JP2022548263A5 - - Google Patents
Info
- Publication number
- JP2022548263A5 JP2022548263A5 JP2022516624A JP2022516624A JP2022548263A5 JP 2022548263 A5 JP2022548263 A5 JP 2022548263A5 JP 2022516624 A JP2022516624 A JP 2022516624A JP 2022516624 A JP2022516624 A JP 2022516624A JP 2022548263 A5 JP2022548263 A5 JP 2022548263A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- detector according
- absorbing
- layer
- absorbing film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20195772 | 2019-09-16 | ||
| FI20195772A FI20195772A1 (en) | 2019-09-16 | 2019-09-16 | Thermal detector |
| PCT/FI2020/050582 WO2021053267A1 (en) | 2019-09-16 | 2020-09-11 | Thermal detector |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022548263A JP2022548263A (ja) | 2022-11-17 |
| JP2022548263A5 true JP2022548263A5 (cg-RX-API-DMAC7.html) | 2023-04-28 |
| JP7675707B2 JP7675707B2 (ja) | 2025-05-13 |
Family
ID=72644269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022516624A Active JP7675707B2 (ja) | 2019-09-16 | 2020-09-11 | 熱検出器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20220344561A1 (cg-RX-API-DMAC7.html) |
| EP (1) | EP4031843A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP7675707B2 (cg-RX-API-DMAC7.html) |
| CN (2) | CN119901378A (cg-RX-API-DMAC7.html) |
| FI (1) | FI20195772A1 (cg-RX-API-DMAC7.html) |
| WO (1) | WO2021053267A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI130930B1 (fi) | 2021-08-02 | 2024-05-31 | Teknologian Tutkimuskeskus Vtt Oy | Laite ei-invasiiviseen seurantaan |
| CN118251583A (zh) * | 2021-11-16 | 2024-06-25 | 迈瑞迪创新科技有限公司 | 具有高cmos集成度的高灵敏度热电基红外探测器 |
| WO2024263494A2 (en) * | 2023-06-23 | 2024-12-26 | The Regents Of The University Of California | Holey silicon-based thermopiles for high-sensitivity broadband thermal detection |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6177728A (ja) * | 1984-09-25 | 1986-04-21 | Matsushita Electric Ind Co Ltd | 熱電堆型赤外検出素子 |
| JP3921320B2 (ja) * | 2000-01-31 | 2007-05-30 | 日本電気株式会社 | 熱型赤外線検出器およびその製造方法 |
| US6690014B1 (en) * | 2000-04-25 | 2004-02-10 | Raytheon Company | Microbolometer and method for forming |
| JP4915898B2 (ja) * | 2005-07-21 | 2012-04-11 | パナソニック株式会社 | 赤外線センサ |
| US7755048B2 (en) * | 2006-05-30 | 2010-07-13 | Ying Hsu | Large format thermoelectric infrared detector and method of fabrication |
| JP2008082790A (ja) * | 2006-09-26 | 2008-04-10 | Matsushita Electric Works Ltd | 赤外線センサ |
| JP2009175124A (ja) * | 2007-12-27 | 2009-08-06 | Rohm Co Ltd | プラズモン共鳴検出器 |
| CN102384789B (zh) * | 2010-08-30 | 2013-06-26 | 中国科学院微电子研究所 | 红外焦平面阵列器件及其制作方法 |
| WO2012031282A2 (en) * | 2010-09-03 | 2012-03-08 | Tufts University/Trustees Of Tufts College | Plasmonic nanoparticle-doped silk materials |
| JP5214690B2 (ja) * | 2010-09-13 | 2013-06-19 | 株式会社東芝 | 赤外線検出素子 |
| JP2013051232A (ja) * | 2011-08-30 | 2013-03-14 | Panasonic Corp | 熱電変換デバイス |
| JP2013186038A (ja) * | 2012-03-09 | 2013-09-19 | Panasonic Corp | 赤外線検出装置 |
| DE102012104927A1 (de) * | 2012-06-06 | 2013-12-12 | Emitec Gesellschaft Für Emissionstechnologie Mbh | Thermoelektrisches Modul und Verfahren zum Betrieb |
| US9297700B2 (en) * | 2012-12-03 | 2016-03-29 | Analog Devices, Inc. | Photonic sensor and a method of manufacturing such a sensor |
| JP6218070B2 (ja) * | 2013-10-08 | 2017-10-25 | パナソニックＩｐマネジメント株式会社 | 赤外線検出器 |
| CN103199097B (zh) * | 2013-04-08 | 2016-03-02 | 孙健 | 一种像元结构及基于像元结构的非致冷红外焦平面探测器 |
| FR3009865B1 (fr) * | 2013-08-22 | 2015-07-31 | Commissariat Energie Atomique | Detecteur bolometrique a bolometre de compensation a thermalisation renforcee |
| WO2015073694A1 (en) * | 2013-11-13 | 2015-05-21 | Ud Holdings, Llc | Thermoelectric generator with minimal thermal shunting |
| US9465240B2 (en) * | 2014-06-16 | 2016-10-11 | Intel Corporation | Optical absorption based device |
| US20160079306A1 (en) * | 2014-09-12 | 2016-03-17 | Excelitas Technologies Singapore Pte. Ltd. | Surface Micro-Machined Infrared Sensor Using Highly Temperature Stable Interferometric Absorber |
| CN104913852A (zh) * | 2015-06-18 | 2015-09-16 | 中国科学院上海微系统与信息技术研究所 | 一种基于键合技术的光学读出红外探测器阵列的制作方法 |
| FR3045148B1 (fr) * | 2015-12-15 | 2017-12-08 | Ulis | Dispositif de detection a membranes bolometriques suspendues a fort rendement d'absorption et rapport signal sur bruit |
| US10811585B2 (en) * | 2016-03-07 | 2020-10-20 | Teknologian Tutkimuskeskus Vtt Oy | Thermoelectric device |
| JP7232978B2 (ja) * | 2017-12-11 | 2023-03-06 | パナソニックＩｐマネジメント株式会社 | 赤外線センサおよび赤外線センサのボロメータ赤外線受光部を冷却する方法 |
| US11911877B2 (en) * | 2019-03-08 | 2024-02-27 | Canon Kabushiki Kaisha | Article including inorganic compound and method of manufacturing article including inorganic compound |
-
2019
- 2019-09-16 FI FI20195772A patent/FI20195772A1/en unknown
-
2020
- 2020-09-11 JP JP2022516624A patent/JP7675707B2/ja active Active
- 2020-09-11 CN CN202411798154.XA patent/CN119901378A/zh active Pending
- 2020-09-11 US US17/760,829 patent/US20220344561A1/en active Pending
- 2020-09-11 WO PCT/FI2020/050582 patent/WO2021053267A1/en not_active Ceased
- 2020-09-11 EP EP20780245.5A patent/EP4031843A1/en active Pending
- 2020-09-11 CN CN202080063009.0A patent/CN114364954B/zh active Active