/0172—Head mounted characterised by optical features
- G02B2027/0174—Head mounted characterised by optical features holographic
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0013—Means for improving the coupling-in of light from the light source into the light guide
- G02B6/0015—Means for improving the coupling-in of light from the light source into the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0016—Grooves, prisms, gratings, scattering particles or rough surfaces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0038—Linear indentations or grooves, e.g. arc-shaped grooves or meandering grooves, extending over the full length or width of the light guide
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Integrated Circuits (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
Claims (15)
- 導波路において利用するための構造であって、
格子層が設けられた基板であって、前記格子層には陥凹構造が形成されており、前記陥凹構造は、
第1の末端、
第2の末端、及び
前記第1の末端から前記第2の末端へと変化する深さ
を含む、基板と、
前記格子層内に形成された複数のチャネルであって、各チャネルが複数の格子構造の一部分を部分的に画定し、前記複数の格子構造の深さが、前記陥凹構造により画定された前記第1の末端から前記第2の末端へと変化する、複数のチャネルと
を含む、構造。 - 前記複数の格子構造の前記深さが、前記第1の末端から前記第2の末端へと線形的に変化する、請求項1に記載の構造。
- 前記複数の格子構造の前記深さが、前記第1の末端から前記第2の末端へと非線形的に変化する、請求項1に記載の構造。
- 前記複数の格子構造の前記深さが、前記第1の末端から前記第2の末端へと変動する、請求項1に記載の構造。
- 各格子構造は、深さが約5nmと約700nmの間である、請求項1に記載の構造。
- 各格子構造が、約0度と約70度との間の角度で傾斜している、請求項1に記載の構造。
- 前記格子層は、屈折率が約1.3以上の光透過性材料から形成される、請求項1に記載の構造。
- 導波路において利用するための構造であって、
格子層が設けられた基板と、
前記格子層において第1の方向及び第2の方向において形成された陥凹部であって、深さが前記第1の方向及び前記第2の方向において変化し、三次元形状を画定する陥凹部と、
前記格子層において形成された複数のチャネルであって、各チャネルが、複数の格子構造の一部分を部分的に画定し、前記複数の格子構造の深さが、前記陥凹部により画定されるように前記第1の方向及び前記第2の方向において変化する、複数のチャネルと
を備える、構造。 - 前記陥凹部が鞍点形状をしている、請求項8に記載の構造。
- 前記陥凹部が正の曲率を有する、請求項8に記載の構造。
- 前記陥凹部が負の曲率を有する、請求項8に記載の構造。
- 前記格子層は、屈折率が約1.3以上の光透過性材料から形成される、請求項8に記載の構造。
- 各格子構造は、深さが約5nmと約700nmの間である、請求項8に記載の構造。
- 各格子構造が、約0度と約70度との間の角度で傾斜している、請求項8に記載の構造。
- 格子構造を形成する方法であって、
格子層において陥凹部を形成することであって、前記陥凹部は、前記陥凹部の第1の末端から第2の末端へと深さが変化する、格子層において陥凹部を形成することと、
前記格子層の上にハードマスク及びフォトレジストスタックを形成することであって、前記フォトレジストスタックは、
スピンオンプロセスを用いて形成された底面反射防止膜、
ケイ素反射防止膜、及び、
フォトレジスト
を含む、ハードマスク及びフォトレジストスタックを形成することと、
前記フォトレジストスタックをエッチングすることと、
前記格子層において複数の格子構造を形成すること
を含む、格子構造を形成する方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862700756P | 2018-07-19 | 2018-07-19 | |
US62/700,756 | 2018-07-19 | ||
PCT/US2019/040183 WO2020018270A1 (en) | 2018-07-19 | 2019-07-01 | Variable height slanted grating method |
JP2021500857A JP2021531495A (ja) | 2018-07-19 | 2019-07-01 | 可変的な高さで傾斜した格子の方法 |
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JP2021500857A Division JP2021531495A (ja) | 2018-07-19 | 2019-07-01 | 可変的な高さで傾斜した格子の方法 |
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JP2023123458A true JP2023123458A (ja) | 2023-09-05 |
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JP2021500857A Pending JP2021531495A (ja) | 2018-07-19 | 2019-07-01 | 可変的な高さで傾斜した格子の方法 |
JP2023089554A Pending JP2023123458A (ja) | 2018-07-19 | 2023-05-31 | 可変的な高さで傾斜した格子の方法 |
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Country Status (7)
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US (2) | US11480724B2 (ja) |
EP (1) | EP3824331B1 (ja) |
JP (2) | JP2021531495A (ja) |
KR (2) | KR102648201B1 (ja) |
CN (2) | CN112513688B (ja) |
TW (2) | TW202208937A (ja) |
WO (1) | WO2020018270A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102628931B1 (ko) * | 2018-11-07 | 2024-01-23 | 어플라이드 머티어리얼스, 인코포레이티드 | 경사 격자들의 형성 |
US10690821B1 (en) | 2018-12-14 | 2020-06-23 | Applied Materials, Inc. | Methods of producing slanted gratings |
US11662524B2 (en) * | 2020-03-13 | 2023-05-30 | Applied Materials, Inc. | Forming variable depth structures with laser ablation |
US11456205B2 (en) | 2020-05-11 | 2022-09-27 | Applied Materials, Inc. | Methods for variable etch depths |
FI20205642A1 (en) * | 2020-06-17 | 2021-12-18 | Dispelix Oy | A method of manufacturing an optical element, an optical element, and an apparatus for manufacturing an optical element |
US11867931B2 (en) | 2020-09-23 | 2024-01-09 | Applied Materials, Inc. | Fabrication of diffractive optic element having a variable refractive index profile by inkjet printing deposition |
WO2022240752A1 (en) | 2021-05-10 | 2022-11-17 | Applied Materials, Inc. | Methods of greytone imprint lithography to fabricate optical devices |
US20230118081A1 (en) * | 2021-10-15 | 2023-04-20 | Applied Materials, Inc. | Multilayer transmission structures for waveguide display |
WO2023235402A2 (en) * | 2022-06-03 | 2023-12-07 | Google Llc | Waveguide stack architecture with high red efficiency |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3160411A (en) | 1962-11-29 | 1964-12-08 | Ibm | Sheet handling apparatus |
US5907436A (en) * | 1995-09-29 | 1999-05-25 | The Regents Of The University Of California | Multilayer dielectric diffraction gratings |
CA2197706A1 (en) * | 1997-02-14 | 1998-08-14 | Peter Ehbets | Method of fabricating apodized phase mask |
JPH11337713A (ja) * | 1998-05-21 | 1999-12-10 | Fujitsu Ltd | 回折格子の形成方法 |
JP2002040221A (ja) * | 2000-07-27 | 2002-02-06 | Toppan Printing Co Ltd | 光制御板及びそれを用いたディスプレイ装置 |
US6754412B2 (en) * | 2002-07-31 | 2004-06-22 | Zolo Technologies, Inc. | Apparatus and method for producing a flat-topped filter response for (de)multiplexer having a diffraction grating with variable line spacing |
JP2004246193A (ja) * | 2003-02-14 | 2004-09-02 | Toppan Printing Co Ltd | ブレーズド回折格子 |
US20060056028A1 (en) | 2004-09-13 | 2006-03-16 | Wildnauer Kenneth R | Apodized diffraction grating with improved dynamic range |
US7643709B2 (en) * | 2006-05-12 | 2010-01-05 | Interuniversitair Microelektronica Centrum (Imec) | Slanted segmented coupler |
CN101589326B (zh) * | 2006-12-28 | 2011-06-29 | 诺基亚公司 | 用于在二维上扩展出射光瞳的设备 |
EP2118693A4 (en) | 2007-02-23 | 2011-08-10 | Nanocomp Ltd | METHOD FOR THE DESIGN OF A BENDING GRID STRUCTURE AND A BENDING GRID STRUCTURE |
JP2008218867A (ja) | 2007-03-07 | 2008-09-18 | Elpida Memory Inc | 半導体装置の製造方法 |
US7981591B2 (en) | 2008-03-27 | 2011-07-19 | Corning Incorporated | Semiconductor buried grating fabrication method |
US8279525B2 (en) | 2008-05-21 | 2012-10-02 | Lumella, Inc. | Three-dimensional diffractive structure, method for making, and applications thereof |
EP2336810A1 (de) * | 2009-12-18 | 2011-06-22 | Boegli-Gravures S.A. | Verfahren und Vorrichtung zur Erzeugung von Farbmustern mittels Beugungsgitter |
JP5724213B2 (ja) | 2010-05-13 | 2015-05-27 | セイコーエプソン株式会社 | 検出装置 |
CN102147492B (zh) * | 2011-01-06 | 2012-09-26 | 南京大学 | 微结构准相位匹配实现多维目标波导光栅和体光栅的制备方法 |
JP2014092730A (ja) * | 2012-11-06 | 2014-05-19 | Canon Inc | 回折格子、それを用いた光学装置 |
CN103901516B (zh) * | 2012-12-26 | 2016-06-15 | 清华大学 | 光栅的制备方法 |
US9349604B2 (en) | 2013-10-20 | 2016-05-24 | Tokyo Electron Limited | Use of topography to direct assembly of block copolymers in grapho-epitaxial applications |
JP2016034015A (ja) | 2014-02-28 | 2016-03-10 | パナソニックIpマネジメント株式会社 | 発光装置 |
US20160033784A1 (en) * | 2014-07-30 | 2016-02-04 | Tapani Levola | Optical Components |
US20160035539A1 (en) * | 2014-07-30 | 2016-02-04 | Lauri SAINIEMI | Microfabrication |
US9304235B2 (en) * | 2014-07-30 | 2016-04-05 | Microsoft Technology Licensing, Llc | Microfabrication |
EP3745167A1 (en) * | 2015-04-07 | 2020-12-02 | Magic Leap, Inc. | Diffraction grating and method of manufacture |
US9910276B2 (en) * | 2015-06-30 | 2018-03-06 | Microsoft Technology Licensing, Llc | Diffractive optical elements with graded edges |
US9864208B2 (en) | 2015-07-30 | 2018-01-09 | Microsoft Technology Licensing, Llc | Diffractive optical elements with varying direction for depth modulation |
US10197804B2 (en) * | 2016-04-25 | 2019-02-05 | Microsoft Technology Licensing, Llc | Refractive coating for diffractive optical elements |
US9885870B2 (en) * | 2016-04-25 | 2018-02-06 | Microsoft Technology Licensing, Llc | Diffractive optical elements with analog modulations and switching |
US10141156B2 (en) * | 2016-09-27 | 2018-11-27 | Kla-Tencor Corporation | Measurement of overlay and edge placement errors with an electron beam column array |
CN110036317B (zh) | 2016-10-05 | 2021-11-26 | 奇跃公司 | 制作非均匀衍射光栅 |
CN108152875A (zh) | 2017-12-28 | 2018-06-12 | 中国电子科技集团公司第四十四研究所 | 一种InP基纳米光栅及其制作方法 |
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- 2019-07-01 JP JP2021500857A patent/JP2021531495A/ja active Pending
- 2019-07-01 EP EP19837506.5A patent/EP3824331B1/en active Active
- 2019-07-01 US US17/257,767 patent/US11480724B2/en active Active
- 2019-07-01 KR KR1020247008311A patent/KR20240042100A/ko unknown
- 2019-07-01 CN CN201980047037.0A patent/CN112513688B/zh active Active
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TW202018370A (zh) | 2020-05-16 |
WO2020018270A1 (en) | 2020-01-23 |
CN112513688A (zh) | 2021-03-16 |
TW202208937A (zh) | 2022-03-01 |
KR102648201B1 (ko) | 2024-03-18 |
KR20240042100A (ko) | 2024-04-01 |
CN112513688B (zh) | 2023-05-26 |
US20230010821A1 (en) | 2023-01-12 |
JP2021531495A (ja) | 2021-11-18 |
TWI747004B (zh) | 2021-11-21 |
US20210294014A1 (en) | 2021-09-23 |
EP3824331A4 (en) | 2022-04-20 |
US11480724B2 (en) | 2022-10-25 |
KR20210022136A (ko) | 2021-03-02 |
EP3824331A1 (en) | 2021-05-26 |
EP3824331B1 (en) | 2024-05-22 |
CN116699745A (zh) | 2023-09-05 |
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