JP2023121805A - Probe pin, inspection jig, and inspection unit - Google Patents

Probe pin, inspection jig, and inspection unit Download PDF

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Publication number
JP2023121805A
JP2023121805A JP2023105717A JP2023105717A JP2023121805A JP 2023121805 A JP2023121805 A JP 2023121805A JP 2023105717 A JP2023105717 A JP 2023105717A JP 2023105717 A JP2023105717 A JP 2023105717A JP 2023121805 A JP2023121805 A JP 2023121805A
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Prior art keywords
contact
pair
contact portion
probe pin
main body
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Inventor
直哉 笹野
Naoya Sasano
宏真 寺西
Hirosane Teranishi
貴浩 酒井
Takahiro Sakai
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Omron Corp
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Omron Corp
Omron Tateisi Electronics Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures

Abstract

To provide a probe pin that can be more certainly brought into contact with a plurality of objects of contact with different sizes, an inspection jig including the probe pin, and an inspection unit including the inspection jig.SOLUTION: A probe pin comprises: a plate-like body part; a first contact part that is provided at one end in a first direction of the body part; a pair of second contact parts that are provided at one end in the first direction of the body part, are arranged at both ends in a second direction with respect to the first contact part with an interval from the first contact part, and extend to positions separated farther from the body part than the first contact part. The second contact parts respectively have guide surfaces that are arranged opposite to each other in the second direction and guide an object of contact approaching the first contact part along the first direction toward the first contact part.SELECTED DRAWING: Figure 4

Description

本開示は、プローブピン、検査治具および検査ユニットに関する。 The present disclosure relates to probe pins, inspection jigs, and inspection units.

カメラあるいは液晶パネル等の電子部品モジュールでは、一般に、その製造工程において、導通検査および動作特性検査等が行われる。これらの検査は、プローブピンを用いて、電子部品モジュールに設置されている本体基板に接続するための端子と、検査装置の端子とを接続することにより行われる。 2. Description of the Related Art Electronic component modules such as cameras and liquid crystal panels are generally subjected to continuity tests, operating characteristic tests, and the like in the manufacturing process. These inspections are performed by using probe pins to connect terminals for connection to the body board installed in the electronic component module and terminals of the inspection device.

このようなプローブピンとしては、特許文献１に記載されたものがある。このプローブピンは、上部プランジャと、下部プランジャと、上部プランジャおよび下部プランジャの間に配置されたコイルバネとを備え、上部プランジャの上部側に、半田ボールを挟み込むスリット構造を有する先端挟持部が形成されている。この先端挟持部は、円周上に間隔を空けて配置された複数の弾性部材を有し、各弾性部材が半径方向に拡開されることで、その間に半田ボールを受け入れて挟持するように構成されている。 As such a probe pin, there is one described in Patent Document 1. This probe pin includes an upper plunger, a lower plunger, and a coil spring disposed between the upper and lower plungers, and a tip clamping portion having a slit structure for sandwiching a solder ball is formed on the upper side of the upper plunger. ing. The tip clamping portion has a plurality of elastic members arranged at intervals on the circumference, and each elastic member expands in the radial direction so as to receive and clamp the solder ball therebetween. It is configured.

特開２００１－３１８１１９号公報Japanese Patent Application Laid-Open No. 2001-318119

前記プローブピンでは、先端挟持部で挟持可能な半田ボールが予め定められる。このため、例えば、予め定められた半田ボールよりも小さい半田ボールに対して、前記プローブピンを確実に接触させることが難しい場合がある。 In the probe pin, a solder ball that can be clamped by the tip clamping portion is predetermined. Therefore, for example, it may be difficult to reliably bring the probe pin into contact with a solder ball that is smaller than a predetermined solder ball.

本開示は、大きさの異なる複数の接触対象物に対してより確実に接触可能なプローブピン、このプローブピンを備えた検査治具、および、この検査治具を備えた検査ユニットを提供することを目的とする。 The present disclosure provides a probe pin that can more reliably contact a plurality of contact objects of different sizes, an inspection jig that includes the probe pin, and an inspection unit that includes the inspection jig. With the goal.

本開示の一例のプローブピンは、
板状の本体部と、
前記本体部の第１方向の一端に設けられ、前記一端から前記第１方向に沿って延びる第１接点部と、
前記本体部の前記一端に設けられ、前記第１接点部における前記第１方向および前記本体部の板厚方向に交差する第２方向の両側に前記第１接点部に対して間隔を空けてそれぞれ配置され、前記一端から前記第１方向に沿って前記第１接点部よりも前記本体部から離れた位置までそれぞれ延びる一対の第２接点部と
を備え、
前記一対の第２接点部の各々が、
前記第２方向において相互に対向して配置され、前記第１方向に沿って前記第１接点部に接近する接触対象物を前記第１接点部に向かって案内するガイド面を有している。 An example probe pin of the present disclosure includes:
a plate-like main body;
a first contact portion provided at one end of the body portion in the first direction and extending from the one end along the first direction;
provided at the one end of the main body portion and spaced apart from the first contact portion on both sides of the first contact portion in a second direction intersecting the first direction and the plate thickness direction of the main body portion, respectively a pair of second contact portions disposed and extending from the one end along the first direction to a position farther from the main body portion than the first contact portion;
Each of the pair of second contact portions,
It has guide surfaces that are arranged to face each other in the second direction and guide a contact object approaching the first contact portion along the first direction toward the first contact portion.

また、本開示の一例の検査治具は、
前記プローブピンと、
前記第１接点部および前記一対の第２接点部の各々が外部に露出した状態で前記プローブピンを収容可能な前記ソケットと
を備える。 In addition, an inspection jig according to an example of the present disclosure includes:
the probe pin;
The socket capable of accommodating the probe pin is provided with each of the first contact portion and the pair of second contact portions exposed to the outside.

また、本開示の一例の検査ユニットは、
前記検査治具を少なくとも１つ備える。 Also, an example inspection unit of the present disclosure includes:
At least one inspection jig is provided.

前記プローブピンによれば、板状の本体部と、本体部の第１方向の一端に設けられた第１接点部と、第１接点部における第２方向の両側に第１接点部に対して間隔を空けてそれぞれ配置された一対の第２接点部とを備える。各第２接点部は、本体部の一端から第１方向に沿って第１接点部よりも本体部から離れた位置までそれぞれ延びていると共に、第２方向において相互に対向して配置され、第１方向に沿って第１接点部に接近する接触対象物を第１接点部に向かって案内するガイド面を有している。このような構成により、大きさの異なる複数の接触対象物に対してより確実に接触可能なプローブピンを実現できる。 According to the probe pin, a plate-like body portion, a first contact portion provided at one end of the body portion in the first direction, and two contact portions on both sides of the first contact portion in the second direction and a pair of second contact portions spaced apart from each other. Each of the second contact portions extends from one end of the body portion to a position farther from the body portion than the first contact portion along the first direction, and is arranged to face each other in the second direction. It has a guide surface that guides a contact object approaching the first contact portion along one direction toward the first contact portion. With such a configuration, it is possible to realize a probe pin that can more reliably contact a plurality of contact objects having different sizes.

前記検査治具によれば、前記プローブピンにより、大きさの異なる複数の検査対象物の検査に適用可能な検査治具を実現できる。 According to the inspection jig, it is possible to realize an inspection jig applicable to inspection of a plurality of inspection objects having different sizes by using the probe pins.

前記検査ユニットによれば、前記検査治具により、大きさの異なる複数の検査対象物の検査に適用可能な検査ユニットを実現できる。 According to the inspection unit, the inspection jig can realize an inspection unit applicable to inspection of a plurality of inspection objects having different sizes.

本開示の一実施形態のプローブピンを示す斜視図。1 is a perspective view showing a probe pin of one embodiment of the present disclosure; FIG. 図１のプローブピンを備えた検査ユニット１の断面図。FIG. 2 is a cross-sectional view of an inspection unit 1 having the probe pins of FIG. 1; 図１のプローブピンの平面図。FIG. 2 is a plan view of the probe pin of FIG. 1; 図１のプローブピンの第１接点部および第２接点部を示す拡大平面図。FIG. 2 is an enlarged plan view showing a first contact portion and a second contact portion of the probe pin of FIG. 1; 図１のプローブピンの変形例を示す斜視図。The perspective view which shows the modification of the probe pin of FIG. 図５のプローブピンの平面図。FIG. 6 is a plan view of the probe pin of FIG. 5; 図５のプローブピンの第１接点部および第２接点部を示す拡大平面図。FIG. 6 is an enlarged plan view showing a first contact portion and a second contact portion of the probe pin of FIG. 5;

以下、本開示の一例を添付図面に従って説明する。なお、以下の説明では、必要に応じて特定の方向あるいは位置を示す用語（例えば、「上」、「下」、「右」、「左」を含む用語）を用いるが、それらの用語の使用は図面を参照した本開示の理解を容易にするためであって、それらの用語の意味によって本開示の技術的範囲が限定されるものではない。また、以下の説明は、本質的に例示に過ぎず、本開示、その適用物、あるいは、その用途を制限することを意図するものではない。さらに、図面は模式的なものであり、各寸法の比率等は現実のものとは必ずしも合致していない。 An example of the present disclosure will be described below with reference to the accompanying drawings. In the following description, terms indicating specific directions or positions (for example, terms including “upper”, “lower”, “right”, and “left”) are used as necessary, but the use of these terms is are intended to facilitate understanding of the present disclosure with reference to the drawings, and the technical scope of the present disclosure is not limited by the meanings of these terms. Also, the following description is merely exemplary in nature and is not intended to limit the present disclosure, its applications, or its uses. Furthermore, the drawings are schematic, and the ratio of each dimension does not necessarily match the actual one.

本開示の一実施形態のプローブピン３は、例えば、図１に示すように、第１方向Xに細長い薄板状で導電性を有している。このプローブピン３は、一例として、図２に示すように、絶縁性のソケット２０に収容された状態で使用され、ソケット２０と共に検査治具２を構成する。検査治具２には、一例として、複数のプローブピン３が収容されている。 A probe pin 3 according to an embodiment of the present disclosure is, for example, as shown in FIG. 1 , elongated in the first direction X in the form of a thin plate and conductive. As an example, as shown in FIG. 2, the probe pins 3 are used while being accommodated in an insulating socket 20, and together with the socket 20 constitute the inspection jig 2. As shown in FIG. As an example, the inspection jig 2 accommodates a plurality of probe pins 3 .

また、図２に示すように、検査治具２は、検査ユニット１の一部を構成している。この実施形態では、検査ユニット１は、一対の検査治具２を有している。各検査治具２は、後述するプローブピン３の各接点部３２、３３、３８が、ソケット２０から外部に露出した状態で、第１方向Ｘおよびプローブピン３の板厚方向Ｚに交差（例えば、直交）する第２方向Ｙに隣接するように配置されている。 Moreover, as shown in FIG. 2 , the inspection jig 2 constitutes a part of the inspection unit 1 . In this embodiment, inspection unit 1 has a pair of inspection jigs 2 . Each inspection jig 2 intersects the first direction X and the plate thickness direction Z of the probe pin 3 (for example, , orthogonal).

検査ユニット１は、図２に示すように、各検査治具２を収容するハウジング１０と、各検査治具２のソケット２０に対して揺動可能な状態でハウジング１０に支持された揺動部材４０とを備えている。 As shown in FIG. 2, the inspection unit 1 includes a housing 10 that accommodates each inspection jig 2, and a swinging member that is supported by the housing 10 so as to be rockable with respect to the sockets 20 of each inspection jig 2. 40.

ハウジング１０は、図２に示すように、一例として、略直方体状で、その外面の１つを構成する略矩形状の開口面１０１を有している。ハウジング１０の開口面１０１の長手方向の略中央には、開口面１０１に開口する開口部１４を有する凹部１３が設けられている。この凹部１３の内部に、略直方体状のソケット２０が収容されている。 As shown in FIG. 2, the housing 10 has, for example, a substantially rectangular parallelepiped shape and a substantially rectangular opening surface 101 forming one of its outer surfaces. A recess 13 having an opening 14 that opens to the opening surface 101 is provided substantially in the longitudinal center of the opening surface 101 of the housing 10 . A substantially rectangular parallelepiped socket 20 is accommodated inside the recess 13 .

揺動部材４０は、絶縁性で、接触対象物（例えば、検査対象物または検査装置）１００に接続可能に構成されている（図４参照）。この揺動部材４０は、図２に示すように、板部４１と、一対の壁部４２とを有し、第１方向Ｘに揺動可能に構成されている。板部４１は、略矩形板状を有し、開口面１０１に沿って延びている。各壁部４２は、板部４１の第２方向Ｘに対向する一対の板面の辺縁から、第１方向Ｘに交差（例えば、直交）する方向に延びている。 The swinging member 40 is insulating and configured to be connectable to a contact object (for example, an inspection object or an inspection device) 100 (see FIG. 4). The swinging member 40 has a plate portion 41 and a pair of wall portions 42, and is configured to be swingable in the first direction X, as shown in FIG. The plate portion 41 has a substantially rectangular plate shape and extends along the opening surface 101 . Each wall portion 42 extends in a direction intersecting (for example, perpendicular to) the first direction X from the edge of a pair of plate surfaces of the plate portion 41 facing the second direction X. As shown in FIG.

板部４１は、揺動部材４０の板部４１をその揺動方向（すなわち、第１方向Ｘ）に貫通して、後述するプローブピン３の第１接点部３２および第２接点部３３を収容可能な収容孔４３を有している。各収容孔４３は、板部４１の外面４１１側に開口した凹部４３１と、この凹部４３１の底面に開口した複数の貫通孔４３２とで構成されている。収容孔４３の凹部４３１には、各貫通孔４３２を介して各プローブピン３の第１方向Ｘの一端（すなわち、後述するプローブピン３の第１接触部３６）が収容され、各プローブピン３の第１方向Ｘの一端における第２方向Ｙおよびプローブピン３の板厚方向Ｚへの移動が規制されている。 The plate portion 41 penetrates the plate portion 41 of the swing member 40 in the swing direction (that is, the first direction X) and accommodates a first contact portion 32 and a second contact portion 33 of the probe pin 3 described later. It has a possible receiving hole 43 . Each accommodation hole 43 is composed of a recess 431 opening on the outer surface 411 side of the plate portion 41 and a plurality of through holes 432 opening on the bottom surface of the recess 431 . One end of each probe pin 3 in the first direction X (that is, a first contact portion 36 of the probe pin 3 to be described later) is accommodated in the concave portion 431 of the accommodation hole 43 via each through hole 432 , and each probe pin 3 Movement in the second direction Y and the plate thickness direction Z of the probe pin 3 at one end of the first direction X is regulated.

各壁部４２は、その第１方向Ｘの先端部が、開口面１０１の凹部１３まわりに設けられた収容溝１５の内部に収容されている。各壁部４２の先端部には、各壁部４２から相互に離れる方向に延びるフランジ部４７が設けられている。各フランジ部４７は、収容溝１５を構成するハウジング１０の内面によって、復帰位置Ｐ１と動作位置Ｐ２との間を第１方向Ｘに沿って移動可能に配置されている。すなわち、揺動部材４０の揺動範囲は、各フランジ部４７の第１方向Ｘにおける移動範囲により定められる。なお、復帰位置Ｐ１は、外力が加えられていない状態の揺動部材４０の位置であり、動作位置Ｐ２は、第１方向Ｘからハウジング１０に向かって外力が加えた状態の揺動部材４０の位置であり、第１方向Ｘにおいて復帰位置Ｐ１よりもソケット２０に近い位置である。 Each wall portion 42 has its tip in the first direction X housed inside the housing groove 15 provided around the recess 13 of the opening surface 101 . A flange portion 47 extending away from each wall portion 42 is provided at the tip portion of each wall portion 42 . Each flange portion 47 is arranged to be movable along the first direction X between the return position P<b>1 and the operating position P<b>2 by means of the inner surface of the housing 10 forming the accommodation groove 15 . That is, the swing range of the swing member 40 is determined by the movement range in the first direction X of each flange portion 47 . The return position P1 is the position of the swinging member 40 to which no external force is applied, and the operating position P2 is the position of the swinging member 40 to which the external force is applied from the first direction X toward the housing 10. position, which is closer to the socket 20 in the first direction X than the return position P1.

収容溝１５の内部には、コイルばね５０が設けられている。このコイルばね５０は、収容溝１５の底面を構成するハウジング１０の内面に配置され、各フランジ部４７を第１方向Ｘでかつ接続面１０１に向かって付勢している。 A coil spring 50 is provided inside the accommodation groove 15 . The coil spring 50 is arranged on the inner surface of the housing 10 forming the bottom surface of the housing groove 15 and biases each flange portion 47 in the first direction X toward the connecting surface 101 .

各ソケット２０は、図２に示すように、その内部に複数の収容部２１（図２には、１つのみ示す）を有している。各収容部２１は、スリット状を有し、それぞれ１つのプローブピン３を電気的に独立して収容可能かつ保持可能に構成されている。また、各収容部２１は、第１方向Ｘおよび第２方向Ｙに交差する方向（すなわち、図２の紙面貫通方向）に沿って一列に並んでかつ等間隔に配置されている。 Each socket 20 has a plurality of housings 21 (only one is shown in FIG. 2) therein, as shown in FIG. Each accommodation portion 21 has a slit shape, and is configured to be able to accommodate and hold one probe pin 3 electrically independently. In addition, the accommodation portions 21 are arranged in a line along a direction intersecting the first direction X and the second direction Y (that is, the penetrating direction through the plane of FIG. 2) and are arranged at regular intervals.

各プローブピン３は、図３に示すように、板状の本体部３１と、この本体部３１の第１方向Ｘの一端に設けられた第１接点部３２および第２接点部３３とを備えている。各プローブピン３は、一例として、電鋳法で形成されている。 Each probe pin 3, as shown in FIG. 3, includes a plate-like body portion 31, and a first contact portion 32 and a second contact portion 33 provided at one end of the body portion 31 in the first direction X. ing. Each probe pin 3 is formed by an electroforming method, for example.

本体部３１は、一例として、第１方向Ｘに沿って伸縮する弾性部３５と、弾性部３５における第１方向Ｘの一端に設けられた第１接触部３６と、弾性部３５における第１方向Ｘの他端に設けられた第２接触部３７とを有している。弾性部３５、第１接触部３６および第２接触部３７は、第１方向Ｘに沿って直列的に配置されかつ一体に構成されている。 As an example, the body portion 31 includes an elastic portion 35 that expands and contracts along the first direction X, a first contact portion 36 that is provided at one end of the elastic portion 35 in the first direction X, and an elastic portion 35 that extends in the first direction. and a second contact portion 37 provided at the other end of X. The elastic portion 35, the first contact portion 36, and the second contact portion 37 are arranged in series along the first direction X and integrally configured.

弾性部３５は、相互に隙間６５、６６、６７を空けて配置された複数の弾性片（この実施形態では、４つの弾性片）６１、６２、６３、６４を有している。各弾性片６１、６２、６３、６４は、一例として、細長い帯状で、２つの直線部７１、７２と、これらの直線部７１、７２を接続する湾曲部７３とで構成されている。なお、各弾性片６１、６２、６３、６４は、一例として、略同一の断面形状を有している。 The elastic portion 35 has a plurality of elastic pieces (in this embodiment, four elastic pieces) 61, 62, 63, 64 arranged with gaps 65, 66, 67 therebetween. Each of the elastic pieces 61 , 62 , 63 , 64 is, for example, in the shape of an elongated band, and is composed of two linear portions 71 , 72 and a curved portion 73 connecting the linear portions 71 , 72 . In addition, each elastic piece 61, 62, 63, 64 has substantially the same cross-sectional shape as an example.

第１接触部３６は、第１方向Ｘに沿って延びる接触部本体３６１と、接触部本体３６１から第２方向Ｙに延びる当接部３６２とを有している。接触部本体３６１の第１方向Ｘにおける弾性部３５から遠い端部には、第１接点部３２および第２接点部３３が設けられている。また、接触部本体３６１の第１方向Ｘにおける弾性部３５に近い端部には、弾性部３５の第１方向Ｘの一端が接続されている。当接部３６２は、接触部本体３６１の第１方向Ｘにおける弾性部３５側の端部に配置されている。 The first contact portion 36 has a contact portion main body 361 extending along the first direction X and a contact portion 362 extending in the second direction Y from the contact portion main body 361 . A first contact portion 32 and a second contact portion 33 are provided at the end portion of the contact portion main body 361 in the first direction X farther from the elastic portion 35 . One end of the elastic portion 35 in the first direction X is connected to the end portion of the contact portion main body 361 in the first direction X near the elastic portion 35 . The contact portion 362 is arranged at the end portion of the contact portion main body 361 in the first direction X on the elastic portion 35 side.

第２接触部３７は、第１方向Ｘに沿って延びる接触部本体３７１と、接触部本体３７１から第２方向Ｙに延びる当接部３７２とを有している。接触部本体３７１の第１方向Ｘにおける弾性部３５から遠い端部には、第３接点部３８が設けられている。また、接触部本体３７１の第１方向Ｘにおける弾性部３５に近い端部には、弾性部３５の第１方向Ｘの他端が接続されている。当接部３７２は、接触部本体３７１の第１方向Ｘにおける弾性部３５側の端部に配置されている。 The second contact portion 37 has a contact portion main body 371 extending along the first direction X and a contact portion 372 extending in the second direction Y from the contact portion main body 371 . A third contact portion 38 is provided at an end portion of the contact portion main body 371 in the first direction X farther from the elastic portion 35 . The other end of the elastic portion 35 in the first direction X is connected to the end of the contact portion main body 371 in the first direction X near the elastic portion 35 . The contact portion 372 is arranged at the end portion of the contact portion main body 371 in the first direction X on the side of the elastic portion 35 .

図３に示すように、第１接触部３６の接触部本体３６１および第２接触部３７の接触部本体３７１の各々は、第１接触部３６の接触部本体３６１における第２方向Ｙの中心を通りかつ第１方向Ｘに延びる仮想直線Ｌ上に配置されている。また、弾性部３５および各当接部３６２、３７２の各々は、仮想直線Ｌに対して第２方向Ｙにおける同じ側に配置されている。すなわち、弾性部３５は、第１方向Ｘにおいて、各当接部３６２、３７２の間に配置されている。 As shown in FIG. 3 , each of the contact portion main body 361 of the first contact portion 36 and the contact portion main body 371 of the second contact portion 37 is aligned with the center of the contact portion main body 361 of the first contact portion 36 in the second direction Y. are arranged on an imaginary straight line L extending in the first direction X. In addition, the elastic portion 35 and the contact portions 362 and 372 are arranged on the same side in the second direction Y with respect to the virtual straight line L. As shown in FIG. That is, the elastic portion 35 is arranged between the contact portions 362 and 372 in the first direction X. As shown in FIG.

図２に示すように、ソケット２０の各収容部２１にプローブピン３を収容した状態では、第１接触部３６の当接部３６２および第２接触部３７の当接部３７２の各々は、第１方向Ｘにおいて収容部２１を構成するソケット２０の内面に当接するように構成されている。すなわち、各当接部３６２、３７２により、第１方向Ｘにおけるプローブピン３の各接点部３２、３３、３８の位置が決められている。 As shown in FIG. 2, when the probe pins 3 are accommodated in the respective accommodating portions 21 of the socket 20, each of the contact portion 362 of the first contact portion 36 and the contact portion 372 of the second contact portion 37 is It is configured to come into contact with the inner surface of the socket 20 forming the housing portion 21 in one direction X. As shown in FIG. That is, the positions of the contact portions 32 , 33 , 38 of the probe pin 3 in the first direction X are determined by the contact portions 362 , 372 .

次に、図４を参照して、第１接点部３２および第２接点部３３をより詳細に説明する。 Next, with reference to FIG. 4, the first contact portion 32 and the second contact portion 33 will be described in more detail.

第１接点部３２は、第１接触部３６の接触部本体３６１における第１方向Ｘの一端（すなわち、本体部３１の第１方向Ｘの一端）に設けられ、接触部本体３６１の第１方向Ｘの一端から第１方向Ｘに沿って延びている。詳しくは、第１接点部３２は、第２方向Ｙに間隔を空けて配置された一対の突起３４で構成されている。各突起３４は、接触部本体３６１の第１方向Ｘの一端における第２方向Ｙの中心を通りかつ第１方向に延びる中心線（すなわち、仮想直線Ｌ）に対して対称に配置されている。 The first contact portion 32 is provided at one end of the contact portion body 361 of the first contact portion 36 in the first direction X (that is, one end of the body portion 31 in the first direction X). It extends along the first direction X from one end of X. Specifically, the first contact portion 32 is composed of a pair of projections 34 spaced apart in the second direction Y. As shown in FIG. Each protrusion 34 is arranged symmetrically with respect to a center line (that is, an imaginary straight line L) extending in the first direction and passing through the center in the second direction Y at one end of the contact portion main body 361 in the first direction X.

なお、揺動部材４０が復帰位置Ｐ１に位置している状態の検査ユニット１において、プローブピン３の第１接点部３２が、第１方向Ｘにおいて、揺動部材４０の板部４１の外面４１１よりもソケット２０（あるいは、ハウジング１０の開口面１０１）の近くに配置されている。すなわち、揺動部材４０が復帰位置Ｐ１に位置しているとき、プローブピン３の第１接点部３２は、収容孔４３の内部に配置されて、外力によって損傷し難いように構成されている。 In the inspection unit 1 in which the swinging member 40 is positioned at the return position P1, the first contact portion 32 of the probe pin 3 is positioned in the first direction X by the outer surface 411 of the plate portion 41 of the swinging member 40. It is arranged closer to the socket 20 (or the opening surface 101 of the housing 10) than. That is, when the swinging member 40 is positioned at the return position P1, the first contact portion 32 of the probe pin 3 is arranged inside the accommodation hole 43 and is configured so as not to be easily damaged by an external force.

第２接点部３３は、接触部本体３６１の第１方向Ｘの一端に設けられ、第１接点部３２の第２方向Ｙの両側にそれぞれ配置されて、対をなしている。一対の第２接点部３３の各々は、第１接点部３２に対して間隔を空けて、仮想直線Ｌに対して対称に配置されている。各第２接点部３３は、接触部本体３６１の第１方向Ｘの一端から第１方向Ｘに沿って第１接点部３２よりも本体部３１から離れた位置までそれぞれ延びている。 The second contact portions 33 are provided at one end of the contact portion main body 361 in the first direction X, are arranged on both sides of the first contact portion 32 in the second direction Y, and form a pair. Each of the pair of second contact portions 33 is spaced apart from the first contact portion 32 and arranged symmetrically with respect to the imaginary straight line L. As shown in FIG. Each second contact portion 33 extends along the first direction X from one end of the contact portion body 361 in the first direction X to a position farther from the body portion 31 than the first contact portion 32 .

各第２接点部３３は、第２方向Ｙにおいて相互に対向して配置され、第１方向Ｘに沿って第１接点部３２に接近する接触対象物１００を第１接点部３２に向かって案内するガイド面３３１を有している。各ガイド面３３１は、一例として、第１方向Ｘでかつ弾性部３５に向かって僅かに窪んだ湾曲面で構成されている。 The second contact portions 33 are arranged to face each other in the second direction Y, and guide the contact object 100 approaching the first contact portions 32 along the first direction X toward the first contact portions 32 . It has a guide surface 331 that As an example, each guide surface 331 is configured by a curved surface that is slightly depressed toward the elastic portion 35 in the first direction X. As shown in FIG.

接触対象物１００が、第１接点部３２を構成する一対の突起３４の両方に第１方向Xから同時に接触可能な第２方向Yの寸法（すなわち、幅寸法）を有する凸接点１１０であったとする。この場合、プローブピン３が凸接点１１０に接近する際（あるいは、凸接点１１０がプローブピン３に接近する際）に、プローブピン３の凸接点１１０に対する第２方向Yの位置がずれていたとしても、凸接点１１０が各ガイド面３３１に接触可能な位置であれば、プローブピン３は凸接点１１０に向かって案内される。その結果、一対の突起３４の各々が、凸接点１１０の先端面１０３に対して同時に接触する。 The contact object 100 is a convex contact 110 having a dimension in the second direction Y (i.e., width dimension) capable of simultaneously contacting both of the pair of projections 34 forming the first contact portion 32 from the first direction X. do. In this case, when the probe pin 3 approaches the convex contact 110 (or when the convex contact 110 approaches the probe pin 3), the position of the probe pin 3 in the second direction Y with respect to the convex contact 110 is displaced. Also, if the convex contact 110 is at a position where it can contact each guide surface 331 , the probe pin 3 is guided toward the convex contact 110 . As a result, each of the pair of protrusions 34 contacts the tip surface 103 of the convex contact 110 at the same time.

また、接触対象物１００が、一対の突起３４の両方に第１方向Xから同時に接触不可能な幅寸法を有する凸接点１２０であったとする。この場合、凸接点１２０の幅寸法が第１接触部３６の幅寸法よりも小さければ、一対の第２接点部３３の各々が、凸接点１２０の第２方向Yにおける両方の先端角部１０４に対して同時に接触する。 It is also assumed that the contact object 100 is a convex contact 120 having a width dimension that cannot simultaneously contact both of the pair of protrusions 34 in the first direction X. FIG. In this case, if the width dimension of the convex contact 120 is smaller than the width dimension of the first contact portion 36, each of the pair of second contact portions 33 is positioned at both tip corners 104 of the convex contact 120 in the second direction Y. contact at the same time.

このように、プローブピン３によれば、板状の本体部３１と、本体部３１の第１方向Xの一端に設けられた第１接点部３２と、第１接点部３２における第２方向Yの両側に第１接点部３２に対して間隔を空けてそれぞれ配置された一対の第２接点部３３とを備える。各第２接点部３３は、本体部３１の一端から第１方向Xに沿って第１接点部３２よりも本体部３１から離れた位置までそれぞれ延びていると共に、第２方向Yにおいて相互に対向して配置され、第１方向Xに沿って第１接点部３２に接近する接触対象物１００を第１接点部３２に向かって案内するガイド面３３１を有している。このような構成により、大きさの異なる複数の接触対象物１００に対してより確実に接触可能なプローブピン３を実現できる。 Thus, according to the probe pin 3, the plate-like body portion 31, the first contact portion 32 provided at one end of the body portion 31 in the first direction X, and the first contact portion 32 in the second direction Y A pair of second contact portions 33 are arranged on both sides of the first contact portion 32 with a space therebetween. Each second contact portion 33 extends from one end of the main body portion 31 along the first direction X to a position farther from the main body portion 31 than the first contact portion 32, and faces each other in the second direction Y. and has a guide surface 331 that guides the contact object 100 approaching the first contact portion 32 along the first direction X toward the first contact portion 32 . With such a configuration, it is possible to realize the probe pin 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes.

また、第１接点部３２が、第２方向Ｙに間隔を空けて配置された一対の突起３４で構成されている。このような構成により、大きさの異なる複数の接触対象物１００に対してより確実に接触可能なプローブピン３を実現できる。 Also, the first contact portion 32 is composed of a pair of protrusions 34 spaced apart in the second direction Y. As shown in FIG. With such a configuration, it is possible to realize the probe pin 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes.

一対の突起３４の各々が中心線Ｌに対して対称に配置され、一対の第２接点部３３の各々が中心線Ｌに対して対称に配置されている。このような構成により、大きさの異なる複数の接触対象物１００に対してより確実に接触可能なプローブピン３を実現できる。 Each of the pair of projections 34 is arranged symmetrically with respect to the center line L, and each of the pair of second contact portions 33 is arranged symmetrically with respect to the center line L. With such a configuration, it is possible to realize the probe pin 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes.

プローブピン３により、大きさの異なる複数の検査対象物の検査に適用可能な検査治具２を実現できる。また、プローブピン３を備えた検査治具２により、大きさの異なる複数の検査対象物の検査に適用可能な検査ユニット１を実現できる。 The probe pin 3 can realize the inspection jig 2 that can be applied to inspection of a plurality of inspection objects having different sizes. Moreover, the inspection jig 2 having the probe pins 3 can realize the inspection unit 1 applicable to inspection of a plurality of inspection objects having different sizes.

また、検査ユニット１が、ソケット２０に対して揺動可能な状態で支持された揺動部材４０をさらに備える。このような構成により、プローブピン３の第１接点部３２および各第２接点部３３に対する損傷の発生を低減できる。 Moreover, the inspection unit 1 further includes a swing member 40 supported in a swingable state with respect to the socket 20 . Such a configuration can reduce the occurrence of damage to the first contact portion 32 and the second contact portions 33 of the probe pin 3 .

なお、本体部３１は、弾性部３５、第１接触部３６および第２接触部３７を有する場合に限らない。 Note that the body portion 31 is not limited to having the elastic portion 35 , the first contact portion 36 and the second contact portion 37 .

例えば、弾性部３５は、第１方向Ｘに伸縮可能な蛇行形状であってもよい。また、第１接触部３６の第１接点部３２は、一対の突起３４で構成されている場合に限らず、１つの突起で構成されていてもよいし、３以上の突起３４で構成されていてもよい。 For example, the elastic part 35 may have a meandering shape that can be expanded and contracted in the first direction X. Further, the first contact portion 32 of the first contact portion 36 is not limited to being composed of a pair of projections 34, and may be composed of one projection, or may be composed of three or more projections 34. may

また、例えば、第１接触部３６は、図５～図７に示すように、一対の脚部８１、８２を有していてもよい。一対の脚部８１、８２は、第１接触部３６の第１方向Ｘの一端（すなわち、本体部３１の第１方向Ｘの一端）に設けられ、第１方向Ｘに沿って延びると共に第２方向Ｙに隙間８３を空けて配置されている。各脚部８１、８２は、第２方向Ｙにおいて対向する対向面８１１、８２１にそれぞれ設けられ、相互に接近する方向に突出する突出部８４を有している。各突出部８４には、各突起３４が設けられ、第１接点部３２を構成している。また、各脚部８１、８２における第１方向Ｘの先端が、各第２接点部３３を構成している。 Also, for example, the first contact portion 36 may have a pair of leg portions 81 and 82 as shown in FIGS. The pair of leg portions 81 and 82 are provided at one end of the first contact portion 36 in the first direction X (that is, one end of the main body portion 31 in the first direction X), extend along the first direction X, and extend in the second direction X. They are arranged with a gap 83 in the Y direction. Each of the leg portions 81 and 82 is provided on opposing surfaces 811 and 821 that face each other in the second direction Y, and has protrusions 84 that protrude in directions toward each other. Each projecting portion 84 is provided with each protrusion 34 to constitute the first contact portion 32 . Further, the ends of the legs 81 and 82 in the first direction X constitute the second contact portions 33 .

第１接触部３６と接触対象物１００とが接触した後、さらに、プローブピン３を第１方向Ｘに沿って接触対象物１００に向かって移動させる。すると、第１接点部３２と接触対象物１００とが接触した状態で、各脚部８１、８２が第２方向Ｙにおいて相互に離れる方向に弾性変形し、第１接点部３２と接触対象物１００との間でワイピングが行われる。すなわち、図５～図７のプローブピン３によれば、第１接点部３２および接触対象物１００の表面に付着した異物が擦り取られ、プローブピン３の接触対象物１００に対する接触信頼性を高めることができる。 After the first contact portion 36 and the contact object 100 are brought into contact with each other, the probe pin 3 is further moved along the first direction X toward the contact object 100 . Then, while the first contact portion 32 and the contact object 100 are in contact with each other, the leg portions 81 and 82 are elastically deformed in the second direction Y so as to move away from each other. Wiping is performed between That is, according to the probe pin 3 of FIGS. 5 to 7, the foreign matter adhering to the surface of the first contact portion 32 and the contact object 100 is scraped off, and the contact reliability of the probe pin 3 with the contact object 100 is improved. be able to.

各脚部８１、８２は、第２接点部３３を構成する先端の第１方向Ｘにおける位置が相互に異なっている。言い換えると、一方の脚部８１の第２接点部３３は、第１方向Ｘにおいて、他方の脚部８２の第２接点部３３よりも弾性部３５から遠い位置に配置されている。このような構成により、大きさの異なる複数の接触対象物１００に対してより確実に接触可能なプローブピン３を実現できる。 The legs 81 and 82 have different positions in the first direction X of the tips forming the second contact portion 33 . In other words, the second contact portion 33 of one leg portion 81 is located farther from the elastic portion 35 in the first direction X than the second contact portion 33 of the other leg portion 82 is. With such a configuration, it is possible to realize the probe pin 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes.

第２接触部３７は、第１接触部３６と同じ構成の接点部を設けてもよいし、第３接点部３８を複数の突起で構成してもよい。 The second contact portion 37 may be provided with a contact portion having the same configuration as the first contact portion 36, or the third contact portion 38 may be configured with a plurality of protrusions.

以上、図面を参照して本開示における種々の実施形態を詳細に説明したが、最後に、本開示の種々の態様について説明する。なお、以下の説明では、一例として、参照符号も添えて記載する。 Various embodiments of the present disclosure have been described in detail above with reference to the drawings. Finally, various aspects of the present disclosure will be described. In addition, in the following description, reference numerals are also attached as an example.

本開示の第１態様のプローブピン３は、
板状の本体部３１と、
前記本体部３１の第１方向Ｘの一端に設けられ、前記一端から前記第１方向Ｘに沿って延びる第１接点部３２と、
前記本体部３１の前記一端に設けられ、前記第１接点部３２における前記第１方向Ｘおよび前記本体部３１の板厚方向に交差する第２方向Ｙの両側に前記第１接点部３２に対して間隔を空けてそれぞれ配置され、前記一端から前記第１方向Ｘに沿って前記第１接点部３２よりも前記本体部３１から離れた位置までそれぞれ延びる一対の第２接点部３３と
を備え、
前記一対の第２接点部３３の各々が、
前記第２方向Ｙにおいて相互に対向して配置され、前記第１方向Ｘに沿って前記第１接点部３２に接近する接触対象物１００を前記第１接点部３２に向かって案内するガイド面３３１を有している。 The probe pin 3 of the first aspect of the present disclosure is
a plate-like body portion 31;
a first contact portion 32 provided at one end of the main body portion 31 in the first direction X and extending along the first direction X from the one end;
provided at the one end of the main body portion 31 and on both sides of the first contact portion 32 in a second direction Y intersecting the first direction X and the plate thickness direction of the main body portion 31 with respect to the first contact portion 32; a pair of second contact portions 33 that are spaced apart from each other and extend from the one end along the first direction X to a position farther from the body portion 31 than the first contact portion 32,
Each of the pair of second contact portions 33 is
Guide surfaces 331 are arranged to face each other in the second direction Y and guide the contact object 100 approaching the first contact portion 32 along the first direction X toward the first contact portion 32. have.

第１態様のプローブピン３によれば、大きさの異なる複数の接触対象物１００に対してより確実に接触可能なプローブピン３を実現できる。 According to the probe pin 3 of the first aspect, it is possible to realize the probe pin 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes.

本開示の第２態様のプローブピン３は、
前記第１接点部３２が、前記第２方向Ｙに間隔を空けて配置された一対の突起３４で構成されている。 The probe pin 3 of the second aspect of the present disclosure is
The first contact portion 32 is composed of a pair of projections 34 spaced apart in the second direction Y. As shown in FIG.

第２態様のプローブピン３によれば、大きさの異なる複数の接触対象物１００に対してより確実に接触可能なプローブピン３を実現できる。 According to the probe pin 3 of the second aspect, it is possible to realize the probe pin 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes.

本開示の第３態様のプローブピン３は、
前記一対の突起３４の各々が、前記本体部３１の前記一端における前記第２方向Ｙの中心を通りかつ前記第１方向Ｘに延びる中心線Ｌに対して対称に配置され、
前記一対の第２接点部３３の各々が、前記中心線Ｌに対して対称に配置されている。 The probe pin 3 of the third aspect of the present disclosure is
Each of the pair of protrusions 34 is arranged symmetrically with respect to a center line L passing through the center of the second direction Y at the one end of the body portion 31 and extending in the first direction X,
Each of the pair of second contact portions 33 is arranged symmetrically with respect to the center line L. As shown in FIG.

第３態様のプローブピン３によれば、大きさの異なる複数の接触対象物１００に対してより確実に接触可能なプローブピン３を実現できる。 According to the probe pin 3 of the third aspect, it is possible to realize the probe pin 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes.

本開示の第４態様のプローブピン３は、
前記本体部３１が、
前記本体部３１の前記一端に設けられ、前記第１方向Ｘに沿って延びると共に、前記第２方向Ｙに隙間８３を空けて配置された一対の脚部８１、８２を有し、
前記一対の脚部８１、８２の各々が、
前記第２方向Ｙにおいて対向する対向面８１１、８２１に設けられ、相互に接近する方向に突出する突出部８４を有し、
前記一対の脚部８１、８２の各々における前記突出部８４に前記一対の突起３４の各々が設けられ、前記第１接点部３２を構成し、
前記一対の脚部８１、８２の各々における前記第１方向Ｘの先端が、前記一対の第２接点部３３の各々を構成する。 The probe pin 3 of the fourth aspect of the present disclosure is
The body portion 31 is
A pair of leg portions 81 and 82 provided at the one end of the body portion 31, extending along the first direction X, and arranged with a gap 83 in the second direction Y,
Each of the pair of legs 81 and 82
provided on the opposing surfaces 811 and 821 that face each other in the second direction Y, and having protrusions 84 that protrude in directions approaching each other;
Each of the pair of protrusions 34 is provided on the protrusion 84 of each of the pair of legs 81 and 82 to form the first contact portion 32,
The tip of each of the pair of leg portions 81 and 82 in the first direction X constitutes each of the pair of second contact portions 33 .

第４態様のプローブピン３によれば、例えば、第１接触部３６と接触対象物１００とが接触した後、さらに、プローブピン３を第１方向Ｘに沿って接触対象物１００に向かって移動させる。すると、第１接点部３２と接触対象物１００とが接触した状態で、各脚部８１、８２が第２方向Ｙにおいて相互に離れる方向に弾性変形し、第１接点部３２と接触対象物１００との間でワイピングが行われる。その結果、第１接点部３２および接触対象物１００の表面に付着した異物が擦り取られ、プローブピン３の接触対象物１００に対する接触信頼性を高めることができる。 According to the probe pin 3 of the fourth aspect, for example, after the first contact portion 36 and the contact object 100 are brought into contact with each other, the probe pin 3 is further moved along the first direction X toward the contact object 100. Let Then, while the first contact portion 32 and the contact object 100 are in contact with each other, the leg portions 81 and 82 are elastically deformed in the second direction Y so as to move away from each other. Wiping is performed between As a result, foreign matter adhering to the surfaces of the first contact portion 32 and the contact object 100 is scraped off, and the contact reliability of the probe pin 3 with the contact object 100 can be enhanced.

本開示の第５態様のプローブピン３は、
前記一対の脚部８１、８２の各々における前記先端の前記第１方向Ｘの位置が、相互に異なっている。 The probe pin 3 of the fifth aspect of the present disclosure is
The positions of the distal ends of the pair of legs 81 and 82 in the first direction X are different from each other.

第５態様のプローブピン３によれば、大きさの異なる複数の接触対象物１００に対してより確実に接触可能なプローブピン３を実現できる。 According to the probe pin 3 of the fifth aspect, it is possible to realize the probe pin 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes.

本開示の第６態様の検査治具２は、
前記態様のプローブピン３と、
前記第１接点部３２および前記一対の第２接点部３３の各々が外部に露出した状態で前記プローブピン３を収容可能なソケット２０と
を備える。 The inspection jig 2 of the sixth aspect of the present disclosure is
the probe pin 3 of the above aspect;
A socket 20 capable of accommodating the probe pin 3 is provided with each of the first contact portion 32 and the pair of second contact portions 33 exposed to the outside.

第６態様の検査治具２によれば、プローブピン３により、大きさの異なる複数の検査対象物の検査に適用可能な検査治具２を実現できる。 According to the inspection jig 2 of the sixth aspect, the probe pins 3 can realize the inspection jig 2 applicable to inspection of a plurality of inspection objects having different sizes.

本開示の第７態様の検査ユニット１は、
前記検査治具２を少なくとも１つ備える。 The inspection unit 1 of the seventh aspect of the present disclosure includes
At least one inspection jig 2 is provided.

第７態様の検査ユニット１によれば、検査治具２により、大きさの異なる複数の検査対象物の検査に適用可能な検査ユニット１を実現できる。 According to the inspection unit 1 of the seventh aspect, the inspection jig 2 can realize the inspection unit 1 applicable to inspection of a plurality of inspection objects having different sizes.

本開示の第８態様の検査ユニット１は、
前記ソケット２０に対して揺動可能な状態で支持された揺動部材４０をさらに備え、
前記揺動部材４０が、
前記揺動部材４０をその揺動方向に貫通して、前記プローブピン３の前記第１接点部３２および前記一対の第２接点部３３を収容可能な収容孔４３を有し、
復帰位置Ｐ１と、前記第１方向Ｘにおいて前記復帰位置Ｐ１よりも前記ソケット２０に近い動作位置Ｐ２との間を揺動可能に構成されている。 The inspection unit 1 of the eighth aspect of the present disclosure includes:
further comprising a swinging member 40 supported in a swingable state with respect to the socket 20,
The rocking member 40 is
a receiving hole 43 that penetrates the swinging member 40 in the swinging direction and can accommodate the first contact portion 32 and the pair of second contact portions 33 of the probe pin 3;
It is configured to be swingable between a return position P1 and an operating position P2 closer to the socket 20 than the return position P1 in the first direction X. As shown in FIG.

第８態様の検査ユニット１によれば、プローブピン３の第１接点部３２および各第２接点部３３に対する損傷の発生を低減できる。 According to the inspection unit 1 of the eighth aspect, the occurrence of damage to the first contact portion 32 and each second contact portion 33 of the probe pin 3 can be reduced.

なお、前記様々な実施形態または変形例のうちの任意の実施形態または変形例を適宜組み合わせることにより、それぞれの有する効果を奏するようにすることができる。また、実施形態同士の組み合わせまたは実施例同士の組み合わせまたは実施形態と実施例との組み合わせが可能であると共に、異なる実施形態または実施例の中の特徴同士の組み合わせも可能である。 By appropriately combining any of the various embodiments or modifications described above, the respective effects can be obtained. In addition, combinations of embodiments, combinations of examples, or combinations of embodiments and examples are possible, as well as combinations of features in different embodiments or examples.

本開示のプローブピンは、例えば、カメラモジュールなどのＢｔｏＢ（Business-to-Business）コネクタを接続媒体として備えるモジュール、および、ＳＯＰ（Small Outline Package）、ＱＦＰ（Quad Flat Package）、ＢＧＡ（Ball grid array）などの半導体パッケージの検査に用いる検査治具に適用できる。 The probe pin of the present disclosure is, for example, a module including a BtoB (Business-to-Business) connector such as a camera module as a connection medium, an SOP (Small Outline Package), a QFP (Quad Flat Package), a BGA (Ball grid array ) can be applied to inspection jigs used for inspection of semiconductor packages.

本開示の検査治具は、例えば、カメラモジュールなどのＢｔｏＢ（Business-to-Business）コネクタを接続媒体として備えるモジュール、および、ＳＯＰ（Small Outline Package）、ＱＦＰ（Quad Flat Package）、ＢＧＡ（Ball grid array）などの半導体パッケージの検査に用いる検査ユニットに適用できる。 The inspection jig of the present disclosure includes, for example, a module such as a camera module that includes a BtoB (Business-to-Business) connector as a connection medium, an SOP (Small Outline Package), a QFP (Quad Flat Package), a BGA (Ball grid It can be applied to inspection units used for inspection of semiconductor packages such as arrays.

本開示の検査ユニットは、例えば、カメラモジュールなどのＢｔｏＢ（Business-to-Business）コネクタを接続媒体として備えるモジュール、および、ＳＯＰ（Small Outline Package）、ＱＦＰ（Quad Flat Package）、ＢＧＡ（Ball grid array）などの半導体パッケージの検査に用いることができる。 The inspection unit of the present disclosure includes, for example, a module including a BtoB (Business-to-Business) connector such as a camera module as a connection medium, an SOP (Small Outline Package), a QFP (Quad Flat Package), a BGA (Ball grid array ) and other semiconductor packages.

１ 検査ユニット
１０ ハウジング
１０１ 開口面
１０３ 先端面
１０４ 先端角部
１３ 凹部
１４ 開口部
１５ 収容溝
２ 検査治具
２０ ソケット
３ プローブピン
３１ 本体部
３２ 第１接点部
３３ 第２接点部
３３１ ガイド面
３４ 突起
３５ 弾性部
３６ 第１接触部
３６１ 接触部本体
３６２ 当接部
３７ 第２接触部
３７１ 接触部本体
３７２ 当接部
３８ 第３接点部
４０ 揺動部材
４１ 板部
４１１ 外面
４２ 壁部
４３ 収容孔
４３１ 凹部
４３２ 貫通孔
４７ フランジ部
５０ コイルばね
６１、６２、６３、６４ 弾性片
６５、６６、６７ 隙間
７１、７２ 直線部
７３ 湾曲部
８１、８２ 脚部
８１１、８２１ 対向面
８３ 隙間
８４ 突出部
８５
１００ 接触対象物
１１０、１２０ 凸接点 1 inspection unit 10 housing 101 opening surface 103 tip surface 104 tip corner portion 13 concave portion 14 opening portion 15 accommodation groove 2 inspection jig 20 socket 3 probe pin 31 body portion 32 first contact portion 33 second contact portion 331 guide surface 34 projection 35 Elastic portion 36 First contact portion 361 Contact portion body 362 Contact portion 37 Second contact portion 371 Contact portion body 372 Contact portion 38 Third contact portion 40 Swing member 41 Plate portion 411 Outer surface 42 Wall portion 43 Accommodating hole 431 Recessed portion 432 Through hole 47 Flange portion 50 Coil springs 61, 62, 63, 64 Elastic pieces 65, 66, 67 Gap 71, 72 Straight portion 73 Curved portion 81, 82 Leg portion 811, 821 Opposing surface 83 Gap 84 Protruding portion 85
100 contact object 110, 120 convex contact

Claims (5)

板状の本体部と、
前記本体部の第１方向の一端に設けられ、前記一端から前記第１方向に沿って延びる第１接点部と、
前記本体部の前記一端に設けられ、前記第１接点部における前記第１方向および前記本体部の板厚方向に交差する第２方向の両側に前記第１接点部に対して間隔を空けてそれぞれ配置され、前記一端から前記第１方向に沿って前記第１接点部よりも前記本体部から離れた位置までそれぞれ延びる一対の第２接点部と
を備え、
前記一対の第２接点部の各々が、
前記第２方向において相互に対向して配置され、前記第１方向に沿って前記第１接点部に接近する接触対象物を前記第１接点部に向かって案内するガイド面を有し、
前記第１接点部が、前記第２方向に間隔を空けて配置された一対の突起で構成され、
前記本体部が、
前記本体部の前記一端に設けられ、前記第１方向に沿って延びると共に、前記第２方向に隙間を空けて配置された一対の脚部を有し、
前記一対の脚部の各々に前記一対の突起の各々が設けられ、前記第１接点部を構成し、
前記一対の脚部の各々における前記第１方向の先端が、前記一対の第２接点部の各々を構成し、
前記一対の脚部の各々における前記先端の前記第１方向の位置が、相互に異なっており、
前記一対の脚部の一方の前記第１接点部と、前記一対の脚部の他方の前記第１接点部と、前記一対の第２接点部のいずれかの前記ガイド面とが、前記接触対象物に同時に接触可能に配置されている、プローブピン。 a plate-like main body;
a first contact portion provided at one end of the body portion in the first direction and extending from the one end along the first direction;
provided at the one end of the main body portion and spaced apart from the first contact portion on both sides of the first contact portion in a second direction intersecting the first direction and the plate thickness direction of the main body portion, respectively a pair of second contact portions disposed and extending from the one end along the first direction to a position farther from the main body portion than the first contact portion;
Each of the pair of second contact portions,
guide surfaces arranged to face each other in the second direction and guiding a contact object approaching the first contact portion along the first direction toward the first contact portion;
wherein the first contact portion is composed of a pair of projections spaced apart in the second direction;
The main body is
Having a pair of legs provided at the one end of the main body, extending along the first direction, and arranged with a gap in the second direction,
Each of the pair of legs is provided with each of the pair of protrusions to constitute the first contact portion,
a tip in the first direction of each of the pair of leg portions constitutes each of the pair of second contact portions;
the positions of the tips of the pair of legs in the first direction are different from each other;
The first contact portion of one of the pair of legs, the first contact portion of the other of the pair of legs, and the guide surface of one of the second contact portions of the pair are the contact targets. A probe pin arranged so as to be able to contact an object at the same time. 前記一対の脚部の各々が、
前記第２方向において対向する対向面に設けられ、相互に接近する方向に突出する突出部を有し、
前記一対の脚部の各々における前記突出部に前記一対の突起の各々が設けられている、請求項１のプローブピン。 each of the pair of legs,
having projecting portions provided on opposing surfaces that face each other in the second direction and projecting in mutually approaching directions;
2. The probe pin according to claim 1, wherein each of said pair of projections is provided on said protrusion of each of said pair of legs. 請求項１または２のプローブピンと、
前記第１接点部および前記一対の第２接点部の各々が外部に露出した状態で前記プローブピンを収容可能なソケットと
を備える、検査治具。 A probe pin according to claim 1 or 2;
and a socket capable of accommodating the probe pin with each of the first contact portion and the pair of second contact portions exposed to the outside. 請求項３の検査治具を少なくとも１つ備える、検査ユニット。 An inspection unit comprising at least one inspection jig according to claim 3. 前記ソケットに対して揺動可能な状態で支持された揺動部材をさらに備え、
前記揺動部材が、
前記揺動部材をその揺動方向に貫通して、前記プローブピンの前記第１接点部および前記一対の第２接点部を収容可能な収容孔を有し、
復帰位置と、前記第１方向において前記復帰位置よりも前記ソケットに近い動作位置との間を揺動可能に構成されている、請求項４の検査ユニット。 further comprising a swinging member supported in a swingable state with respect to the socket;
The rocking member is
a receiving hole penetrating through the swinging member in the swinging direction and capable of accommodating the first contact portion and the pair of second contact portions of the probe pin;
5. The inspection unit of claim 4, wherein the inspection unit is swingable between a return position and an operating position closer to the socket than the return position in the first direction.
JP2023105717A 2019-06-10 2023-06-28 Probe pin, inspection jig, and inspection unit Pending JP2023121805A (en)

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