JP2023007440A - 返送アセンブリー及びこれを有する基板処理装置 - Google Patents
返送アセンブリー及びこれを有する基板処理装置 Download PDFInfo
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- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
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Abstract
Description
20 常圧移送モジュール
30 真空移送モジュール
40 ロードロックチャンバ
50 工程チャンバ
60 リングキャリア
242 第1返送ロボット
342 第2返送ロボット
620 プレート
621 ノッチ
640 ガイド部
660 レッグ
Claims (20)
- 基板を処理する装置において、
基板が置かれる第1ハンドを有する第1返送ロボットが提供された常圧移送モジュールと、
基板が置かれる第2ハンドを有する第2返送ロボットが提供された真空移送モジュールと、
前記常圧移送モジュールと前記真空移送モジュールとの間に配置され、内部空間が常圧雰囲気と真空雰囲気との間に転換可能なロードロックチャンバと、
前記真空移送モジュールに結合され、基板を処理する工程チャンバと、及び
前記工程チャンバに提供されるリング部材の返送のために前記第1返送ロボットまたは前記第2返送ロボットによって支持可能であり、前記リング部材を支持するリングキャリアを含むが、
前記リングキャリアは、
前記リング部材が置かれるプレートと、及び
前記プレートの下面から突き出され、前記第1ハンドまたは前記第2ハンド上に置かれるように提供される少なくとも一つ以上のレッグを含む基板処理装置。 - 前記レッグは、
パッドで提供されることを特徴とする請求項1に記載の基板処理装置。 - 前記第1ハンドまたは前記第2ハンドの上面には基板を支持するための少なくても一つ以上の基板支持パッドが提供され、
前記パッドは、
前記リングキャリアが前記第1ハンドまたは前記第2ハンドに置かれる時、前記プレートが前記基板支持パッドから上の方向に離隔される高さで提供されることを特徴とする請求項2に記載の基板処理装置。 - 前記パッドと前記基板支持パッドは、
前記第1返送ロボットまたは前記第2返送ロボットが前記リング部材を返送時上部から眺める時、お互いに干渉されない位置に配置されることを特徴とする請求項3に記載の基板処理装置。 - 前記パッドは、
円柱形状で提供されることを特徴とする請求項4に記載の基板処理装置。 - 前記レッグはピンで提供され、
前記第1ハンドまたは前記第2ハンドの上面には、
基板を支持するための少なくても一つ以上の基板支持パッドが提供され、前記ピンの一端が挿入されるホールがさらに形成されることを特徴とする請求項1に記載の基板処理装置。 - 前記ピンは、
前記リングキャリアが前記第1ハンドまたは前記第2ハンドに置かれる時、前記プレートが前記基板支持パッドから上の方向に離隔されるように位置するようにする高さで提供されることを特徴とする請求項6に記載の基板処理装置。 - 前記ピンと前記基板支持パッドは、
前記第1返送ロボットまたは前記第2返送ロボットが前記リング部材を返送時上部から眺める時、お互いに干渉されない位置に配置されることを特徴とする請求項7に記載の基板処理装置。 - 前記ピンは、
その底面が下にふくらんでいる円柱形状で提供されることを特徴とする請求項8に記載の基板処理装置。 - 前記プレートは円形の板形状で提供されることを特徴とする請求項1乃至請求項9のうちで何れか一つに記載の基板処理装置。
- 前記ロードロックチャンバは、
基板または前記リング部材を支持する複数の支持棚を含み、
前記プレートの縁領域には、
複数のノッチらが前記プレートを貫通して形成され、
前記第1返送ロボットまたは前記第2返送ロボットが前記複数の支持棚の上側位置から下側位置に移動される時、前記リングキャリアに支持された前記リング部材は前記支持棚に安着され、前記複数のノッチらは前記リングキャリアが前記第1返送ロボットまたは前記第2返送ロボットと共に移動されるように前記複数の支持棚と整列される位置に提供されることを特徴とする請求項10に記載の基板処理装置。 - 返送アセンブリーにおいて、
リング部材を支持するリングキャリアと、及び
基板及び前記リングキャリアを選択的に返送する返送ハンドを有する返送ロボットを含むが、
前記リングキャリアは、
前記リング部材が置かれるプレートと、及び
前記プレートの下面から突き出され、前記返送ハンド上に置かれるように提供される少なくとも一つ以上のレッグを含む返送アセンブリー。 - 前記レッグは、
パッドで提供されることを特徴とする請求項12に記載の返送アセンブリー。 - 前記返送ハンドの上面には基板を支持するための少なくても一つ以上の基板支持パッドが提供され、
前記パッドは、
前記リングキャリアが前記返送ハンドに置かれる時、前記プレートが前記基板支持パッドから上の方向に離隔高さを有するように提供されることを特徴とする請求項13に記載の返送アセンブリー。 - 前記パッドと前記基板支持パッドは、
前記返送ロボットが前記リング部材を返送時上部から眺める時、お互いに重畳されない位置に配置されることを特徴とすることを特徴とする請求項14に記載の返送アセンブリー。 - 前記レッグはピンで提供され、
前記返送ハンドの上面には基板を支持するための少なくても一つ以上の基板支持パッドが提供され、前記ピンの一端が挿入されるホールがさらに形成され、
前記ピンは前記リングキャリアが前記返送ハンドに置かれる時、前記プレートが前記基板支持パッドから上の方向に離隔される高さで提供され、
前記ピンと前記基板支持パッドは前記返送ロボットが前記リング部材を返送時上部から眺める時、お互いに干渉されない位置に配置されることを特徴とする請求項12に記載の返送アセンブリー。 - 前記プレートは円形の板形状で提供されることを特徴とする請求項12乃至請求項16のうちで何れか一つに記載の返送アセンブリー。
- 基板を処理する装置において、
基板、リングキャリア、またはリング部材が収納される容器が置かれるロードポートと、
内部が大気圧雰囲気で維持され、返送ロボットが提供されるインデックスチャンバと、
内部が大気圧、そして真空圧の間に変換可能なロードロックチャンバと、及び
前記ロードポート、前記ロードロックチャンバ、そして、前記インデックスチャンバの間にリング部材返送時使用されるリングキャリアを含むが、
前記返送ロボットは、
基板、そして、前記リングキャリアを選択的に返送する返送ハンドと、及び
基板を支持するための少なくても一つ以上の基板支持パッドを含み、
前記ロードロックチャンバは、
基板または前記リング部材を支持する複数の支持棚を含み、
前記リングキャリアは、
前記リング部材が置かれるプレートと、及び
前記プレートの下面から突き出され、返送ハンド上に置かれるように提供される少なくとも一つ以上のレッグを含むが、
前記プレートの縁領域には、
複数のノッチらが前記プレートを貫通して形成され、
前記ノッチらは、
上部から眺める時、それぞれ前記支持棚らと重畳される位置に形成され、
前記返送ロボットが前記リングキャリアを利用して前記リング部材を返送する時、前記リングキャリアと前記リング部材のうちで前記リング部材が前記支持棚に安着され、
前記レッグは、
前記リングキャリアが前記返送ハンド上に置かれる時、前記プレートが前記基板支持パッドから上の方向に離隔される高さで提供され、
前記レッグと前記基板支持パッドは、
前記返送ロボットが前記リング部材を返送時上部から眺める時、お互いに干渉されない位置に配置されることを特徴とする基板処理装置。 - 前記レッグはパッドで提供されることを特徴とする請求項18に記載の基板処理装置。
- 前記レッグはピンで提供され、
前記返送ロボットの上面には前記ピンの一端が挿入されるホールがさらに形成されることを特徴とする請求項18に記載の基板処理装置。
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JP2019057709A (ja) * | 2017-09-21 | 2019-04-11 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 半導体プロセスモジュールのためのインサイチュ装置 |
US20200373194A1 (en) * | 2019-05-20 | 2020-11-26 | Applied Materials, Inc. | Process kit ring adaptor |
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US20200373194A1 (en) * | 2019-05-20 | 2020-11-26 | Applied Materials, Inc. | Process kit ring adaptor |
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