GB2583359A - Electron beam emitting assembly - Google Patents

Electron beam emitting assembly Download PDF

Info

Publication number
GB2583359A
GB2583359A GB1905758.7A GB201905758A GB2583359A GB 2583359 A GB2583359 A GB 2583359A GB 201905758 A GB201905758 A GB 201905758A GB 2583359 A GB2583359 A GB 2583359A
Authority
GB
United Kingdom
Prior art keywords
filament
cathode
electron beam
emitting assembly
beam emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB1905758.7A
Other languages
English (en)
Other versions
GB201905758D0 (en
Inventor
O'farrell Alex
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aquasium Technology Ltd
Original Assignee
Aquasium Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aquasium Technology Ltd filed Critical Aquasium Technology Ltd
Priority to GB1905758.7A priority Critical patent/GB2583359A/en
Publication of GB201905758D0 publication Critical patent/GB201905758D0/en
Priority to JP2021563067A priority patent/JP2022530418A/ja
Priority to PCT/GB2020/051011 priority patent/WO2020217062A1/en
Priority to EP20723491.5A priority patent/EP3959737A1/en
Priority to US17/605,886 priority patent/US20220208506A1/en
Publication of GB2583359A publication Critical patent/GB2583359A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/315—Electron-beam or ion-beam tubes for localised treatment of objects for welding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)
GB1905758.7A 2019-04-25 2019-04-25 Electron beam emitting assembly Withdrawn GB2583359A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB1905758.7A GB2583359A (en) 2019-04-25 2019-04-25 Electron beam emitting assembly
JP2021563067A JP2022530418A (ja) 2019-04-25 2020-04-24 電子ビーム放射アセンブリ
PCT/GB2020/051011 WO2020217062A1 (en) 2019-04-25 2020-04-24 Electron beam emitting assembly
EP20723491.5A EP3959737A1 (en) 2019-04-25 2020-04-24 Electron beam emitting assembly
US17/605,886 US20220208506A1 (en) 2019-04-25 2020-04-24 Electron beam emitting assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1905758.7A GB2583359A (en) 2019-04-25 2019-04-25 Electron beam emitting assembly

Publications (2)

Publication Number Publication Date
GB201905758D0 GB201905758D0 (en) 2019-06-05
GB2583359A true GB2583359A (en) 2020-10-28

Family

ID=66810337

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1905758.7A Withdrawn GB2583359A (en) 2019-04-25 2019-04-25 Electron beam emitting assembly

Country Status (5)

Country Link
US (1) US20220208506A1 (https=)
EP (1) EP3959737A1 (https=)
JP (1) JP2022530418A (https=)
GB (1) GB2583359A (https=)
WO (1) WO2020217062A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2619965A (en) * 2022-06-24 2023-12-27 Aquasium Tech Limited Electron beam emitting assembly
WO2024107834A1 (en) * 2022-11-16 2024-05-23 Kimball Physics, Inc. Pincer mount cathode

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1284047A (en) * 1970-03-07 1972-08-02 Philips Electronic Associated Cathode
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
GB2036421A (en) * 1978-11-30 1980-06-25 Kernforschungsanlage Juelich Electron impact spectrometer
EP1018137A2 (en) * 1997-09-24 2000-07-12 The Welding Institute Charged particle beam emitting assembly
EP1063670A2 (en) * 1999-06-22 2000-12-27 Lucent Technologies Inc. Bonded article with improved work function uniformity and method for making the same
EP1199739A2 (en) * 2000-10-20 2002-04-24 eLith LLC A device and method for suppressing space charge induced abberations in charged-particle projection lithography systems
JP2006221983A (ja) * 2005-02-10 2006-08-24 Nuflare Technology Inc 荷電粒子発生装置と荷電粒子発生装置用エミッタ温度決定方法
US20170148605A1 (en) * 2015-11-20 2017-05-25 Oregon Physics, Llc Electron emitter source
GB2560966A (en) * 2017-03-30 2018-10-03 Aquasium Tech Limited Electron beam emitting assembly

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607335B2 (ja) * 1974-11-29 1985-02-23 カナデイアン、パテンツ、アンド、デイベラツプメント、リミテツド 熱電子放射陰極
US4258283A (en) * 1978-08-31 1981-03-24 Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten Cathode for electron emission
JPS55109343A (en) * 1979-02-16 1980-08-22 Chiyou Lsi Gijutsu Kenkyu Kumiai Cathode for electron gun
JPH0624091B2 (ja) * 1984-06-20 1994-03-30 株式会社東芝 酸化物陰極構体
UA28130C2 (uk) * 1998-11-09 2000-10-16 Товариство З Обмеженою Відповідальністю "Нікос-Еко" Катодний вузол прямого розжарення для електронно-променевих приладів
JP4486746B2 (ja) * 2000-12-22 2010-06-23 新日本無線株式会社 タングステンからなる部材の接合方法
JP4018468B2 (ja) * 2002-07-15 2007-12-05 新日本無線株式会社 陰極およびその製造方法
EP2680294B1 (en) * 2011-02-25 2015-09-09 Param Corporation Electron gun and electron beam device
CN102629538B (zh) * 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1284047A (en) * 1970-03-07 1972-08-02 Philips Electronic Associated Cathode
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
GB2036421A (en) * 1978-11-30 1980-06-25 Kernforschungsanlage Juelich Electron impact spectrometer
EP1018137A2 (en) * 1997-09-24 2000-07-12 The Welding Institute Charged particle beam emitting assembly
EP1063670A2 (en) * 1999-06-22 2000-12-27 Lucent Technologies Inc. Bonded article with improved work function uniformity and method for making the same
EP1199739A2 (en) * 2000-10-20 2002-04-24 eLith LLC A device and method for suppressing space charge induced abberations in charged-particle projection lithography systems
JP2006221983A (ja) * 2005-02-10 2006-08-24 Nuflare Technology Inc 荷電粒子発生装置と荷電粒子発生装置用エミッタ温度決定方法
US20170148605A1 (en) * 2015-11-20 2017-05-25 Oregon Physics, Llc Electron emitter source
GB2560966A (en) * 2017-03-30 2018-10-03 Aquasium Tech Limited Electron beam emitting assembly

Also Published As

Publication number Publication date
GB201905758D0 (en) 2019-06-05
JP2022530418A (ja) 2022-06-29
EP3959737A1 (en) 2022-03-02
WO2020217062A1 (en) 2020-10-29
US20220208506A1 (en) 2022-06-30

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)