JP2022530631A - リニアモータおよびリニアモータを含むワイヤーボンディング装置 - Google Patents

リニアモータおよびリニアモータを含むワイヤーボンディング装置 Download PDF

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Publication number
JP2022530631A
JP2022530631A JP2021564087A JP2021564087A JP2022530631A JP 2022530631 A JP2022530631 A JP 2022530631A JP 2021564087 A JP2021564087 A JP 2021564087A JP 2021564087 A JP2021564087 A JP 2021564087A JP 2022530631 A JP2022530631 A JP 2022530631A
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JP
Japan
Prior art keywords
linear motor
coil assembly
permanent magnets
teeth
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021564087A
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English (en)
Japanese (ja)
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JP2022530631A5 (enExample
Inventor
パリッシュ、ジェシー、エス．
クティリ、グレゴリー、ジェイ．
Original Assignee
クリック アンド ソッファ インダストリーズ、インク．
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Application filed by クリック アンド ソッファ インダストリーズ、インク． filed Critical クリック アンド ソッファ インダストリーズ、インク．
Publication of JP2022530631A publication Critical patent/JP2022530631A/ja
Publication of JP2022530631A5 publication Critical patent/JP2022530631A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/27—Rotor cores with permanent magnets
    • H02K1/2706—Inner rotors
    • H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
    • H02K1/274—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
    • H02K1/2753—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets the rotor consisting of magnets or groups of magnets arranged with alternating polarity
    • H02K1/278—Surface mounted magnets; Inset magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H02K11/225—Detecting coils
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/46—Fastening of windings on the stator or rotor structure
    • H02K3/48—Fastening of windings on the stator or rotor structure in slots
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K35/00—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit
    • H02K35/02—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit with moving magnets and stationary coil systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Linear Motors (AREA)
  • Wire Bonding (AREA)
JP2021564087A 2019-04-29 2020-04-16 リニアモータおよびリニアモータを含むワイヤーボンディング装置 Pending JP2022530631A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962840039P 2019-04-29 2019-04-29
US62/840,039 2019-04-29
PCT/US2020/028479 WO2020223030A1 (en) 2019-04-29 2020-04-16 Linear motors and wire bonding machines including the same

Publications (2)

Publication Number Publication Date
JP2022530631A true JP2022530631A (ja) 2022-06-30
JP2022530631A5 JP2022530631A5 (enExample) 2023-04-03

Family

ID=72917347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021564087A Pending JP2022530631A (ja) 2019-04-29 2020-04-16 リニアモータおよびリニアモータを含むワイヤーボンディング装置

Country Status (6)

Country Link
US (2) US11387727B2 (enExample)
JP (1) JP2022530631A (enExample)
KR (1) KR20210148401A (enExample)
CN (1) CN113796002A (enExample)
TW (1) TWI858055B (enExample)
WO (1) WO2020223030A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11387727B2 (en) * 2019-04-29 2022-07-12 Kulicke And Soffa Industries, Inc. Linear motors and wire bonding machines including the same
DE102021202165A1 (de) * 2021-03-05 2022-09-08 Zf Friedrichshafen Ag Vorrichtung und Verfahren zur Geräuschreduktion in einem Innenraum eines Fahrzeugs

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63217965A (ja) * 1987-03-05 1988-09-12 Shinko Electric Co Ltd リニアモ−タ
JPH0230286U (enExample) * 1988-08-12 1990-02-26
JP2002507489A (ja) * 1998-03-13 2002-03-12 シーメンス リニア モーター システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニ コマンディートゲゼルシヤフト インパルス減結合形直結駆動装置
JP2004228597A (ja) * 1999-09-10 2004-08-12 Nec Corp Ｘｙステージ

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62150838A (ja) * 1985-12-25 1987-07-04 Hitachi Ltd 検出方法および装置
US5910691A (en) * 1995-03-20 1999-06-08 Wavre; Nicolas Permanent-magnet linear synchronous motor
US6163091A (en) * 1999-07-06 2000-12-19 Nikon Corporation Linear motor with commutation coil
JP3972575B2 (ja) * 2000-11-02 2007-09-05 株式会社日立製作所 ドアシステム
JP4689058B2 (ja) * 2001-02-16 2011-05-25 キヤノン株式会社 リニアモータ、ステージ装置および露光装置ならびにデバイス製造方法
JP2002325421A (ja) * 2001-02-23 2002-11-08 Canon Inc リニアモータ、およびこれを用いたステージ装置、露光装置ならびにデバイス製造方法
JP4259978B2 (ja) 2003-03-25 2009-04-30 Ｔｈｋ株式会社 リニアモータアクチュエータ
WO2005122369A1 (ja) * 2004-05-14 2005-12-22 Kabushiki Kaisha Yaskawa Denki ムービングマグネット形リニアスライダ
JP2006034017A (ja) 2004-07-16 2006-02-02 Shin Etsu Chem Co Ltd 工作機械用リニアモータ
JP2008043993A (ja) * 2006-08-21 2008-02-28 Murata Mach Ltd リニアモータ搭載プレス機械
CN101505904A (zh) * 2006-08-30 2009-08-12 库利克和索夫工业公司 用于引线接合机的改进的z轴运动系统
TWM314973U (en) * 2006-12-20 2007-07-01 Hiwin Mikrosystem Corp Integrated linear motor
WO2008079144A1 (en) * 2006-12-20 2008-07-03 Kulicke And Soffa Industries, Inc. Linear motor with reduced cogging
ES2537079T3 (es) * 2007-04-16 2015-06-02 Crisplant A/S Sistema de clasificación con un accionamiento mediante un motor lineal síncrono
JP5335630B2 (ja) * 2009-06-17 2013-11-06 モレックス インコーポレイテド 電線対基板コネクタ
KR101022646B1 (ko) * 2009-08-31 2011-03-22 주식회사 져스텍 선형 모터 시스템 및 그 반발력 보상방법
CN102185460A (zh) * 2011-05-05 2011-09-14 雅科贝思精密机电(上海)有限公司 具有补偿齿槽力和吸引力的双线圈直线电机
JP2015122842A (ja) * 2013-12-20 2015-07-02 ファナック株式会社 磁石を有する電動機の回転子、電動機、及び回転子の製造方法
TWI543284B (zh) * 2014-02-10 2016-07-21 新川股份有限公司 半導體裝置的製造方法以及打線裝置
US10381321B2 (en) * 2017-02-18 2019-08-13 Kulicke And Soffa Industries, Inc Ultrasonic transducer systems including tuned resonators, equipment including such systems, and methods of providing the same
CN109088512B (zh) * 2018-09-29 2024-10-18 广东阿达智能装备有限公司 双电机冷却装置和引线键合机运动平台系统
US11387727B2 (en) * 2019-04-29 2022-07-12 Kulicke And Soffa Industries, Inc. Linear motors and wire bonding machines including the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63217965A (ja) * 1987-03-05 1988-09-12 Shinko Electric Co Ltd リニアモ−タ
JPH0230286U (enExample) * 1988-08-12 1990-02-26
JP2002507489A (ja) * 1998-03-13 2002-03-12 シーメンス リニア モーター システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニ コマンディートゲゼルシヤフト インパルス減結合形直結駆動装置
JP2004228597A (ja) * 1999-09-10 2004-08-12 Nec Corp Ｘｙステージ

Also Published As

Publication number Publication date
US11509207B2 (en) 2022-11-22
US20200343802A1 (en) 2020-10-29
CN113796002A (zh) 2021-12-14
US20220286034A1 (en) 2022-09-08
TW202103432A (zh) 2021-01-16
TWI858055B (zh) 2024-10-11
WO2020223030A1 (en) 2020-11-05
US11387727B2 (en) 2022-07-12
KR20210148401A (ko) 2021-12-07
TW202508210A (zh) 2025-02-16

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