JP2022514222A5 - - Google Patents

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Publication number
JP2022514222A5
JP2022514222A5 JP2021533423A JP2021533423A JP2022514222A5 JP 2022514222 A5 JP2022514222 A5 JP 2022514222A5 JP 2021533423 A JP2021533423 A JP 2021533423A JP 2021533423 A JP2021533423 A JP 2021533423A JP 2022514222 A5 JP2022514222 A5 JP 2022514222A5
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JP
Japan
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composition
composition according
surfactant
weight
less
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JP2021533423A
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English (en)
Japanese (ja)
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JP2022514222A (ja
JP7507155B2 (ja
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Priority claimed from PCT/IB2019/060716 external-priority patent/WO2020121248A1/en
Publication of JP2022514222A publication Critical patent/JP2022514222A/ja
Publication of JP2022514222A5 publication Critical patent/JP2022514222A5/ja
Application granted granted Critical
Publication of JP7507155B2 publication Critical patent/JP7507155B2/ja
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JP2021533423A 2018-12-12 2019-12-12 フッ素化アミンオキシド界面活性剤 Active JP7507155B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862778565P 2018-12-12 2018-12-12
US62/778,565 2018-12-12
PCT/IB2019/060716 WO2020121248A1 (en) 2018-12-12 2019-12-12 Fluorinated amine oxide surfactants

Publications (3)

Publication Number Publication Date
JP2022514222A JP2022514222A (ja) 2022-02-10
JP2022514222A5 true JP2022514222A5 (enExample) 2022-12-21
JP7507155B2 JP7507155B2 (ja) 2024-06-27

Family

ID=69158147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021533423A Active JP7507155B2 (ja) 2018-12-12 2019-12-12 フッ素化アミンオキシド界面活性剤

Country Status (5)

Country Link
US (1) US20220040655A1 (enExample)
JP (1) JP7507155B2 (enExample)
CN (1) CN113166634A (enExample)
TW (1) TW202035361A (enExample)
WO (1) WO2020121248A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114350366B (zh) * 2021-12-09 2023-04-18 湖北兴福电子材料股份有限公司 一种氮化硅与p型多晶硅等速蚀刻液
TWI895691B (zh) * 2023-02-14 2025-09-01 關東鑫林科技股份有限公司 蝕刻液組成物及使用其之蝕刻方法
CN118496473A (zh) * 2024-05-22 2024-08-16 智仑新材料科技（西安）有限公司 一种低氯环氧树脂的制备方法及一种除氯剂的制备方法

Family Cites Families (26)

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US2759019A (en) * 1954-08-09 1956-08-14 Minnesota Mining & Mfg Perfluoro amine compounds and quaternary derivatives
GB1302612A (enExample) * 1969-02-19 1973-01-10
US3772195A (en) * 1969-06-12 1973-11-13 Minnesota Mining & Mfg Fire extinguishing composition comprising a fluoroaliphatic surfactant fluorine-free surfactant
EP0621057B1 (fr) * 1993-04-23 1996-11-13 Elf Atochem S.A. Emulseurs pour extincteurs d'incendie portatifs
WO1997046283A1 (en) * 1996-06-06 1997-12-11 Minnesota Mining And Manufacturing Company Fire-fighting agents containing adsorbable fluorocarbon surfactants
JP2001525234A (ja) * 1997-12-10 2001-12-11 ミネソタ マイニング アンド マニュファクチャリング カンパニー 吸着性フルオロカーボン界面活性剤を含有する消火剤
US6890452B2 (en) * 2002-11-08 2005-05-10 3M Innovative Properties Company Fluorinated surfactants for aqueous acid etch solutions
US7169323B2 (en) * 2002-11-08 2007-01-30 3M Innovative Properties Company Fluorinated surfactants for buffered acid etch solutions
US7294610B2 (en) * 2004-03-03 2007-11-13 3M Innovative Properties Company Fluorinated sulfonamide surfactants for aqueous cleaning solutions
US7160850B2 (en) * 2004-12-30 2007-01-09 3M Innovative Properties Company Compositions of monomeric surfactants
GB0523853D0 (en) * 2005-11-24 2006-01-04 3M Innovative Properties Co Fluorinated surfactants for use in making a fluoropolymer
US7547732B2 (en) * 2005-08-30 2009-06-16 3M Innovative Properties Company Compositions of fluorochemical surfactants
JP2007088258A (ja) * 2005-09-22 2007-04-05 Fujifilm Corp 金属研磨液及びそれを用いる研磨方法
JP2007106958A (ja) * 2005-10-17 2007-04-26 Asahi Glass Co Ltd フッ素系界面活性剤
US7425374B2 (en) * 2005-12-22 2008-09-16 3M Innovative Properties Company Fluorinated surfactants
CN101522733A (zh) * 2006-10-12 2009-09-02 3M创新有限公司 氟化表面活性剂及其制备方法
US8591764B2 (en) * 2006-12-20 2013-11-26 3M Innovative Properties Company Chemical mechanical planarization composition, system, and method of use
WO2008147796A1 (en) * 2007-05-23 2008-12-04 3M Innovative Properties Company Aqueous compositions of fluorinated surfactants and methods of using the same
US20130161284A1 (en) * 2010-09-08 2013-06-27 Mitsubishi Gas Chemical Company, Inc. Treatment liquid for inhibiting pattern collapse in microstructures, and microstructure manufacturing method using said treatment liquid
JP5767796B2 (ja) * 2010-09-28 2015-08-19 林純薬工業株式会社 エッチング液組成物およびエッチング方法
CN104955854B (zh) * 2013-01-29 2017-09-05 3M创新有限公司 表面活性剂及其制备和使用方法
WO2017100045A1 (en) 2015-12-11 2017-06-15 3M Innovative Properties Company Fluorinated piperazine sulfonamides
KR102083151B1 (ko) * 2016-06-20 2020-03-03 에이제트 일렉트로닉 머티어리얼스 (룩셈부르크) 에스.에이.알.엘. 린스 조성물, 레지스트 패턴의 형성 방법 및 반도체 디바이스의 제조 방법
KR20190039789A (ko) * 2016-10-04 2019-04-15 디아이씨 가부시끼가이샤 소화약제
US10822458B2 (en) * 2017-02-08 2020-11-03 Versum Materials Us, Llc Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films
JP7165017B2 (ja) * 2018-10-03 2022-11-02 三菱マテリアル電子化成株式会社 ペルフルオロエーテル含有化合物及びノニオン系含フッ素界面活性剤

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