JP2022530631A5 - - Google Patents

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Publication number
JP2022530631A5
JP2022530631A5 JP2021564087A JP2021564087A JP2022530631A5 JP 2022530631 A5 JP2022530631 A5 JP 2022530631A5 JP 2021564087 A JP2021564087 A JP 2021564087A JP 2021564087 A JP2021564087 A JP 2021564087A JP 2022530631 A5 JP2022530631 A5 JP 2022530631A5
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JP
Japan
Prior art keywords
patent document
application publication
patent application
document
edition
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021564087A
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English (en)
Japanese (ja)
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JP2022530631A (ja
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Priority claimed from PCT/US2020/028479 external-priority patent/WO2020223030A1/en
Publication of JP2022530631A publication Critical patent/JP2022530631A/ja
Publication of JP2022530631A5 publication Critical patent/JP2022530631A5/ja
Pending legal-status Critical Current

Links

JP2021564087A 2019-04-29 2020-04-16 リニアモータおよびリニアモータを含むワイヤーボンディング装置 Pending JP2022530631A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962840039P 2019-04-29 2019-04-29
US62/840,039 2019-04-29
PCT/US2020/028479 WO2020223030A1 (en) 2019-04-29 2020-04-16 Linear motors and wire bonding machines including the same

Publications (2)

Publication Number Publication Date
JP2022530631A JP2022530631A (ja) 2022-06-30
JP2022530631A5 true JP2022530631A5 (enExample) 2023-04-03

Family

ID=72917347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021564087A Pending JP2022530631A (ja) 2019-04-29 2020-04-16 リニアモータおよびリニアモータを含むワイヤーボンディング装置

Country Status (6)

Country Link
US (2) US11387727B2 (enExample)
JP (1) JP2022530631A (enExample)
KR (1) KR20210148401A (enExample)
CN (1) CN113796002A (enExample)
TW (1) TWI858055B (enExample)
WO (1) WO2020223030A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11387727B2 (en) * 2019-04-29 2022-07-12 Kulicke And Soffa Industries, Inc. Linear motors and wire bonding machines including the same
DE102021202165A1 (de) * 2021-03-05 2022-09-08 Zf Friedrichshafen Ag Vorrichtung und Verfahren zur Geräuschreduktion in einem Innenraum eines Fahrzeugs

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62150838A (ja) * 1985-12-25 1987-07-04 Hitachi Ltd 検出方法および装置
JPS63217965A (ja) * 1987-03-05 1988-09-12 Shinko Electric Co Ltd リニアモ−タ
JPH0230286U (enExample) * 1988-08-12 1990-02-26
US5910691A (en) * 1995-03-20 1999-06-08 Wavre; Nicolas Permanent-magnet linear synchronous motor
DE19810996A1 (de) * 1998-03-13 1999-09-16 Krauss Maffei Ag Impulsentkoppelter Direktantrieb
US6163091A (en) * 1999-07-06 2000-12-19 Nikon Corporation Linear motor with commutation coil
JP4036207B2 (ja) * 1999-09-10 2008-01-23 日本電気株式会社 Ｘｙステージ
JP3972575B2 (ja) * 2000-11-02 2007-09-05 株式会社日立製作所 ドアシステム
JP4689058B2 (ja) * 2001-02-16 2011-05-25 キヤノン株式会社 リニアモータ、ステージ装置および露光装置ならびにデバイス製造方法
JP2002325421A (ja) * 2001-02-23 2002-11-08 Canon Inc リニアモータ、およびこれを用いたステージ装置、露光装置ならびにデバイス製造方法
JP4259978B2 (ja) 2003-03-25 2009-04-30 Ｔｈｋ株式会社 リニアモータアクチュエータ
WO2005122369A1 (ja) * 2004-05-14 2005-12-22 Kabushiki Kaisha Yaskawa Denki ムービングマグネット形リニアスライダ
JP2006034017A (ja) 2004-07-16 2006-02-02 Shin Etsu Chem Co Ltd 工作機械用リニアモータ
JP2008043993A (ja) * 2006-08-21 2008-02-28 Murata Mach Ltd リニアモータ搭載プレス機械
CN101505904A (zh) * 2006-08-30 2009-08-12 库利克和索夫工业公司 用于引线接合机的改进的z轴运动系统
TWM314973U (en) * 2006-12-20 2007-07-01 Hiwin Mikrosystem Corp Integrated linear motor
WO2008079144A1 (en) * 2006-12-20 2008-07-03 Kulicke And Soffa Industries, Inc. Linear motor with reduced cogging
ES2537079T3 (es) * 2007-04-16 2015-06-02 Crisplant A/S Sistema de clasificación con un accionamiento mediante un motor lineal síncrono
JP5335630B2 (ja) * 2009-06-17 2013-11-06 モレックス インコーポレイテド 電線対基板コネクタ
KR101022646B1 (ko) * 2009-08-31 2011-03-22 주식회사 져스텍 선형 모터 시스템 및 그 반발력 보상방법
CN102185460A (zh) * 2011-05-05 2011-09-14 雅科贝思精密机电(上海)有限公司 具有补偿齿槽力和吸引力的双线圈直线电机
JP2015122842A (ja) * 2013-12-20 2015-07-02 ファナック株式会社 磁石を有する電動機の回転子、電動機、及び回転子の製造方法
TWI543284B (zh) * 2014-02-10 2016-07-21 新川股份有限公司 半導體裝置的製造方法以及打線裝置
US10381321B2 (en) * 2017-02-18 2019-08-13 Kulicke And Soffa Industries, Inc Ultrasonic transducer systems including tuned resonators, equipment including such systems, and methods of providing the same
CN109088512B (zh) * 2018-09-29 2024-10-18 广东阿达智能装备有限公司 双电机冷却装置和引线键合机运动平台系统
US11387727B2 (en) * 2019-04-29 2022-07-12 Kulicke And Soffa Industries, Inc. Linear motors and wire bonding machines including the same

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