JP2022530418A - 電子ビーム放射アセンブリ - Google Patents

電子ビーム放射アセンブリ Download PDF

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Publication number
JP2022530418A
JP2022530418A JP2021563067A JP2021563067A JP2022530418A JP 2022530418 A JP2022530418 A JP 2022530418A JP 2021563067 A JP2021563067 A JP 2021563067A JP 2021563067 A JP2021563067 A JP 2021563067A JP 2022530418 A JP2022530418 A JP 2022530418A
Authority
JP
Japan
Prior art keywords
filament
cathode
electron beam
temperature
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021563067A
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English (en)
Japanese (ja)
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JPWO2020217062A5 (https=
JP2022530418A5 (https=
Inventor
オファーレル，アレックス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aquasium Technology Ltd
Original Assignee
Aquasium Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aquasium Technology Ltd filed Critical Aquasium Technology Ltd
Publication of JP2022530418A publication Critical patent/JP2022530418A/ja
Publication of JPWO2020217062A5 publication Critical patent/JPWO2020217062A5/ja
Publication of JP2022530418A5 publication Critical patent/JP2022530418A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/315—Electron-beam or ion-beam tubes for localised treatment of objects for welding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)
JP2021563067A 2019-04-25 2020-04-24 電子ビーム放射アセンブリ Pending JP2022530418A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1905758.7 2019-04-25
GB1905758.7A GB2583359A (en) 2019-04-25 2019-04-25 Electron beam emitting assembly
PCT/GB2020/051011 WO2020217062A1 (en) 2019-04-25 2020-04-24 Electron beam emitting assembly

Publications (3)

Publication Number Publication Date
JP2022530418A true JP2022530418A (ja) 2022-06-29
JPWO2020217062A5 JPWO2020217062A5 (https=) 2023-04-04
JP2022530418A5 JP2022530418A5 (https=) 2023-04-04

Family

ID=66810337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021563067A Pending JP2022530418A (ja) 2019-04-25 2020-04-24 電子ビーム放射アセンブリ

Country Status (5)

Country Link
US (1) US20220208506A1 (https=)
EP (1) EP3959737A1 (https=)
JP (1) JP2022530418A (https=)
GB (1) GB2583359A (https=)
WO (1) WO2020217062A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2619965A (en) * 2022-06-24 2023-12-27 Aquasium Tech Limited Electron beam emitting assembly
WO2024107834A1 (en) * 2022-11-16 2024-05-23 Kimball Physics, Inc. Pincer mount cathode

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55109343A (en) * 1979-02-16 1980-08-22 Chiyou Lsi Gijutsu Kenkyu Kumiai Cathode for electron gun
EP1063670A2 (en) * 1999-06-22 2000-12-27 Lucent Technologies Inc. Bonded article with improved work function uniformity and method for making the same
JP2001517857A (ja) * 1997-09-24 2001-10-09 ザ ウェルディング インスティテュート 荷電粒子ビームに関する改善
JP2002192381A (ja) * 2000-12-22 2002-07-10 New Japan Radio Co Ltd 高融点ろう材ならびにそれを用いたろう接方法およびカソード
JP2002529899A (ja) * 1998-11-09 2002-09-10 サムスン エスディアイ カンパニー リミテッド 直熱型陰極ユニットとこれを用いた電子銃
JP2004047365A (ja) * 2002-07-15 2004-02-12 New Japan Radio Co Ltd 陰極およびその製造方法
US20170148605A1 (en) * 2015-11-20 2017-05-25 Oregon Physics, Llc Electron emitter source

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7003279A (https=) * 1970-03-07 1971-09-09
JPS607335B2 (ja) * 1974-11-29 1985-02-23 カナデイアン、パテンツ、アンド、デイベラツプメント、リミテツド 熱電子放射陰極
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
US4258283A (en) * 1978-08-31 1981-03-24 Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten Cathode for electron emission
DE2851743C2 (de) * 1978-11-30 1980-08-28 Kernforschungsanlage Juelich Gmbh, 5170 Juelich ElektronenstoBspektrometer
JPH0624091B2 (ja) * 1984-06-20 1994-03-30 株式会社東芝 酸化物陰極構体
US6528799B1 (en) * 2000-10-20 2003-03-04 Lucent Technologies, Inc. Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems
JP2006221983A (ja) * 2005-02-10 2006-08-24 Nuflare Technology Inc 荷電粒子発生装置と荷電粒子発生装置用エミッタ温度決定方法
EP2680294B1 (en) * 2011-02-25 2015-09-09 Param Corporation Electron gun and electron beam device
CN102629538B (zh) * 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料
GB2560966A (en) * 2017-03-30 2018-10-03 Aquasium Tech Limited Electron beam emitting assembly

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55109343A (en) * 1979-02-16 1980-08-22 Chiyou Lsi Gijutsu Kenkyu Kumiai Cathode for electron gun
JP2001517857A (ja) * 1997-09-24 2001-10-09 ザ ウェルディング インスティテュート 荷電粒子ビームに関する改善
JP2002529899A (ja) * 1998-11-09 2002-09-10 サムスン エスディアイ カンパニー リミテッド 直熱型陰極ユニットとこれを用いた電子銃
EP1063670A2 (en) * 1999-06-22 2000-12-27 Lucent Technologies Inc. Bonded article with improved work function uniformity and method for making the same
JP2002192381A (ja) * 2000-12-22 2002-07-10 New Japan Radio Co Ltd 高融点ろう材ならびにそれを用いたろう接方法およびカソード
JP2004047365A (ja) * 2002-07-15 2004-02-12 New Japan Radio Co Ltd 陰極およびその製造方法
US20170148605A1 (en) * 2015-11-20 2017-05-25 Oregon Physics, Llc Electron emitter source

Also Published As

Publication number Publication date
GB201905758D0 (en) 2019-06-05
EP3959737A1 (en) 2022-03-02
WO2020217062A1 (en) 2020-10-29
GB2583359A (en) 2020-10-28
US20220208506A1 (en) 2022-06-30

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