CN114514443A - 制造衍射光栅的方法 - Google Patents

制造衍射光栅的方法 Download PDF

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Publication number
CN114514443A
CN114514443A CN202080065471.4A CN202080065471A CN114514443A CN 114514443 A CN114514443 A CN 114514443A CN 202080065471 A CN202080065471 A CN 202080065471A CN 114514443 A CN114514443 A CN 114514443A
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CN
China
Prior art keywords
substrate
master template
periodically repeating
diffraction grating
repeating lines
Prior art date
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Pending
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CN202080065471.4A
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English (en)
Chinese (zh)
Inventor
杨书强
K·罗
V·辛格
F·Y·徐
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Magic Leap Inc
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Magic Leap Inc
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Application filed by Magic Leap Inc filed Critical Magic Leap Inc
Publication of CN114514443A publication Critical patent/CN114514443A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G02B27/0172—Head mounted characterised by optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4272—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1842—Gratings for image generation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0101—Head-up displays characterised by optical features
    • G02B2027/0123—Head-up displays characterised by optical features comprising devices increasing the field of view
    • G02B2027/0125—Field-of-view increase by wavefront division

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
CN202080065471.4A 2019-07-19 2020-07-16 制造衍射光栅的方法 Pending CN114514443A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962876241P 2019-07-19 2019-07-19
US62/876,241 2019-07-19
PCT/US2020/042284 WO2021016028A1 (en) 2019-07-19 2020-07-16 Method of fabricating diffraction gratings

Publications (1)

Publication Number Publication Date
CN114514443A true CN114514443A (zh) 2022-05-17

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Family Applications (1)

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CN202080065471.4A Pending CN114514443A (zh) 2019-07-19 2020-07-16 制造衍射光栅的方法

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US (4) US11460616B2 (https=)
EP (1) EP3999883A4 (https=)
JP (3) JP7693646B2 (https=)
CN (1) CN114514443A (https=)
WO (1) WO2021016028A1 (https=)

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US11460616B2 (en) 2022-10-04
JP2023112037A (ja) 2023-08-10
WO2021016028A1 (en) 2021-01-28
JP7693646B2 (ja) 2025-06-17
US20210041611A1 (en) 2021-02-11
US20240134097A1 (en) 2024-04-25
US11906763B2 (en) 2024-02-20
US12372695B2 (en) 2025-07-29
EP3999883A1 (en) 2022-05-25
US20250347832A1 (en) 2025-11-13
JP2022540691A (ja) 2022-09-16
US20220365262A1 (en) 2022-11-17
EP3999883A4 (en) 2023-08-30
JP2025041883A (ja) 2025-03-26

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