JP2022530418A5 - - Google Patents

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Publication number
JP2022530418A5
JP2022530418A5 JP2021563067A JP2021563067A JP2022530418A5 JP 2022530418 A5 JP2022530418 A5 JP 2022530418A5 JP 2021563067 A JP2021563067 A JP 2021563067A JP 2021563067 A JP2021563067 A JP 2021563067A JP 2022530418 A5 JP2022530418 A5 JP 2022530418A5
Authority
JP
Japan
Application number
JP2021563067A
Other languages
Japanese (ja)
Other versions
JP2022530418A (ja
JPWO2020217062A5 (https=
Filing date
Publication date
Priority claimed from GB1905758.7A external-priority patent/GB2583359A/en
Application filed filed Critical
Publication of JP2022530418A publication Critical patent/JP2022530418A/ja
Publication of JPWO2020217062A5 publication Critical patent/JPWO2020217062A5/ja
Publication of JP2022530418A5 publication Critical patent/JP2022530418A5/ja
Pending legal-status Critical Current

Links

JP2021563067A 2019-04-25 2020-04-24 電子ビーム放射アセンブリ Pending JP2022530418A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1905758.7 2019-04-25
GB1905758.7A GB2583359A (en) 2019-04-25 2019-04-25 Electron beam emitting assembly
PCT/GB2020/051011 WO2020217062A1 (en) 2019-04-25 2020-04-24 Electron beam emitting assembly

Publications (3)

Publication Number Publication Date
JP2022530418A JP2022530418A (ja) 2022-06-29
JPWO2020217062A5 JPWO2020217062A5 (https=) 2023-04-04
JP2022530418A5 true JP2022530418A5 (https=) 2023-04-04

Family

ID=66810337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021563067A Pending JP2022530418A (ja) 2019-04-25 2020-04-24 電子ビーム放射アセンブリ

Country Status (5)

Country Link
US (1) US20220208506A1 (https=)
EP (1) EP3959737A1 (https=)
JP (1) JP2022530418A (https=)
GB (1) GB2583359A (https=)
WO (1) WO2020217062A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2619965A (en) * 2022-06-24 2023-12-27 Aquasium Tech Limited Electron beam emitting assembly
WO2024107834A1 (en) * 2022-11-16 2024-05-23 Kimball Physics, Inc. Pincer mount cathode

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7003279A (https=) * 1970-03-07 1971-09-09
JPS607335B2 (ja) * 1974-11-29 1985-02-23 カナデイアン、パテンツ、アンド、デイベラツプメント、リミテツド 熱電子放射陰極
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
US4258283A (en) * 1978-08-31 1981-03-24 Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten Cathode for electron emission
DE2851743C2 (de) * 1978-11-30 1980-08-28 Kernforschungsanlage Juelich Gmbh, 5170 Juelich ElektronenstoBspektrometer
JPS55109343A (en) * 1979-02-16 1980-08-22 Chiyou Lsi Gijutsu Kenkyu Kumiai Cathode for electron gun
JPH0624091B2 (ja) * 1984-06-20 1994-03-30 株式会社東芝 酸化物陰極構体
GB9720350D0 (en) * 1997-09-24 1997-11-26 Welding Inst Improvements relating to charged particle beams
UA28130C2 (uk) * 1998-11-09 2000-10-16 Товариство З Обмеженою Відповідальністю "Нікос-Еко" Катодний вузол прямого розжарення для електронно-променевих приладів
US6448569B1 (en) * 1999-06-22 2002-09-10 Agere Systems Guardian Corporation Bonded article having improved crystalline structure and work function uniformity and method for making the same
US6528799B1 (en) * 2000-10-20 2003-03-04 Lucent Technologies, Inc. Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems
JP4486746B2 (ja) * 2000-12-22 2010-06-23 新日本無線株式会社 タングステンからなる部材の接合方法
JP4018468B2 (ja) * 2002-07-15 2007-12-05 新日本無線株式会社 陰極およびその製造方法
JP2006221983A (ja) * 2005-02-10 2006-08-24 Nuflare Technology Inc 荷電粒子発生装置と荷電粒子発生装置用エミッタ温度決定方法
EP2680294B1 (en) * 2011-02-25 2015-09-09 Param Corporation Electron gun and electron beam device
CN102629538B (zh) * 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料
US10192708B2 (en) * 2015-11-20 2019-01-29 Oregon Physics, Llc Electron emitter source
GB2560966A (en) * 2017-03-30 2018-10-03 Aquasium Tech Limited Electron beam emitting assembly

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