JP2022530418A5 - - Google Patents

Info

Publication number
JP2022530418A5
JP2022530418A5 JP2021563067A JP2021563067A JP2022530418A5 JP 2022530418 A5 JP2022530418 A5 JP 2022530418A5 JP 2021563067 A JP2021563067 A JP 2021563067A JP 2021563067 A JP2021563067 A JP 2021563067A JP 2022530418 A5 JP2022530418 A5 JP 2022530418A5
Authority
JP
Japan
Prior art keywords
filament
electron beam
cathode
filament element
beam emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021563067A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022530418A (ja
Filing date
Publication date
Priority claimed from GB1905758.7A external-priority patent/GB2583359A/en
Application filed filed Critical
Publication of JP2022530418A publication Critical patent/JP2022530418A/ja
Publication of JP2022530418A5 publication Critical patent/JP2022530418A5/ja
Pending legal-status Critical Current

Links

JP2021563067A 2019-04-25 2020-04-24 電子ビーム放射アセンブリ Pending JP2022530418A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1905758.7 2019-04-25
GB1905758.7A GB2583359A (en) 2019-04-25 2019-04-25 Electron beam emitting assembly
PCT/GB2020/051011 WO2020217062A1 (en) 2019-04-25 2020-04-24 Electron beam emitting assembly

Publications (2)

Publication Number Publication Date
JP2022530418A JP2022530418A (ja) 2022-06-29
JP2022530418A5 true JP2022530418A5 (https=) 2023-04-04

Family

ID=66810337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021563067A Pending JP2022530418A (ja) 2019-04-25 2020-04-24 電子ビーム放射アセンブリ

Country Status (5)

Country Link
US (1) US20220208506A1 (https=)
EP (1) EP3959737A1 (https=)
JP (1) JP2022530418A (https=)
GB (1) GB2583359A (https=)
WO (1) WO2020217062A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2619965A (en) * 2022-06-24 2023-12-27 Aquasium Tech Limited Electron beam emitting assembly
US12027340B2 (en) 2022-11-16 2024-07-02 Kimball Physics, Inc. Pincer mount cathode

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7003279A (https=) * 1970-03-07 1971-09-09
JPS607335B2 (ja) * 1974-11-29 1985-02-23 カナデイアン、パテンツ、アンド、デイベラツプメント、リミテツド 熱電子放射陰極
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
US4258283A (en) * 1978-08-31 1981-03-24 Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten Cathode for electron emission
DE2851743C2 (de) * 1978-11-30 1980-08-28 Kernforschungsanlage Juelich Gmbh, 5170 Juelich ElektronenstoBspektrometer
JPS55109343A (en) * 1979-02-16 1980-08-22 Chiyou Lsi Gijutsu Kenkyu Kumiai Cathode for electron gun
JPH0624091B2 (ja) * 1984-06-20 1994-03-30 株式会社東芝 酸化物陰極構体
GB9720350D0 (en) * 1997-09-24 1997-11-26 Welding Inst Improvements relating to charged particle beams
UA28130C2 (uk) * 1998-11-09 2000-10-16 Товариство З Обмеженою Відповідальністю "Нікос-Еко" Катодний вузол прямого розжарення для електронно-променевих приладів
US6448569B1 (en) * 1999-06-22 2002-09-10 Agere Systems Guardian Corporation Bonded article having improved crystalline structure and work function uniformity and method for making the same
US6528799B1 (en) * 2000-10-20 2003-03-04 Lucent Technologies, Inc. Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems
JP4486746B2 (ja) * 2000-12-22 2010-06-23 新日本無線株式会社 タングステンからなる部材の接合方法
JP4018468B2 (ja) * 2002-07-15 2007-12-05 新日本無線株式会社 陰極およびその製造方法
JP2006221983A (ja) * 2005-02-10 2006-08-24 Nuflare Technology Inc 荷電粒子発生装置と荷電粒子発生装置用エミッタ温度決定方法
EP2680294B1 (en) * 2011-02-25 2015-09-09 Param Corporation Electron gun and electron beam device
CN102629538B (zh) * 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料
US10192708B2 (en) * 2015-11-20 2019-01-29 Oregon Physics, Llc Electron emitter source
GB2560966A (en) * 2017-03-30 2018-10-03 Aquasium Tech Limited Electron beam emitting assembly

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