JP2023088471A5 - - Google Patents

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JP2023088471A5
JP2023088471A5 JP2021203217A JP2021203217A JP2023088471A5 JP 2023088471 A5 JP2023088471 A5 JP 2023088471A5 JP 2021203217 A JP2021203217 A JP 2021203217A JP 2021203217 A JP2021203217 A JP 2021203217A JP 2023088471 A5 JP2023088471 A5 JP 2023088471A5
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JP2021203217A
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JP2023088471A (ja
JP7846520B2 (ja
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Priority to JP2021203217A priority Critical patent/JP7846520B2/ja
Priority claimed from JP2021203217A external-priority patent/JP7846520B2/ja
Priority to US18/058,917 priority patent/US12304121B2/en
Priority to KR1020220169564A priority patent/KR20230091021A/ko
Publication of JP2023088471A publication Critical patent/JP2023088471A/ja
Publication of JP2023088471A5 publication Critical patent/JP2023088471A5/ja
Priority to US19/179,018 priority patent/US20250242524A1/en
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Publication of JP7846520B2 publication Critical patent/JP7846520B2/ja
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JP2021203217A 2021-12-15 2021-12-15 インプリント装置、及び物品の製造方法 Active JP7846520B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2021203217A JP7846520B2 (ja) 2021-12-15 2021-12-15 インプリント装置、及び物品の製造方法
US18/058,917 US12304121B2 (en) 2021-12-15 2022-11-28 Imprint apparatus and article manufacturing method
KR1020220169564A KR20230091021A (ko) 2021-12-15 2022-12-07 임프린트 장치 및 물품 제조 방법
US19/179,018 US20250242524A1 (en) 2021-12-15 2025-04-15 Imprint apparatus and article manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021203217A JP7846520B2 (ja) 2021-12-15 2021-12-15 インプリント装置、及び物品の製造方法

Publications (3)

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JP2023088471A JP2023088471A (ja) 2023-06-27
JP2023088471A5 true JP2023088471A5 (https=) 2024-12-10
JP7846520B2 JP7846520B2 (ja) 2026-04-15

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JP2021203217A Active JP7846520B2 (ja) 2021-12-15 2021-12-15 インプリント装置、及び物品の製造方法

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US (2) US12304121B2 (https=)
JP (1) JP7846520B2 (https=)
KR (1) KR20230091021A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023210620A1 (de) * 2023-10-26 2025-04-30 Infineon Technologies Ag Automatische adressenzuweisung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4185941B2 (ja) * 2006-04-04 2008-11-26 キヤノン株式会社 ナノインプリント方法及びナノインプリント装置
NL2004681A (en) 2009-07-06 2011-01-10 Asml Netherlands Bv Imprint lithography apparatus.
JP2011066323A (ja) 2009-09-18 2011-03-31 Toshiba Corp 露光処理の補正方法
JP5809409B2 (ja) * 2009-12-17 2015-11-10 キヤノン株式会社 インプリント装置及びパターン転写方法
NL2006929A (en) 2010-08-05 2012-02-13 Asml Netherlands Bv Imprint lithography.
JP2013021155A (ja) 2011-07-12 2013-01-31 Canon Inc インプリント装置、およびそれを用いた物品の製造方法
JP6159072B2 (ja) 2011-11-30 2017-07-05 キヤノン株式会社 インプリント装置、インプリント方法及び物品の製造方法

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