JP2022540691A5 - - Google Patents

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Publication number
JP2022540691A5
JP2022540691A5 JP2022502883A JP2022502883A JP2022540691A5 JP 2022540691 A5 JP2022540691 A5 JP 2022540691A5 JP 2022502883 A JP2022502883 A JP 2022502883A JP 2022502883 A JP2022502883 A JP 2022502883A JP 2022540691 A5 JP2022540691 A5 JP 2022540691A5
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JP7693646B2 (ja
JP2022540691A (ja
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Priority claimed from PCT/US2020/042284 external-priority patent/WO2021016028A1/en
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Priority to JP2023100554A priority Critical patent/JP2023112037A/ja
Publication of JP2022540691A5 publication Critical patent/JP2022540691A5/ja
Priority to JP2024229023A priority patent/JP2025041883A/ja
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JP2022502883A 2019-07-19 2020-07-16 回折格子を加工する方法 Active JP7693646B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023100554A JP2023112037A (ja) 2019-07-19 2023-06-20 回折格子を加工する方法
JP2024229023A JP2025041883A (ja) 2019-07-19 2024-12-25 回折格子を加工する方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962876241P 2019-07-19 2019-07-19
US62/876,241 2019-07-19
PCT/US2020/042284 WO2021016028A1 (en) 2019-07-19 2020-07-16 Method of fabricating diffraction gratings

Related Child Applications (1)

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JP2023100554A Division JP2023112037A (ja) 2019-07-19 2023-06-20 回折格子を加工する方法

Publications (3)

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JP2022540691A JP2022540691A (ja) 2022-09-16
JP2022540691A5 true JP2022540691A5 (https=) 2023-06-28
JP7693646B2 JP7693646B2 (ja) 2025-06-17

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JP2022502883A Active JP7693646B2 (ja) 2019-07-19 2020-07-16 回折格子を加工する方法
JP2023100554A Withdrawn JP2023112037A (ja) 2019-07-19 2023-06-20 回折格子を加工する方法
JP2024229023A Pending JP2025041883A (ja) 2019-07-19 2024-12-25 回折格子を加工する方法

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JP2024229023A Pending JP2025041883A (ja) 2019-07-19 2024-12-25 回折格子を加工する方法

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US (4) US11460616B2 (https=)
EP (1) EP3999883A4 (https=)
JP (3) JP7693646B2 (https=)
CN (1) CN114514443A (https=)
WO (1) WO2021016028A1 (https=)

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