JP2022545980A - 誘電体基板のプラズマ処理に最適なイオンエネルギーの決定 - Google Patents
誘電体基板のプラズマ処理に最適なイオンエネルギーの決定 Download PDFInfo
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Abstract
Description
Claims (15)
- 誘電体基板(109)のプラズマ処理のためのイオンエネルギーを決定する方法であって、
前記誘電体基板(109)をプラズマ放電にさらす段階と、
電源(114)によって生成されたパルス電圧波形を前記誘電体基板に印加する段階であって、
前記パルス電圧波形がパルスのシーケンスを含み、各パルスがより高い電圧間隔およびより低い電圧間隔を含み、前記より低い電圧間隔が電圧勾配を含む段階と、を含み、
前記方法が、
互いに異なる電圧勾配を有する前記シーケンスの第1のパルスを生成し、前記第1のパルスを前記誘電体基板に印加する段階と、
前記第1のパルスのそれぞれについて、前記電圧勾配(S)と前記電源の出力での前記電圧勾配に対応する出力電流(IP)を決定する段階と、
前記第1のパルスのそれぞれについて、前記電圧勾配と、前記電圧勾配と前記第1のパルスの1つまたは複数に対して決定された前記出力電流のみに基づいた前記対応する出力電流との間の数学的関係の、少なくとも1つの係数(k、b)を決定する段階と、
前記少なくとも1つの係数にテスト関数を適用し、前記テスト関数を真にする前記少なくとも1つの係数に対応する最適な電圧勾配値を選択する段階と、を含むことを特徴とする、イオンエネルギーを決定する方法。 - 前記少なくとも1つの係数が、1つまたは複数の数学演算子、1つまたは複数の前記電圧勾配の値、および1つまたは複数の前記出力電流の値からなる式である、請求項1に記載の方法。
- 前記数学的関係が、前記出力電流と前記電圧勾配との間の多項式関数である、請求項1または2に記載の方法。
- 前記多項式関数が一次多項式IP=kS+bであり、IPが出力電流を表し、Sが電圧勾配を表し、前記少なくとも1つの係数がkおよびbのうちの少なくとも1つである、請求項3に記載の方法。
- 前記少なくとも1つの係数が、前記プラズマ放電と前記誘電体基板との間の相互作用の1つまたは複数の静電容量を表し、前記少なくとも1つの係数が、前記電圧勾配、および前記第1のパルスの1つまたは複数に対して決定される出力電流のみに基づいて解決される、請求項1から4のいずれか一項に記載の方法。
- 前記第1のパルスが単調に増加する電圧勾配を有する、請求項1から5のいずれか一項に記載の方法。
- 前記第1のパルスのそれぞれについて、前記それぞれの電圧勾配および前記電圧勾配に対応する前記出力電流のうちの少なくとも1つを測定することを含む、請求項1から6のいずれか一項に記載の方法。
- 前記テスト関数が、前記少なくとも1つの係数の極値を決定するように構成される、請求項1から7のいずれか一項に記載の方法。
- 前記シーケンスの第2のパルスを生成し、前記第2のパルスが最適な電圧勾配値に対応する電圧勾配を有し、前記第2のパルスを前記誘電体基板に印加してプラズマ処理を実行する段階をさらに含む、請求項1から8のいずれか一項に記載の方法。
- プラズマ処理が、プラズマアシストエッチングおよびプラズマアシスト堆積の1つまたは組み合わせから選択される、請求項1から9のいずれか一項に記載の方法。
- 誘電体基板(109)のプラズマ処理のための装置であって、
プラズマを生成するための手段(101、105、108)と、
前記誘電体基板を支持するための処理プラットフォーム(111)と、
前記処理プラットフォームに結合された出力(113)を備える電源(114)と、
前記出力に結合された電圧測定ユニット(116)および電流測定ユニット(119)のうちの少なくとも1つと、
前記電源(114)に結合されたコントロールユニット(115)であって、前記コントロールユニットと前記電源がパルス電圧波形を生成するように共同で構成され、前記パルス電圧波形がパルスのシーケンスを含み、各パルスがより高い電圧間隔およびより低い電圧間隔を含み、前記より低い電圧間隔が電圧勾配(S)を含む、コントロールユニット(115)と、を含み、
前記コントロールユニット(115)および前記電源(114)が、互いに異なる電圧勾配を有する前記シーケンスの第1のパルスを生成するように共同で構成され、
前記第1のパルスのそれぞれについて、前記コントロールユニットが、前記電圧勾配および前記出力での前記対応する出力電流を決定し、前記第1のパルスのうちの1つまたは複数について決定された前記電圧勾配および前記出力電流のみに基づく前記出力電流(IP)と前記電圧勾配(S)間の数学的関係の少なくとも1つの係数(k、b)を評価するように構成され、前記コントロールユニットが、前記少なくとも1つの係数にテスト関数を適用するようにさらに構成されることを特徴とする装置。 - 前記コントロールユニットおよび前記電源が、前記シーケンスの第2のパルスを生成するように共同で構成され、前記第2のパルスは、前記テスト関数を真にする前記少なくとも1つの係数を表す電圧勾配を有する、請求項11に記載の装置。
- 前記コントロールユニットが、請求項1から8のいずれか一項に記載の方法を実行するように構成される、請求項11または12に記載の装置。
- 前記コントロールユニットが、処理される各誘電体基板について請求項1から8のいずれか一項に記載の方法を実行するように構成される、請求項13に記載の装置。
- 前記電源が、スイッチモード電源および調整可能な電流源を備えるハイブリッドコンバータである、請求項11から14のいずれか一項に記載の装置。
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