JP2022173295A5 - - Google Patents
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- JP2022173295A5 JP2022173295A5 JP2022146662A JP2022146662A JP2022173295A5 JP 2022173295 A5 JP2022173295 A5 JP 2022173295A5 JP 2022146662 A JP2022146662 A JP 2022146662A JP 2022146662 A JP2022146662 A JP 2022146662A JP 2022173295 A5 JP2022173295 A5 JP 2022173295A5
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- Prior art keywords
- velocity
- scanning system
- optical scanning
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- 230000003287 optical effect Effects 0.000 claims description 82
- 238000000034 method Methods 0.000 claims description 59
- 239000000758 substrate Substances 0.000 claims description 32
- 238000003384 imaging method Methods 0.000 claims description 8
- 238000012937 correction Methods 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 2
- 230000001939 inductive effect Effects 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 description 19
- 238000005286 illumination Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762467048P | 2017-03-03 | 2017-03-03 | |
| US62/467,048 | 2017-03-03 | ||
| PCT/US2018/020737 WO2018161013A1 (en) | 2017-03-03 | 2018-03-02 | High speed scanning system with acceleration tracking |
| JP2019568593A JP7144457B2 (ja) | 2017-03-03 | 2018-03-02 | 加速度追跡による高速走査システム |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019568593A Division JP7144457B2 (ja) | 2017-03-03 | 2018-03-02 | 加速度追跡による高速走査システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022173295A JP2022173295A (ja) | 2022-11-18 |
| JP2022173295A5 true JP2022173295A5 (enExample) | 2023-09-01 |
| JP7644738B2 JP7644738B2 (ja) | 2025-03-12 |
Family
ID=63355049
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019568593A Active JP7144457B2 (ja) | 2017-03-03 | 2018-03-02 | 加速度追跡による高速走査システム |
| JP2022146662A Active JP7644738B2 (ja) | 2017-03-03 | 2022-09-15 | 加速度追跡による高速走査システム |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019568593A Active JP7144457B2 (ja) | 2017-03-03 | 2018-03-02 | 加速度追跡による高速走査システム |
Country Status (6)
| Country | Link |
|---|---|
| US (5) | US10585296B2 (enExample) |
| EP (2) | EP3589998B1 (enExample) |
| JP (2) | JP7144457B2 (enExample) |
| CN (2) | CN114967111A (enExample) |
| CA (1) | CA3055249A1 (enExample) |
| WO (1) | WO2018161013A1 (enExample) |
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| US10829816B2 (en) | 2012-11-19 | 2020-11-10 | Apton Biosystems, Inc. | Methods of analyte detection |
| DK2920725T3 (da) | 2012-11-19 | 2022-02-07 | Apton Biosystems Inc | Digital analyse af molekylære analytter ved hjælp af enkeltmolekyledetektering |
| MX2016002210A (es) | 2013-08-22 | 2016-06-06 | Apton Biosystems Inc | Analisis digital de analitos moleculares usando metodos electricos. |
| JP7144457B2 (ja) | 2017-03-03 | 2022-09-29 | アプトン バイオシステムズ インコーポレイテッド | 加速度追跡による高速走査システム |
| CN114921537A (zh) | 2017-03-17 | 2022-08-19 | 雅普顿生物系统公司 | 测序和高分辨率成像 |
| US11095809B2 (en) * | 2018-03-30 | 2021-08-17 | Drs Network & Imaging Systems, Llc | Method and system for scanning of a focal plane array during earth observation imaging |
| EP3853382A4 (en) | 2018-09-19 | 2022-06-22 | Apton Biosystems, Inc. | Densely-packed analyte layers and detection methods |
| US11421272B2 (en) * | 2018-12-26 | 2022-08-23 | Genemind Biosciences Company Limited | Positioning method, positioning apparatus and sequencing system |
| CN110361827B (zh) * | 2019-06-14 | 2020-05-12 | 中国科学院西安光学精密机械研究所 | 一种降低两轴快速反射镜中x轴和y轴耦合的控制方法 |
| US12228716B2 (en) * | 2019-09-02 | 2025-02-18 | Leica Microsystems Cms Gmbh | Microscope and method for imaging an object using a microscope |
| AU2020341679A1 (en) | 2019-09-05 | 2022-04-21 | Pacific Biosciences Of California, Inc. | High speed scanning systems for super resolution imaging |
| US11647287B1 (en) | 2019-12-03 | 2023-05-09 | Waymo Llc | Autofocus actuator |
| US11223756B1 (en) | 2019-12-03 | 2022-01-11 | Waymo Llc | Position sensor and hybrid substrate for camera focus management |
| EP4093574A1 (en) * | 2020-01-24 | 2022-11-30 | Novanta Corporation | Systems and methods for improving accuracy in large area laser processing using position feedforward compensation |
| CN111596456A (zh) * | 2020-05-08 | 2020-08-28 | 山东大学 | 一种激光指向稳定控制系统 |
| EP3913906A1 (en) * | 2020-05-18 | 2021-11-24 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO | Physical object processing system and method |
| WO2022098553A1 (en) | 2020-11-06 | 2022-05-12 | Illumina, Inc. | Apparatus and method of obtaining an image of a sample in motion |
| CN116457689B (zh) * | 2020-11-19 | 2025-11-11 | 株式会社电装 | 光学测距装置 |
| CN113253471B (zh) * | 2021-07-12 | 2022-04-29 | 清华大学 | 旋转式三维光激发装置 |
| TW202336423A (zh) | 2021-10-01 | 2023-09-16 | 美商伊路米納有限公司 | 用於傳輸光之設備及方法 |
| US11680786B2 (en) | 2021-11-05 | 2023-06-20 | Waymo Llc | Capacitive position sensing for camera focus management |
| CN116953904A (zh) * | 2022-04-18 | 2023-10-27 | 南京微纳科技研究院有限公司 | 光学系统、三维成像系统及三维成像方法 |
| KR102804207B1 (ko) * | 2022-10-04 | 2025-05-09 | 세메스 주식회사 | 기판 검사 장치 및 방법 |
| JP2024064598A (ja) | 2022-10-28 | 2024-05-14 | 三菱重工業株式会社 | アンモニア除害システム、浮体、及びアンモニア除害方法 |
| WO2024102889A1 (en) * | 2022-11-10 | 2024-05-16 | Ultima Genomics, Inc. | Methods and systems for counter scan area mode imaging |
| CN116091341B (zh) * | 2022-12-15 | 2024-04-02 | 南京信息工程大学 | 一种低光图像的曝光差增强方法及装置 |
| US12327741B2 (en) * | 2023-02-28 | 2025-06-10 | Kla Corporation | Oscillating secondary stage for frame-mode overlay metrology |
| US20250102822A1 (en) * | 2023-09-27 | 2025-03-27 | Onto Innovation Inc. | Blur reduction techniques for semiconductor inspection |
| TWI884657B (zh) * | 2023-12-27 | 2025-05-21 | 錼創顯示科技股份有限公司 | 加工與檢測設備及檢測設備 |
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| US4516023A (en) | 1982-06-03 | 1985-05-07 | Klimsch/Optronics | Scanner/plotter optical system |
| DD285836A5 (de) * | 1989-07-05 | 1991-01-03 | Veb Carl Zeiss Jena,Dd | Verfahren zur geometrieinvarianten bilderzeugung |
| JPH09250912A (ja) * | 1996-03-14 | 1997-09-22 | Nikon Corp | パターン測定装置 |
| EP1028456A4 (en) * | 1997-09-19 | 2003-03-05 | Nikon Corp | CARRIER DEVICE, SCAN ALIGNER, AND SCAN EXPOSURE METHOD, AND A COMPONENT MADE THEREOF |
| FR2784189B3 (fr) * | 1998-10-05 | 2000-11-03 | Commissariat Energie Atomique | Biopuce et dispositif de lecture d'une biopuce comportant une pluralite de zones de reconnaissance moleculaire |
| JP4348455B2 (ja) * | 1998-12-09 | 2009-10-21 | レーザーテック株式会社 | 撮像装置 |
| US6555169B2 (en) | 2000-04-25 | 2003-04-29 | William Tenckhoff | System and method for masking door hinges during painting |
| JP3859459B2 (ja) * | 2000-04-26 | 2006-12-20 | 松下電器産業株式会社 | 撮像装置 |
| JP2001332595A (ja) | 2000-05-25 | 2001-11-30 | Sony Corp | 焦点合わせ制御機構及びこれを用いた検査装置 |
| US7561270B2 (en) | 2000-08-24 | 2009-07-14 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and device manufactured thereby |
| US6624894B2 (en) * | 2001-06-25 | 2003-09-23 | Veeco Instruments Inc. | Scanning interferometry with reference signal |
| JP2006106378A (ja) * | 2004-10-06 | 2006-04-20 | Yokogawa Electric Corp | 共焦点顕微鏡 |
| JP2007194779A (ja) * | 2006-01-18 | 2007-08-02 | Pentax Corp | 三次元撮影装置 |
| US8084706B2 (en) | 2006-07-20 | 2011-12-27 | Gsi Group Corporation | System and method for laser processing at non-constant velocities |
| EP2434327A1 (en) * | 2006-12-22 | 2012-03-28 | Nikon Corporation | Laser scan confocal microscope |
| US8115170B2 (en) * | 2007-01-09 | 2012-02-14 | International Business Machines Corporation | Method and apparatus for creating time-resolved emission images of integrated circuits using a single-point single-photon detector and a scanning system |
| US8089436B1 (en) * | 2007-02-21 | 2012-01-03 | Lockheed Martin Corporation | Image stability in liquid crystal displays |
| EP2291539B1 (en) * | 2008-06-25 | 2018-03-14 | Okura, Michael | Apparatus for melting curve analysis of nucleic acids in microarray format |
| BRPI0917740A2 (pt) * | 2008-12-15 | 2016-02-16 | Koninkl Philips Electronics Nv | microscópio de varredura |
| US7924422B2 (en) * | 2009-02-12 | 2011-04-12 | Tokyo Electron Limited | Calibration method for optical metrology |
| JP5574792B2 (ja) * | 2010-04-13 | 2014-08-20 | キヤノン株式会社 | 撮影装置 |
| US8428390B2 (en) * | 2010-06-14 | 2013-04-23 | Microsoft Corporation | Generating sharp images, panoramas, and videos from motion-blurred videos |
| SG2014011217A (en) * | 2011-09-09 | 2014-06-27 | Ventana Med Syst Inc | Focus and imaging system and techniques using error signal |
| JP2013152429A (ja) | 2011-12-27 | 2013-08-08 | Canon Inc | 画像処理装置、画像処理方法、およびプログラム |
| US9628676B2 (en) * | 2012-06-07 | 2017-04-18 | Complete Genomics, Inc. | Imaging systems with movable scan mirrors |
| US9488823B2 (en) | 2012-06-07 | 2016-11-08 | Complete Genomics, Inc. | Techniques for scanned illumination |
| DK2920725T3 (da) | 2012-11-19 | 2022-02-07 | Apton Biosystems Inc | Digital analyse af molekylære analytter ved hjælp af enkeltmolekyledetektering |
| WO2014190027A1 (en) * | 2013-05-22 | 2014-11-27 | Massachusetts Institute Of Technology | Methods, systems, and apparatus for imaging spectroscopy |
| US10136063B2 (en) * | 2013-07-12 | 2018-11-20 | Hanwha Aerospace Co., Ltd | Image stabilizing method and apparatus |
| US9581798B2 (en) * | 2013-07-22 | 2017-02-28 | Fundacio Institut De Ciencies Fotoniques | Light sheet-based imaging device with extended depth of field |
| JP5729622B2 (ja) * | 2013-10-22 | 2015-06-03 | 国立大学法人 東京大学 | ブラーレス画像撮像システム |
| US9581640B2 (en) * | 2014-10-08 | 2017-02-28 | Eastman Kodak Company | Vision-guided alignment method |
| JP7144457B2 (ja) | 2017-03-03 | 2022-09-29 | アプトン バイオシステムズ インコーポレイテッド | 加速度追跡による高速走査システム |
| CN114921537A (zh) | 2017-03-17 | 2022-08-19 | 雅普顿生物系统公司 | 测序和高分辨率成像 |
| CN110031907B (zh) | 2019-04-18 | 2024-09-20 | 西安天和防务技术股份有限公司 | 光机扫描成像系统 |
| AU2020341679A1 (en) | 2019-09-05 | 2022-04-21 | Pacific Biosciences Of California, Inc. | High speed scanning systems for super resolution imaging |
-
2018
- 2018-03-02 JP JP2019568593A patent/JP7144457B2/ja active Active
- 2018-03-02 CA CA3055249A patent/CA3055249A1/en active Pending
- 2018-03-02 EP EP18761316.1A patent/EP3589998B1/en active Active
- 2018-03-02 CN CN202210394627.4A patent/CN114967111A/zh active Pending
- 2018-03-02 WO PCT/US2018/020737 patent/WO2018161013A1/en not_active Ceased
- 2018-03-02 US US15/910,778 patent/US10585296B2/en active Active
- 2018-03-02 CN CN201880029286.2A patent/CN110582715B/zh active Active
- 2018-03-02 EP EP23192806.0A patent/EP4296654A3/en active Pending
-
2020
- 2020-01-14 US US16/742,783 patent/US20200393691A1/en not_active Abandoned
-
2022
- 2022-01-13 US US17/575,242 patent/US20220214557A1/en not_active Abandoned
- 2022-09-15 JP JP2022146662A patent/JP7644738B2/ja active Active
-
2023
- 2023-06-09 US US18/207,962 patent/US12259564B2/en active Active
-
2025
- 2025-01-09 US US19/014,928 patent/US20250172820A1/en active Pending
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