JP2023000165A5 - - Google Patents

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Publication number
JP2023000165A5
JP2023000165A5 JP2021100825A JP2021100825A JP2023000165A5 JP 2023000165 A5 JP2023000165 A5 JP 2023000165A5 JP 2021100825 A JP2021100825 A JP 2021100825A JP 2021100825 A JP2021100825 A JP 2021100825A JP 2023000165 A5 JP2023000165 A5 JP 2023000165A5
Authority
JP
Japan
Prior art keywords
folded portion
heating
heat generating
pair
folded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021100825A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023000165A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2021100825A priority Critical patent/JP2023000165A/ja
Priority claimed from JP2021100825A external-priority patent/JP2023000165A/ja
Priority to CN202280035314.8A priority patent/CN117296448A/zh
Priority to PCT/JP2022/020342 priority patent/WO2022264729A1/ja
Priority to KR1020237034894A priority patent/KR20230156397A/ko
Priority to US18/289,478 priority patent/US20240244719A1/en
Priority to TW111121800A priority patent/TWI874778B/zh
Publication of JP2023000165A publication Critical patent/JP2023000165A/ja
Publication of JP2023000165A5 publication Critical patent/JP2023000165A5/ja
Pending legal-status Critical Current

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JP2021100825A 2021-06-17 2021-06-17 セラミックスヒータおよび保持部材 Pending JP2023000165A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2021100825A JP2023000165A (ja) 2021-06-17 2021-06-17 セラミックスヒータおよび保持部材
CN202280035314.8A CN117296448A (zh) 2021-06-17 2022-05-16 陶瓷加热器和保持构件
PCT/JP2022/020342 WO2022264729A1 (ja) 2021-06-17 2022-05-16 セラミックスヒータおよび保持部材
KR1020237034894A KR20230156397A (ko) 2021-06-17 2022-05-16 세라믹스 히터 및 유지 부재
US18/289,478 US20240244719A1 (en) 2021-06-17 2022-05-16 Ceramic heater and holding member
TW111121800A TWI874778B (zh) 2021-06-17 2022-06-13 陶瓷加熱器及保持構件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021100825A JP2023000165A (ja) 2021-06-17 2021-06-17 セラミックスヒータおよび保持部材

Publications (2)

Publication Number Publication Date
JP2023000165A JP2023000165A (ja) 2023-01-04
JP2023000165A5 true JP2023000165A5 (https=) 2023-05-10

Family

ID=84526180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021100825A Pending JP2023000165A (ja) 2021-06-17 2021-06-17 セラミックスヒータおよび保持部材

Country Status (6)

Country Link
US (1) US20240244719A1 (https=)
JP (1) JP2023000165A (https=)
KR (1) KR20230156397A (https=)
CN (1) CN117296448A (https=)
TW (1) TWI874778B (https=)
WO (1) WO2022264729A1 (https=)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002015841A (ja) * 2000-04-29 2002-01-18 Ibiden Co Ltd セラミックヒータ
JP2003249330A (ja) * 2002-02-27 2003-09-05 Toshiba Ceramics Co Ltd 箔状抵抗発熱素子、その製造方法及び面状ヒーター
JP4119211B2 (ja) * 2002-09-13 2008-07-16 日本碍子株式会社 加熱装置
JP6804828B2 (ja) * 2015-04-20 2020-12-23 日本特殊陶業株式会社 セラミックヒータ及び静電チャック
US9673025B2 (en) * 2015-07-27 2017-06-06 Lam Research Corporation Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
US11631597B2 (en) * 2017-02-01 2023-04-18 Ngk Spark Plug Co., Ltd. Holding apparatus
JP7025278B2 (ja) * 2018-05-01 2022-02-24 日本特殊陶業株式会社 セラミックスヒータ
WO2020170682A1 (ja) * 2019-02-22 2020-08-27 住友電気工業株式会社 ヒータ
JP7297637B2 (ja) * 2019-10-25 2023-06-26 京セラ株式会社 ヒータ

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